Method for manufacturing an ink jet head having an improved discharging
port surface
    2.
    发明授权
    Method for manufacturing an ink jet head having an improved discharging port surface 失效
    具有改进的排出口表面的喷墨头的制造方法

    公开(公告)号:US5443687A

    公开(公告)日:1995-08-22

    申请号:US969355

    申请日:1992-10-30

    CPC分类号: B41J2/1606

    摘要: A method for manufacture of an ink jet head comprises the process of forming a head main body by providing a positive resist layer to constitute ink passages for a substrate having ink ejection pressure generating means and then a ceiling member therewith; forming a carbon-contained film for the surface where the ink discharging ports of the head main body are formed; conducting a fluoric plasma treatment given to the carbon-contained film by utilizing a hydrofluoride compound; and removing the positive resist layer. With this method, an F-C coupled water repellent film is formed on the discharging port formation surface of an ink jet recording head evenly with a desirable bonding capability to enhance the reliability of water repellency.

    摘要翻译: 一种制造喷墨头的方法包括:通过提供正性抗蚀剂层来形成头主体的方法,以构成具有墨喷射压力产生装置的基底的油墨通道,然后形成顶盖构件; 形成用于形成头主体的喷墨口的表面的含碳膜; 通过利用氢氟酸化合物对含碳膜进行氟等离子体处理; 并除去正的抗蚀剂层。 通过这种方法,在喷墨记录头的排出口形成表面上均匀地形成F-C结合的防水膜,具有所需的接合能力,从而提高防水性的可靠性。