公开(公告)号：US20190253035A1

公开(公告)日：2019-08-15

申请号：US16314832

申请日：2018-02-14

申请人： ACOUSTIC WAVE DEVICE LABO. CO., LTD.

发明人： Kazuhiko YAMANOUCHI

IPC分类号： H03H9/02 ,  H03H3/04 ,  H03H3/10 ,  H03H9/05 ,  H03H9/13 ,  H03H9/145 ,  H03H9/17 ,  H03H9/19 ,  H03H9/25 ,  H03H9/56 ,  H03H9/64

CPC分类号： H03H9/02842 ,  H03H3/02 ,  H03H3/04 ,  H03H3/10 ,  H03H9/02023 ,  H03H9/02031 ,  H03H9/02039 ,  H03H9/02102 ,  H03H9/0211 ,  H03H9/02543 ,  H03H9/02551 ,  H03H9/02559 ,  H03H9/0259 ,  H03H9/02637 ,  H03H9/02834 ,  H03H9/0561 ,  H03H9/13 ,  H03H9/145 ,  H03H9/17 ,  H03H9/174 ,  H03H9/176 ,  H03H9/19 ,  H03H9/25 ,  H03H9/562 ,  H03H9/564 ,  H03H9/6489 ,  H03H2003/0407

摘要： An acoustic wave element which can be reduced in size and produced relatively easily, practically used without using harmful substances, and can suppress a surface acoustic wave propagation loss, which has an excellent temperature coefficient of frequency and a velocity dispersion characteristic, and with which an increase in the reflection coefficient of interdigital transducers can be suppressed, and a method for manufacturing the acoustic wave element are provided. The acoustic wave element includes a pair of electrodes provided on both surfaces of a piezoelectric substrate, and a dielectric film provided on a first surface of the piezoelectric substrate so as to cover the electrode. The acoustic wave element alternatively includes interdigital transducers provided on a first surface of the piezoelectric substrate, and a dielectric film provided on the interdigital transducers, a gap between the interdigital transducers, and/or a second surface of the piezoelectric substrate.