公开(公告)号：US07022984B1

公开(公告)日：2006-04-04

申请号：US11047238

申请日：2005-01-31

申请人： Robert D. Rathmell ,  Bo H. Vanderberg ,  Youngzhang Huang

发明人： Robert D. Rathmell ,  Bo H. Vanderberg ,  Youngzhang Huang

IPC分类号： H01J40/00 ,  H01J47/00 ,  G21G51/00

CPC分类号： H01J37/3171 ,  H01J37/05 ,  H01J2237/053 ,  H01J2237/303 ,  H01J2237/31705

摘要： Angular electrostatic filters and methods of filtering that remove energy contaminants from a ribbon shaped ion beam are disclosed. An angular electrostatic filter comprises a top deflection plate and a bottom deflection plate extending from an entrance side to an exit side of the filter. The bottom deflection plate is substantially parallel to the top deflection plate and includes an angle portion. An entrance focus electrode is positioned on the entrance side of the filter and an exit focus electrode is positioned on the exit side of the filter and both serve to focus the ion beam. Edge electrodes are positioned between the top and bottom deflection plates and at sides of the filter to mitigate edge effects. A negative bias is also applied to the top and bottom plates to mitigate space charge by elevating the beam energy.

摘要翻译： 公开了角膜静电过滤器和从带状离子束去除能量污染物的过滤方法。 角度静电过滤器包括顶部偏转板和从过滤器的入口侧到出口侧延伸的底部偏转板。 底部偏转板基本上平行于顶部偏转板并且包括角部分。 入口聚焦电极位于过滤器的入口侧，出射聚焦电极位于过滤器的出口侧，并且两者都用于聚焦离子束。 边缘电极位于顶部和底部偏转板之间以及位于过滤器侧面以减轻边缘效应。 顶板和底板也施加负偏压，以通过提升光束能量来减轻空间电荷。

公开(公告)号：US20050045835A1

公开(公告)日：2005-03-03

申请号：US10654168

申请日：2003-09-03

申请人： William DiVergilio ,  Youngzhang Huang

发明人： William DiVergilio ,  Youngzhang Huang

IPC分类号： H01J37/12 ,  H01J37/153 ,  H01J37/317

CPC分类号： H01J37/12 ,  H01J37/153 ,  H01J37/3171 ,  H01J2237/04735 ,  H01J2237/04737 ,  H01J2237/04924

摘要： The present invention mitigates loss of beam current, particularly for low energy ion beam transport. The present invention employs unipolar electrostatic quadrupole lenses instead of conventional dual positive and negative potential (bipolar) quadrupole lenses as beam focusing elements within a linear accelerator, reducing beam current losses therein. In addition, the present invention also includes systems and methods for switching between bipolar wiring and unipolar wiring.

摘要翻译： 本发明减轻了束流的损失，特别是对于低能离子束传输。 本发明采用单极静电四极透镜，而不是常规的双正极和负极（双极）四极透镜作为线性加速器内的束聚焦元件，减少了其中的束电流损耗。 此外，本发明还包括用于在双极布线和单极布线之间切换的系统和方法。

公开(公告)号：US06949895B2

公开(公告)日：2005-09-27

申请号：US10654168

申请日：2003-09-03

申请人： William F. DiVergilio ,  Youngzhang Huang

发明人： William F. DiVergilio ,  Youngzhang Huang

IPC分类号： H01J37/12 ,  H01J37/153 ,  H01J37/317 ,  H06H9/00

CPC分类号： H01J37/12 ,  H01J37/153 ,  H01J37/3171 ,  H01J2237/04735 ,  H01J2237/04737 ,  H01J2237/04924

摘要： A linear acceleration system comprises one or more accelerating stages along an axis and a unipolar electrostatic quadruple lens in series with the one or more accelerating stages. The unipolar electrostatic quadruple lens focuses an ion beam in a direction transverse to the axis. The unipolar electrostatic quadruple lens includes a switching circuit, a first pair of electrodes, and a second pair of electrodes. The switching circuit controllably connects to ground and a first voltage potential. The electrodes of the first pair are located opposite each other and are connected to the switching circuit. The electrodes of the second pair are also located opposite each other and connected to the switching circuit. The second pair of electrodes are biased to a second voltage potential.

摘要翻译： 线性加速系统包括沿轴线的一个或多个加速级和与一个或多个加速级串联的单极静电四极透镜。 单极静电四极透镜在垂直于轴线的方向上聚焦离子束。 单极静电四极透镜包括开关电路，第一对电极和第二对电极。 开关电路可控地连接到地和第一电压电位。 第一对的电极彼此相对定位并且连接到开关电路。 第二对的电极也彼此相对并且连接到开关电路。 第二对电极被偏压到第二电压电位。