Manufacturing procedure control method and system
    2.
    发明申请
    Manufacturing procedure control method and system 有权
    制造程序控制方法和系统

    公开(公告)号:US20060074508A1

    公开(公告)日:2006-04-06

    申请号:US10954699

    申请日:2004-09-30

    Applicant: Yuan-Li Liao

    Inventor: Yuan-Li Liao

    Abstract: A manufacturing procedure control method. The method executes tests during transport for object lots. The object lots are carried on a transport vehicle during transport. The object lots that pass the tests are loaded in a manufacturing tool. If a load port and a tag reader are provided on the transport vehicle, additional tests can be performed during transport of the object lots.

    Abstract translation: 制造程序控制方法。 该方法在运输期间执行对象批次的测试。 物品在运输过程中运送在运输车辆上。 通过测试的对象批量加载到制造工具中。 如果在运输车辆上设置了装载端口和标签读取器,则可以在运输对象批次期间执行额外的测试。

    System and method for semiconductor manufacturing automation
    3.
    发明授权
    System and method for semiconductor manufacturing automation 有权
    半导体制造自动化的系统和方法

    公开(公告)号:US07266417B2

    公开(公告)日:2007-09-04

    申请号:US10934171

    申请日:2004-09-03

    Applicant: Yuan-Li Liao

    Inventor: Yuan-Li Liao

    CPC classification number: G05B15/02

    Abstract: The present disclosure provides a method and system for semiconductor manufacturing automation. In one example, a method for semiconductor manufacturing automation comprises providing an identification table; defining a scheduled sequence; recording a performed sequence; and issuing a warning, if the scheduled sequence does not match the performed sequence.

    Abstract translation: 本公开提供了一种用于半导体制造自动化的方法和系统。 在一个示例中,用于半导体制造自动化的方法包括提供识别表; 定义预定序列; 记录执行顺序; 并发出警告,如果调度的序列与执行的序列不匹配。

    Manufacturing procedure control method and system
    5.
    发明授权
    Manufacturing procedure control method and system 有权
    制造程序控制方法和系统

    公开(公告)号:US07225042B2

    公开(公告)日:2007-05-29

    申请号:US10954699

    申请日:2004-09-30

    Applicant: Yuan-Li Liao

    Inventor: Yuan-Li Liao

    Abstract: A manufacturing procedure control method. The method executes tests during transport for object lots. The object lots are carried on a transport vehicle during transport. The object lots that pass the tests are loaded in a manufacturing tool. If a load port and a tag reader are provided on the transport vehicle, additional tests can be performed during transport of the object lots.

    Abstract translation: 制造程序控制方法。 该方法在运输期间执行对象批次的测试。 物品在运输过程中运送在运输车辆上。 通过测试的对象批量加载到制造工具中。 如果在运输车辆上设置了装载端口和标签读取器,则可以在运输对象批次期间执行额外的测试。

    System and method for semiconductor manufacturing automation
    6.
    发明申请
    System and method for semiconductor manufacturing automation 有权
    半导体制造自动化的系统和方法

    公开(公告)号:US20060052897A1

    公开(公告)日:2006-03-09

    申请号:US10934171

    申请日:2004-09-03

    Applicant: Yuan-Li Liao

    Inventor: Yuan-Li Liao

    CPC classification number: G05B15/02

    Abstract: The present disclosure provides a method and system for semiconductor manufacturing automation. In one example, a method for semiconductor manufacturing automation comprises providing an identification table; defining a scheduled sequence; recording a performed sequence; and issuing a warning, if the scheduled sequence does not match the performed sequence.

    Abstract translation: 本公开提供了一种用于半导体制造自动化的方法和系统。 在一个示例中,用于半导体制造自动化的方法包括提供识别表; 定义预定序列; 记录执行顺序; 并发出警告,如果调度的序列与执行的序列不匹配。

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