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111 条记录 (耗时 0.042 秒)

    Method for manufacturing an ink jet head having an improved discharging port surface
    2.
    发明授权
    Method for manufacturing an ink jet head having an improved discharging port surface 失效
    具有改进的排出口表面的喷墨头的制造方法

    公开(公告)号：US5443687A

    公开(公告)日：1995-08-22

    申请号：US969355

    申请日：1992-10-30

    申请人： Shuji Koyama ,  Yukio Kawajiri ,  Makoto Shibata ,  Manabu Sueoka ,  Toshio Suzuki ,  Hisashi Yamamoto ,  Takumi Suzuki

    发明人： Shuji Koyama ,  Yukio Kawajiri ,  Makoto Shibata ,  Manabu Sueoka ,  Toshio Suzuki ,  Hisashi Yamamoto ,  Takumi Suzuki

    IPC分类号： B41J2/135 ,  B41J2/16 ,  C23C16/26 ,  B44C1/22

    CPC分类号： B41J2/1606

    摘要： A method for manufacture of an ink jet head comprises the process of forming a head main body by providing a positive resist layer to constitute ink passages for a substrate having ink ejection pressure generating means and then a ceiling member therewith; forming a carbon-contained film for the surface where the ink discharging ports of the head main body are formed; conducting a fluoric plasma treatment given to the carbon-contained film by utilizing a hydrofluoride compound; and removing the positive resist layer. With this method, an F-C coupled water repellent film is formed on the discharging port formation surface of an ink jet recording head evenly with a desirable bonding capability to enhance the reliability of water repellency.

    摘要翻译： 一种制造喷墨头的方法包括：通过提供正性抗蚀剂层来形成头主体的方法，以构成具有墨喷射压力产生装置的基底的油墨通道，然后形成顶盖构件; 形成用于形成头主体的喷墨口的表面的含碳膜; 通过利用氢氟酸化合物对含碳膜进行氟等离子体处理; 并除去正的抗蚀剂层。 通过这种方法，在喷墨记录头的排出口形成表面上均匀地形成F-C结合的防水膜，具有所需的接合能力，从而提高防水性的可靠性。

    Substrate with an etched silicon compound film and an ink jet head utilizing the substrate
    7.
    发明授权
    Substrate with an etched silicon compound film and an ink jet head utilizing the substrate 失效
    具有蚀刻硅化合物膜的基板和利用该基板的喷墨头

    公开(公告)号：US5574487A

    公开(公告)日：1996-11-12

    申请号：US352033

    申请日：1994-11-30

    申请人： Shuji Koyama ,  Masami Kasamoto ,  Makoto Shibata

    发明人： Shuji Koyama ,  Masami Kasamoto ,  Makoto Shibata

    IPC分类号： H01L21/302 ,  H01L21/3065 ,  H01L21/311 ,  B41J2/05 ,  H01L29/12

    CPC分类号： H01L21/31116 ,  Y10S428/901 ,  Y10T428/12528 ,  Y10T428/12535

    摘要： A substrate comprising a supporting member and a treated article provided on the supporting member comprising: 1) a patterned resistor layer; 2) a patterned material provided on the patterned resistor layer comprising at least aluminum; 3) a silicon compound film provided on both the patterned resistor layer and the patterned material; and 4) a multi-layered wiring provided on the article comprising as constituents at least a conductive layer comprising at least aluminum and electrically connected to the patterned material. The substrate includes substrates for integrated circuits, circuit boards, and ink jet recording heads.A method for etching a silicon compound film comprises etching the silicon compound film in a gas flow rate ratio of CHF.sub.3 to C.sub.2 F.sub.6 of 1 to 6 under an etching pressure of 40 to 120 Pa.

    摘要翻译： 一种基板，包括支撑构件和设置在所述支撑构件上的处理物品，包括：1）图案化电阻层; 2）设置在至少包含铝的图案化电阻层上的图案化材料; 3）设置在图案化电阻层和图案化材料两者上的硅化合物膜; 以及4）设置在所述制品上的多层布线，其包括至少包括至少铝并且与所述图案化材料电连接的导电层的组分。 基板包括用于集成电路的基板，电路板和喷墨记录头。 蚀刻硅化合物膜的方法包括在40至120Pa的蚀刻压力下，将CHF 3至C 2 F 6的气体流速比为1至6蚀刻硅化合物膜。

    Recording head having multi-layer matrix wiring
    8.
    发明授权
    Recording head having multi-layer matrix wiring 失效
    具有多层矩阵布线的记录头

    公开(公告)号：US5081474A

    公开(公告)日：1992-01-14

    申请号：US618584

    申请日：1990-11-28

    申请人： Makoto Shibata ,  Masami Kasamoto ,  Shuji Koyama ,  Sakai Yokoyama ,  Toshihiro Mori

    发明人： Makoto Shibata ,  Masami Kasamoto ,  Shuji Koyama ,  Sakai Yokoyama ,  Toshihiro Mori

    IPC分类号： B41J2/16

    CPC分类号： B41J2/1604 ,  B41J2/1603 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2202/13

    摘要： A recording head has a liquid channel defining member for defining a liquid channel communicated to a discharging opening for discharging ink, and a base member having a plurality of electricity-heat converting elements for generating heat to be transmitted to the ink filling the liquid channel. A matrix wiring portion is connected electrically to the electricity-heat converting elements, respectively. The matrix wiring portion has a multi-layer constitution having a first wiring and a second wiring. The second wiring is provided through an insulating layer on the first wiring, and the plurality of electricity-heat converting elements are provided on the insulating layer.

    摘要翻译： 记录头具有用于限定与用于排出墨水的排出口连通的液体通道的液体通道限定构件，以及具有多个电热转换元件的基座构件，用于产生要传送到填充液体通道的墨水的热量。 矩阵布线部分分别与电热转换元件电连接。 矩阵布线部具有具有第一布线和第二布线的多层结构。 第二布线通过第一布线上的绝缘层提供，并且多个电热转换元件设置在绝缘层上。

    Method for producing liquid-discharge-head substrate
    9.
    发明授权
    Method for producing liquid-discharge-head substrate 有权
    液体排出头基板的制造方法

    公开(公告)号：US08951815B2

    公开(公告)日：2015-02-10

    申请号：US13526958

    申请日：2012-06-19

    申请人： Ryotaro Murakami ,  Shuji Koyama ,  Keisuke Kishimoto ,  Kenta Furusawa

    发明人： Ryotaro Murakami ,  Shuji Koyama ,  Keisuke Kishimoto ,  Kenta Furusawa

    IPC分类号： H01L21/00 ,  B41J2/16

    CPC分类号： B41J2/1603 ,  B41J2/1629 ,  B41J2/1634 ,  B41J2/1639

    摘要： A method for producing a liquid-discharge-head substrate includes a step of preparing a silicon substrate including, at a front-surface side of the silicon substrate, an energy generating element; a step of forming a first etchant introduction hole on the front-surface side of the silicon substrate; a step of supplying a first etchant into the first etchant introduction hole formed on the front-surface side of the silicon substrate, and supplying a second etchant to a back-surface side of the silicon substrate; a step of stopping the supply of the second etchant; and a step of, after the supply of the second etchant has been stopped, forming a liquid supply port extending through front and back surfaces of the silicon substrate by the supply of the first etchant.

    摘要翻译： 一种液体排出头基板的制造方法，其特征在于，包括在所述硅基板的表面侧具有能量产生元件的硅基板的制造工序。 在所述硅基板的表面侧形成第一蚀刻剂导入孔的工序; 向在硅衬底的前表面侧形成的第一蚀刻剂引入孔中提供第一蚀刻剂并将第二蚀刻剂供应到硅衬底的背表面的步骤; 停止供应第二蚀刻剂的步骤; 以及在第二蚀刻液的供应已经停止之后，通过供给第一蚀刻剂形成延伸穿过硅衬底的前表面和后表面的液体供给口的步骤。

    METHOD FOR MANUFACTURING RECORDING HEAD
    10.
    发明申请
    METHOD FOR MANUFACTURING RECORDING HEAD 有权
    制造记录头的方法

    公开(公告)号：US20130017496A1

    公开(公告)日：2013-01-17

    申请号：US13540960

    申请日：2012-07-03

    申请人： Keiji Matsumoto ,  Kazuhiro Asai ,  Tetsuro Honda ,  Kunihito Uohashi ,  Shuji Koyama ,  Masaki Ohsumi

    发明人： Keiji Matsumoto ,  Kazuhiro Asai ,  Tetsuro Honda ,  Kunihito Uohashi ,  Shuji Koyama ,  Masaki Ohsumi

    IPC分类号： G03F7/20

    CPC分类号： G03F7/095 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  G03F7/0035 ,  G03F7/038 ,  G03F7/094 ,  G03F7/38

    摘要： A method for manufacturing a recording head including forming a flow-channel side-wall forming layer which contains a photosensitive resin, on a substrate having ejection energy generating elements and wiring thereon; exposing the flow-channel side-wall forming layer to light, and optically determining a flow channel; forming a shape stabilizing layer which contains a photosensitive resin; forming an ejection orifice forming layer which contains a photopolymerization initiator and a negative photosensitive resin; exposing the ejection orifice forming layer to light, and optically determining an ejection orifice; and developing the ejection orifice forming layer, shape stabilizing layer, and flow-channel side-wall forming layer, in the order named. The photosensitive resin in the shape stabilizing layer is a material to be cured by a component that is produced upon the exposure of the ejection orifice forming layer and derives from the photopolymerization initiator.

    摘要翻译： 一种用于制造记录头的方法，包括在具有喷射能量产生元件的基板和其上布线的基板上形成包含感光性树脂的流路侧壁形成层; 将流路侧壁形成层暴露于光，并光学地确定流路; 形成含有感光性树脂的形状稳定层; 形成含有光聚合引发剂和负性感光性树脂的喷射孔形成层; 将喷射孔形成层暴露于光，并且光学地确定喷射孔; 并按顺序显影喷射孔形成层，形状稳定层和流动通道侧壁形成层。 形状稳定层中的感光性树脂是通过喷射孔形成层的曝光而产生并从光聚合引发剂得到的成分固化的材料。