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公开(公告)号：US08686383B2
公开(公告)日：2014-04-01
申请号：US13454897
申请日：2012-04-24
申请人： Kazuhiro Zama , Koichi Asami , Yusuke Miyazaki
发明人： Kazuhiro Zama , Koichi Asami , Yusuke Miyazaki
IPC分类号： H01L21/68
CPC分类号： G01N21/9501 , G01N21/9506 , H01L21/68728
摘要： In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.
摘要翻译： 为了实现基板的高精度定位和强压，本发明提供了一种基板保持装置，其包括：旋转台，其具有支撑基板的外周侧表面的下侧的倾斜面，该床在 基板的法线与基板一起作为旋转轴; 位置限制单元，与旋转床一起旋转，并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元，并且通过在旋转期间按压基板的外周侧面的上侧的多个点，将基板压靠在倾斜面上。
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公开(公告)号：US20120182547A1
公开(公告)日：2012-07-19
申请号：US13433035
申请日：2012-03-28
申请人： Noriyuki Aizawa , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takashi , Yusuke Miyazaki , Shingo Tanaka , Yuuichiro Iijima , Masayuki Hachiya , Rieko Hachiya , Koichi Asami
发明人： Noriyuki Aizawa , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takashi , Yusuke Miyazaki , Shingo Tanaka , Yuuichiro Iijima , Masayuki Hachiya , Rieko Hachiya , Koichi Asami
CPC分类号： G01N21/9501 , G01N21/94 , G01N2021/9513 , G01N2021/95676 , H01L22/12
摘要： A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.
摘要翻译： 从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。 每个平面镜的表面由激光照射而劣化，反射率降低。 为了避免进入光束扩展器的激光束的光量减小到低于参考值，当在一定时间内照射激光束时，激光束被照亮的第一和第二平面镜中的每一个上的位置 通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变，同时光轴保持相同。 因此，可以延长每个平面镜的使用寿命而不移动光轴。
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公开(公告)号：US07999242B2
公开(公告)日：2011-08-16
申请号：US12754927
申请日：2010-04-06
申请人： Kazuhiro Zama , Koichi Asami , Yusuke Miyazaki
发明人： Kazuhiro Zama , Koichi Asami , Yusuke Miyazaki
IPC分类号： H01L21/68
CPC分类号： G01N21/9501 , G01N21/9506 , H01L21/68728
摘要： In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.
摘要翻译： 为了实现基板的高精度定位和强压，本发明提供了一种基板保持装置，其包括：旋转台，其具有支撑基板的外周侧表面的下侧的倾斜面，该床在 基板的法线与基板一起作为旋转轴; 位置限制单元，与旋转床一起旋转，并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元，并且通过在旋转期间按压基板的外周侧面的上侧的多个点，将基板压靠在倾斜面上。
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公开(公告)号：US20100141936A1
公开(公告)日：2010-06-10
申请号：US12705031
申请日：2010-02-12
申请人： Noriyuki AIZAWA , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takahashi , Yusuke Miyazaki , Shingo Tanaka
发明人： Noriyuki AIZAWA , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takahashi , Yusuke Miyazaki , Shingo Tanaka
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/94 , G01N2021/9513 , G01N2021/95676 , H01L22/12
摘要： A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.
摘要翻译： 从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。 每个平面镜的表面由激光照射而劣化，反射率降低。 为了避免进入光束扩展器的激光束的光量减小到低于参考值，当在一定时间内照射激光束时，激光束被照亮的第一和第二平面镜中的每一个上的位置 通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变，同时光轴保持相同。 因此，可以延长每个平面镜的使用寿命而不移动光轴。
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公开(公告)号：US20080054197A1
公开(公告)日：2008-03-06
申请号：US11896291
申请日：2007-08-30
申请人： Kazuhiro Zama , Koichi Asami , Yusuke Miyazaki
发明人： Kazuhiro Zama , Koichi Asami , Yusuke Miyazaki
CPC分类号： G01N21/9501 , G01N21/9506 , H01L21/68728
摘要： In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.
摘要翻译： 为了实现基板的高精度定位和强压，本发明提供了一种基板保持装置，其包括：旋转台，其具有支撑基板的外周侧表面的下侧的倾斜面，该床在 基板的法线与基板一起作为旋转轴; 位置限制单元，与旋转床一起旋转，并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元，并且通过在旋转期间按压基板的外周侧面的上侧的多个点，将基板压靠在倾斜面上。
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公开(公告)号：US06641855B1
公开(公告)日：2003-11-04
申请号：US09926348
申请日：2001-10-18
IPC分类号： A23L116
CPC分类号： A23C20/025 , A23L7/109 , A23L11/07
摘要： The purpose is to provide noodles having excellent texture and good taste that contain tofu puree having specific physicochemical properties, and relates to noodles containing tofu puree having the following physicochemical properties: a) viscosity of 20 to 3,000 mPa·s, b) dynamic storage modulus of 0.2 to 600 Pa, c) dynamic loss modulus of 0.2 to 250 Pa, and d) the average particle diameter of particles contained in the tofu puree of 2 to 15 &mgr;m and the 90% particle diameter of the particles of 35 &mgr;m or smaller.
摘要翻译： 其目的在于提供含有具有特定物理化学性质的豆腐泥的质地优良，味道好的面条，具有以下物理化学性质的含有豆腐泥的面条：a）20〜3,000mPa.s的粘度，b）动态储能模量 为0.2〜600Pa，c）动态损耗模量为0.2〜250Pa，d）豆粉中含有的粉末的平均粒径为2〜15μm，粒径为90μm以下的粒子的平均粒径为35μm以下。 。
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公开(公告)号：US06284119B1
公开(公告)日：2001-09-04
申请号：US09385025
申请日：1999-08-30
IPC分类号： G01N2726
CPC分类号： G01N27/44721
摘要： A DNA base sequencer including a gel electrophoretic means having tracks for electrophoresing fluorophore-labelled DNA fragments, a laser diode as a light source for illuminating said tracks with exciting laser light and a CCD sensor for detecting the fluorescence emitted from the illuminated DNA fragments, the laser diode has a control unit including a Peltier device for controlling the temperature of the laser diode, a Peltier device temperature setting generating means having a processor and a memory, and a temperature control circuit that generates a drive current to the Peltier device for controlling its temperature. The CCD sensor receives part of the exciting light from the laser diode as stray light and detects its wavelength. The Peltier device temperature setting generating means is such that, in accordance with the wavelength of stray light as detected periodically with said CCD sensor according to the program stored in said memory, it calculates a corrective value that adjusts the detected wavelength of stray light to the desired wavelength of exciting light that corresponds to the desired temperature setting and that an appropriate temperature setting signal is generated on the basis of said corrective value and the desired temperature setting and sent to the Peltier device temperature control circuit.
摘要翻译： 一种DNA碱基测序仪，包括具有用于电泳荧光团标记的DNA片段的轨道的凝胶电泳装置，激光二极管作为用激发激光照射所述轨道的光源和用于检测从照射的DNA片段发出的荧光的CCD传感器， 激光二极管具有包括用于控制激光二极管的温度的珀耳帖装置的控制单元，具有处理器和存储器的珀尔帖装置温度设定发生装置，以及向珀尔帖装置产生驱动电流以控制其的存储器的温度控制电路 温度。 CCD传感器接收来自激光二极管的激光的一部分作为杂散光并检测其波长。 珀耳帖装置温度设定发生装置使得根据存储在所述存储器中的程序与所述CCD传感器周期性地检测的杂散光的波长，计算校正值，该校正值将检测到的杂散光波长调整到 对应于所需温度设定的激励光的期望波长，以及基于所述校正值和期望温度设定产生适当的温度设定信号，并发送到珀尔帖器件温度控制电路。
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公开(公告)号：US08723536B2
公开(公告)日：2014-05-13
申请号：US13580473
申请日：2011-01-14
申请人： Yusuke Miyazaki , Kenji Aiko , Yuichiro Iijima , Yuichiro Kato
发明人： Yusuke Miyazaki , Kenji Aiko , Yuichiro Iijima , Yuichiro Kato
IPC分类号： G01R31/00
CPC分类号： G01R31/00 , G01N21/9501 , H01L21/67288 , H01L21/6838 , H01L21/68728
摘要： Non-contact type displacement sensors which measure the height of a substrate surface are installed above the substrate in order to hold the upper surface of the substrate at a desired height or to maintain the flatness of the substrate. A substrate mounting device is such that a plurality of grooves and of barriers are provided on the upper surface of a table and air is supplied between the substrate and the table to enable the pressure of air to displace the substrate. In addition, the substrate mounting device has such a structure as to make it possible to deform the substrate into an arbitrary convex-concave shape or to make the substrate flat by feeding back the output of the displacement sensor.
摘要翻译： 测量衬底表面高度的非接触型位移传感器安装在衬底上方，以将衬底的上表面保持在期望的高度或保持衬底的平坦度。 衬底安装装置使得在桌子的上表面上设置多个凹槽和屏障，并且在衬底和工作台之间提供空气以使得空气的压力能够移动衬底。 此外，基板安装装置具有能够使基板变形成任意的凸凹形状或通过反馈位移传感器的输出而使基板平坦化的结构。
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公开(公告)号：US07894052B2
公开(公告)日：2011-02-22
申请号：US12705031
申请日：2010-02-12
申请人： Noriyuki Aizawa , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takahashi , Yusuke Miyazaki , Shingo Tanaka
发明人： Noriyuki Aizawa , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takahashi , Yusuke Miyazaki , Shingo Tanaka
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/94 , G01N2021/9513 , G01N2021/95676 , H01L22/12
摘要： A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.
摘要翻译： 从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。 每个平面镜的表面由激光照射而劣化，反射率降低。 为了避免进入光束扩展器的激光束的光量减小到低于参考值，当在一定时间内照射激光束时，激光束被照亮的第一和第二平面镜中的每一个上的位置 通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变，同时光轴保持相同。 因此，可以延长每个平面镜的使用寿命而不移动光轴。
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公开(公告)号：US07723709B2
公开(公告)日：2010-05-25
申请号：US11896291
申请日：2007-08-30
申请人： Kazuhiro Zama , Koichi Asami , Yusuke Miyazaki
发明人： Kazuhiro Zama , Koichi Asami , Yusuke Miyazaki
CPC分类号： G01N21/9501 , G01N21/9506 , H01L21/68728
摘要： In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.
摘要翻译： 为了实现基板的高精度定位和强压，本发明提供了一种基板保持装置，其包括：旋转台，其具有支撑基板的外周侧表面的下侧的倾斜面，该床在 基板的法线与基板一起作为旋转轴; 位置限制单元，与旋转床一起旋转，并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元，并且通过在旋转期间按压基板的外周侧面的上侧的多个点，将基板压靠在倾斜面上。
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