公开(公告)号：US09405287B1

公开(公告)日：2016-08-02

申请号：US14806220

申请日：2015-07-22

Applicant: APPLIED MATERIALS, INC.

Inventor： Abraham Ravid ,  Todd J. Egan ,  Eran Weiss ,  Michael R. Rice ,  Izya Kremerman

IPC: G06F7/00 ,  G06F19/00 ,  G05B19/19

CPC classification number: G05B19/402 ,  G05B2219/39157 ,  G05B2219/40572

Abstract: An optical calibration method and apparatus for calibration of wafer positioning within a reactor chamber under process conditions employs an array of cameras in a lid of the chamber using images of the wafer edge to locate the wafer relative to the reference feature.

Abstract translation: 用于在处理条件下校准在反应器室内的晶片定位的光学校准方法和装置使用晶片边缘的图像的相机的阵列中的相机相对于参考特征定位晶片。

公开(公告)号：US20150311102A1

公开(公告)日：2015-10-29

申请号：US14689342

申请日：2015-04-17

Applicant: Applied Materials, Inc.

Inventor： Eran Weiss ,  Travis Morey ,  Nir Merry ,  Paul B. Reuter ,  Izya Kremerman ,  Jeffrey C. Hudgens ,  Dean C. Hruzek

IPC: H01L21/677 ,  A47B96/00 ,  E06B7/18

CPC classification number: A47B96/00 ,  H01L21/67126 ,  H01L21/67201

Abstract: A load lock door assembly with side actuation is disclosed. Load lock door assembly includes a load lock door and a door support assembly coupled thereto. Door support assembly includes one or more pivot members pivotable relative to one or more sides of the load lock body, a door support bracket coupled to the load lock door, one or more separator side actuators coupled between the door support bracket being actuatable to separate the load lock door from a sealing surface, and one or more pivot side actuator operable to pivot the load lock door above or below the load lock entry. Load lock apparatus with side actuation, systems including one or more load lock door assemblies with side actuation, and methods of operating load lock door assemblies are provided, as are numerous other aspects.

Abstract translation: 公开了具有侧面致动的装载锁门组件。 装载锁门组件包括一个装载锁门和一个与其连接的门支撑组件。 门支撑组件包括相对于负载锁定体的一个或多个侧面可枢转的一个或多个枢轴构件，联接到负载锁定门的门支撑支架，联接在门支撑支架之间的一个或多个分离器侧致动器，其可致动以将 加载锁定门从密封表面，以及一个或多个枢转侧致动器，其可操作以使加载锁定门在加载锁定入口上方或下方枢转。 具有侧面致动的装载锁定装置，包括具有侧面致动的一个或多个装载锁定门组件的系统，以及操作负载锁定门组件的方法也是如许多其它方面一样。

公开(公告)号：US11883958B2

公开(公告)日：2024-01-30

申请号：US16434886

申请日：2019-06-07

Applicant: Applied Materials, Inc.

Inventor： Karuppasamy Muthukamatchy ,  Rajkumar Thanu ,  Eran Weiss ,  Jeffrey C. Hudgens ,  Chandrakant M. Sapkale

IPC: H01L21/677 ,  B25J9/00 ,  B25J9/10 ,  B25J9/16 ,  H01L21/02

CPC classification number: B25J9/0087 ,  B25J9/109 ,  B25J9/161 ,  H01L21/0201 ,  H01L21/02104 ,  H01L21/67742 ,  H01L21/67754

Abstract: A robot apparatus may include an upper arm adapted to rotate about a first rotational axis and a forearm rotatably coupled to the upper arm at a second rotational axis. A first wrist member may be rotatably coupled to the forearm at a third rotation axis. A second wrist member may be rotatably coupled to the forearm at the third rotation axis. A first end effector may be coupled to the first wrist member and a second end effector may be coupled to the second wrist member. The first wrist member and the second wrist member may be configured to rotate about the third rotational axis between a first pitch and a second pitch as a function of extension of the robot apparatus. Other apparatus and methods are disclosed.

公开(公告)号：US10758045B2

公开(公告)日：2020-09-01

申请号：US16358280

申请日：2019-03-19

Applicant: Applied Materials, Inc.

Inventor： Eran Weiss ,  Travis Morey ,  Nir Merry ,  Paul B. Reuter ,  Izya Kremerman ,  Jeffrey C. Hudgens ,  Dean C. Hruzek

IPC: H01L21/67 ,  A47B96/00

Abstract: A load lock door assembly with side actuation is disclosed. Load lock door assembly includes a load lock door and a door support assembly coupled thereto. Door support assembly includes one or more pivot members pivotable relative to one or more sides of the load lock body, a door support bracket coupled to the load lock door, one or more separator side actuators coupled between the door support bracket being actuatable to separate the load lock door from a sealing surface, and one or more pivot side actuator operable to pivot the load lock door above or below the load lock entry. Load lock apparatus with side actuation, systems including one or more load lock door assemblies with side actuation, and methods of operating load lock door assemblies are provided, as are numerous other aspects.

公开(公告)号：US20190208907A1

公开(公告)日：2019-07-11

申请号：US16358280

申请日：2019-03-19

Applicant: Applied Materials, Inc.

Inventor： Eran Weiss ,  Travis Morey ,  Nir Merry ,  Paul B. Reuter ,  Izya Kremerman ,  Jeffrey C. Hudgens ,  Dean C. Hruzek

IPC: A47B96/00 ,  H01L21/67

CPC classification number: A47B96/00 ,  H01L21/67126 ,  H01L21/67201

Abstract: A load lock door assembly with side actuation is disclosed. Load lock door assembly includes a load lock door and a door support assembly coupled thereto. Door support assembly includes one or more pivot members pivotable relative to one or more sides of the load lock body, a door support bracket coupled to the load lock door, one or more separator side actuators coupled between the door support bracket being actuatable to separate the load lock door from a sealing surface, and one or more pivot side actuator operable to pivot the load lock door above or below the load lock entry. Load lock apparatus with side actuation, systems including one or more load lock door assemblies with side actuation, and methods of operating load lock door assemblies are provided, as are numerous other aspects.

公开(公告)号：US10278501B2

公开(公告)日：2019-05-07

申请号：US14689342

申请日：2015-04-17

Applicant: Applied Materials, Inc.

Inventor： Eran Weiss ,  Travis Morey ,  Nir Merry ,  Paul B. Reuter ,  Izya Kremerman ,  Jeffrey C. Hudgens ,  Dean C. Hruzek

IPC: H01L21/67 ,  A47B96/00

Abstract: A load lock door assembly with side actuation is disclosed. Load lock door assembly includes a load lock door and a door support assembly coupled thereto. Door support assembly includes one or more pivot members pivotable relative to one or more sides of the load lock body, a door support bracket coupled to the load lock door, one or more separator side actuators coupled between the door support bracket being actuatable to separate the load lock door from a sealing surface, and one or more pivot side actuator operable to pivot the load lock door above or below the load lock entry. Load lock apparatus with side actuation, systems including one or more load lock door assemblies with side actuation, and methods of operating load lock door assemblies are provided, as are numerous other aspects.