公开(公告)号：US08723536B2

公开(公告)日：2014-05-13

申请号：US13580473

申请日：2011-01-14

申请人： Yusuke Miyazaki ,  Kenji Aiko ,  Yuichiro Iijima ,  Yuichiro Kato

发明人： Yusuke Miyazaki ,  Kenji Aiko ,  Yuichiro Iijima ,  Yuichiro Kato

IPC分类号： G01R31/00

CPC分类号： G01R31/00 ,  G01N21/9501 ,  H01L21/67288 ,  H01L21/6838 ,  H01L21/68728

摘要： Non-contact type displacement sensors which measure the height of a substrate surface are installed above the substrate in order to hold the upper surface of the substrate at a desired height or to maintain the flatness of the substrate. A substrate mounting device is such that a plurality of grooves and of barriers are provided on the upper surface of a table and air is supplied between the substrate and the table to enable the pressure of air to displace the substrate. In addition, the substrate mounting device has such a structure as to make it possible to deform the substrate into an arbitrary convex-concave shape or to make the substrate flat by feeding back the output of the displacement sensor.

摘要翻译： 测量衬底表面高度的非接触型位移传感器安装在衬底上方，以将衬底的上表面保持在期望的高度或保持衬底的平坦度。 衬底安装装置使得在桌子的上表面上设置多个凹槽和屏障，并且在衬底和工作台之间提供空气以使得空气的压力能够移动衬底。 此外，基板安装装置具有能够使基板变形成任意的凸凹形状或通过反馈位移传感器的输出而使基板平坦化的结构。

公开(公告)号：US20130154675A1

公开(公告)日：2013-06-20

申请号：US13580473

申请日：2011-01-14

申请人： Yusuke Miyazaki ,  Kenji Aiko ,  Yuichiro Iijima ,  Yuichiro Kato

发明人： Yusuke Miyazaki ,  Kenji Aiko ,  Yuichiro Iijima ,  Yuichiro Kato

IPC分类号： G01R31/00

CPC分类号： G01R31/00 ,  G01N21/9501 ,  H01L21/67288 ,  H01L21/6838 ,  H01L21/68728

摘要： Non-contact type displacement sensors which measure the height of a substrate surface are installed above the substrate in order to hold the upper surface of the substrate at a desired height or to maintain the flatness of the substrate. A substrate mounting device is such that a plurality of grooves and of barriers are provided on the upper surface of a table and air is supplied between the substrate and the table to enable the pressure of air to displace the substrate. In addition, the substrate mounting device has such a structure as to make it possible to deform the substrate into an arbitrary convex-concave shape or to make the substrate flat by feeding back the output of the displacement sensor.

摘要翻译： 测量衬底表面高度的非接触型位移传感器安装在衬底上方，以将衬底的上表面保持在期望的高度或保持衬底的平坦度。 衬底安装装置使得在桌子的上表面上设置多个凹槽和屏障，并且在衬底和工作台之间提供空气以使得空气的压力能够移动衬底。 此外，基板安装装置具有能够使基板变形为任意的凸凹形状或通过反馈位移传感器的输出使基板平坦化的结构。

公开(公告)号：US20120144938A1

公开(公告)日：2012-06-14

申请号：US13390973

申请日：2010-09-06

申请人： Katsuyasu Inagaki ,  Kenji Aiko ,  Masaru Kamada ,  Toshiro Kubo ,  Yusuke Miyazaki

发明人： Katsuyasu Inagaki ,  Kenji Aiko ,  Masaru Kamada ,  Toshiro Kubo ,  Yusuke Miyazaki

IPC分类号： G01N1/34

CPC分类号： H01L21/67288 ,  G01N21/9501 ,  H01L21/67017

摘要： Inspection units have moving parts such as XY-movement stage mechanisms and high-speed rotation mechanisms for inspecting the entire surfaces of substrates, and it is difficult for fan filter units (FFUs) to completely remove all foreign materials. The provided inspection device has: a fan filter unit divided into a plurality of regions; an exhaust unit, divided into a plurality of regions, for getting rid of air from the fan filter unit; and a transfer system disposed between the fan filter unit and the exhaust unit. The chief characteristic of the provided inspection device is that the flow rate in some of the regions of the fan filter unit and the flow rate in some of the regions of the exhaust unit are controlled in accordance with the operations of the transfer system.

摘要翻译： 检查单元具有运动部件，例如XY移动台机构和用于检查基板整个表面的高速旋转机构，并且风扇过滤器单元（FFU）难以完全去除所有异物。 所提供的检查装置具有：分为多个区域的风扇过滤器单元; 排气单元，分成多个区域，用于从风扇过滤器单元除去空气; 以及设置在风扇过滤器单元和排气单元之间的传送系统。 提供的检查装置的主要特征是根据传送系统的操作来控制风扇过滤器单元的一些区域中的流量和排气单元的一些区域中的流量。

公开(公告)号：US07894052B2

公开(公告)日：2011-02-22

申请号：US12705031

申请日：2010-02-12

申请人： Noriyuki Aizawa ,  Hiroyuki Kawakami ,  Kazuhiro Zama ,  Kazuo Takahashi ,  Yusuke Miyazaki ,  Shingo Tanaka

发明人： Noriyuki Aizawa ,  Hiroyuki Kawakami ,  Kazuhiro Zama ,  Kazuo Takahashi ,  Yusuke Miyazaki ,  Shingo Tanaka

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N2021/9513 ,  G01N2021/95676 ,  H01L22/12

摘要： A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.

摘要翻译： 从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。 每个平面镜的表面由激光照射而劣化，反射率降低。 为了避免进入光束扩展器的激光束的光量减小到低于参考值，当在一定时间内照射激光束时，激光束被照亮的第一和第二平面镜中的每一个上的位置 通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变，同时光轴保持相同。 因此，可以延长每个平面镜的使用寿命而不移动光轴。

公开(公告)号：US07723709B2

公开(公告)日：2010-05-25

申请号：US11896291

申请日：2007-08-30

申请人： Kazuhiro Zama ,  Koichi Asami ,  Yusuke Miyazaki

发明人： Kazuhiro Zama ,  Koichi Asami ,  Yusuke Miyazaki

IPC分类号： G01N21/86 ,  G01V8/00

CPC分类号： G01N21/9501 ,  G01N21/9506 ,  H01L21/68728

摘要： In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.

摘要翻译： 为了实现基板的高精度定位和强压，本发明提供了一种基板保持装置，其包括：旋转台，其具有支撑基板的外周侧表面的下侧的倾斜面，该床在 基板的法线与基板一起作为旋转轴; 位置限制单元，与旋转床一起旋转，并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元，并且通过在旋转期间按压基板的外周侧面的上侧的多个点，将基板压靠在倾斜面上。

公开(公告)号：US06376231B1

公开(公告)日：2002-04-23

申请号：US09500021

申请日：2000-02-08

申请人： Tomoichi Enomoto ,  Hisashi Hagiwara ,  Kazuyoshi Kurihara ,  Toshio Yoshida ,  Yusuke Miyazaki

发明人： Tomoichi Enomoto ,  Hisashi Hagiwara ,  Kazuyoshi Kurihara ,  Toshio Yoshida ,  Yusuke Miyazaki

IPC分类号： C12M134

CPC分类号： G01N27/44743 ,  B01L3/0244 ,  B01L3/0293 ,  B01L2300/069 ,  G01N1/28 ,  G01N30/466 ,  G01N30/91 ,  G01N30/92 ,  Y10T436/143333 ,  G01N30/02 ,  B01D15/362

摘要： The improved sample loading sheet for loading an assay sample in specified lane positions in a gel electrolyte layer in an electrophoresis plate to be used in a gel electrophoretic apparatus is formed of cation-exchange chromatographic paper and has part or all of at least one of its principal surfaces coated with a water-resistant resin film. The sheet enables DNA samples to be positively absorbed and migrate to produce ladder patterns at high resolution.

摘要翻译： 用于在凝胶电泳装置中使用的电泳板中的凝胶电解质层中的特定泳道位置中加载测定样品的改进的样品装载片由阳离子交换色谱纸形成，并且其部分或全部是 主表面涂有耐水树脂膜。 该片材能够使DNA样品被积极吸收并迁移以产生高分辨率的梯形图案。

公开(公告)号：US08686383B2

公开(公告)日：2014-04-01

申请号：US13454897

申请日：2012-04-24

申请人： Kazuhiro Zama ,  Koichi Asami ,  Yusuke Miyazaki

发明人： Kazuhiro Zama ,  Koichi Asami ,  Yusuke Miyazaki

IPC分类号： H01L21/68

CPC分类号： G01N21/9501 ,  G01N21/9506 ,  H01L21/68728

摘要： In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.

摘要翻译： 为了实现基板的高精度定位和强压，本发明提供了一种基板保持装置，其包括：旋转台，其具有支撑基板的外周侧表面的下侧的倾斜面，该床在 基板的法线与基板一起作为旋转轴; 位置限制单元，与旋转床一起旋转，并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元，并且通过在旋转期间按压基板的外周侧面的上侧的多个点，将基板压靠在倾斜面上。

公开(公告)号：US20120182547A1

公开(公告)日：2012-07-19

申请号：US13433035

申请日：2012-03-28

申请人： Noriyuki Aizawa ,  Hiroyuki Kawakami ,  Kazuhiro Zama ,  Kazuo Takashi ,  Yusuke Miyazaki ,  Shingo Tanaka ,  Yuuichiro Iijima ,  Masayuki Hachiya ,  Rieko Hachiya ,  Koichi Asami

发明人： Noriyuki Aizawa ,  Hiroyuki Kawakami ,  Kazuhiro Zama ,  Kazuo Takashi ,  Yusuke Miyazaki ,  Shingo Tanaka ,  Yuuichiro Iijima ,  Masayuki Hachiya ,  Rieko Hachiya ,  Koichi Asami

IPC分类号： G01N21/89 ,  B66C1/42

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N2021/9513 ,  G01N2021/95676 ,  H01L22/12

摘要： A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.

摘要翻译： 从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。 每个平面镜的表面由激光照射而劣化，反射率降低。 为了避免进入光束扩展器的激光束的光量减小到低于参考值，当在一定时间内照射激光束时，激光束被照亮的第一和第二平面镜中的每一个上的位置 通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变，同时光轴保持相同。 因此，可以延长每个平面镜的使用寿命而不移动光轴。

公开(公告)号：US07999242B2

公开(公告)日：2011-08-16

申请号：US12754927

申请日：2010-04-06

申请人： Kazuhiro Zama ,  Koichi Asami ,  Yusuke Miyazaki

发明人： Kazuhiro Zama ,  Koichi Asami ,  Yusuke Miyazaki

IPC分类号： H01L21/68

CPC分类号： G01N21/9501 ,  G01N21/9506 ,  H01L21/68728

摘要： In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.

摘要翻译： 为了实现基板的高精度定位和强压，本发明提供了一种基板保持装置，其包括：旋转台，其具有支撑基板的外周侧表面的下侧的倾斜面，该床在 基板的法线与基板一起作为旋转轴; 位置限制单元，与旋转床一起旋转，并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元，并且通过在旋转期间按压基板的外周侧面的上侧的多个点，将基板压靠在倾斜面上。

公开(公告)号：US20100141936A1

公开(公告)日：2010-06-10

申请号：US12705031

申请日：2010-02-12

申请人： Noriyuki AIZAWA ,  Hiroyuki Kawakami ,  Kazuhiro Zama ,  Kazuo Takahashi ,  Yusuke Miyazaki ,  Shingo Tanaka

发明人： Noriyuki AIZAWA ,  Hiroyuki Kawakami ,  Kazuhiro Zama ,  Kazuo Takahashi ,  Yusuke Miyazaki ,  Shingo Tanaka

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N2021/9513 ,  G01N2021/95676 ,  H01L22/12

摘要： A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.

摘要翻译： 从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。 每个平面镜的表面由激光照射而劣化，反射率降低。 为了避免进入光束扩展器的激光束的光量减小到低于参考值，当在一定时间内照射激光束时，激光束被照亮的第一和第二平面镜中的每一个上的位置 通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变，同时光轴保持相同。 因此，可以延长每个平面镜的使用寿命而不移动光轴。