-
公开(公告)号：US10755901B2
公开(公告)日：2020-08-25
申请号：US15532845
申请日：2014-12-05
Inventor： John Chambers , Peter Maschwitz , Yuping Lin , Herb Johnson
Abstract: The present invention relates generally to a plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction for deposition of thin film coatings and modification of surfaces. More particularly, the present invention relates to a plasma source comprising one or more plasma-generating electrodes, wherein a macro-particle reduction coating is deposited on at least a portion of the plasma-generating surfaces of the one or more electrodes to shield the plasma-generating surfaces of the electrodes from erosion by the produced plasma and to resist the formation of particulate matter, thus enhancing the performance and extending the service life of the plasma source.
-
公开(公告)号：US10562813B2
公开(公告)日：2020-02-18
申请号：US16381623
申请日：2019-04-11
Applicant: AGC GLASS EUROPE , AGC FLAT GLASS NORTH AMERICA, INC.
Inventor： Philippe Roquiny , Oliver Kappertz , Joerg Moennekes , Yuping Lin , Stijn Mahieu , Anne-Christine Baudouin
Abstract: A heat treatable solar control glazing showing low-emissivity properties, and possibly also anti-solar properties, and methods to manufacture such a glazing. The glazing comprises a transparent substrate coated with a stack of thin layers comprising n functional layer(s) reflecting infrared radiation and n+1 dielectric layers, with n≥1, each functional layer being surrounded by dielectric layers. At least one dielectric layer above a functional layer comprises a layer consisting essentially of silicon oxide deposited by PECVD, and the stack comprises a barrier layer based on zinc oxide above and in direct contact with any functional layer which has a silicon oxide layer in the dielectric layer directly above it.
-
公开(公告)号：US11875976B2
公开(公告)日：2024-01-16
申请号：US16933146
申请日：2020-07-20
Inventor： John Chambers , Peter Maschwitz , Yuping Lin , Herb Johnson
IPC: H01J37/32 , C03C17/245 , C23C16/50
CPC classification number: H01J37/32559 , C03C17/245 , C23C16/50 , H01J37/32596 , C03C2218/153 , H01J2237/3321
Abstract: The present invention relates generally to a plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction for deposition of thin film coatings and modification of surfaces. More particularly, the present invention relates to a plasma source comprising one or more plasma-generating electrodes, wherein a macro-particle reduction coating is deposited on at least a portion of the plasma-generating surfaces of the one or more electrodes to shield the plasma-generating surfaces of the electrodes from erosion by the produced plasma and to resist the formation of particulate matter, thus enhancing the performance and extending the service life of the plasma source.
-
公开(公告)号：US10358385B2
公开(公告)日：2019-07-23
申请号：US14894420
申请日：2014-05-28
Applicant: AGC GLASS EUROPE , AGC GLASS COMPANY NORTH AMERICA
Inventor： Philippe Roquiny , Oliver Kappertz , Joerg Moennekes , Yuping Lin , Stijn Mahieu , Anne-Christine Baudouin
Abstract: The invention relates to heat treatable solar control glazing showing low-emissivity properties, and possibly also anti-solar properties and methods to manufacture such glazing. They comprise a transparent substrate coated with a stack of thin layers comprising n functional layer(s) reflecting infrared radiation and n+1 dielectric layers, with n≥1, each functional layer being surrounded by dielectric layers. At least one dielectric layer above a functional layer comprises a layer consisting essentially of silicon oxide, preferably deposited by PECVD, and the stack comprises a barrier layer based on zinc oxide above and in direct contact with any functional layer which has a silicon oxide layer in the dielectric layer directly above it.
-
-
-
Search Results
4
records
(took 0.017 seconds)
