公开(公告)号：US20170323781A1

公开(公告)日：2017-11-09

申请号：US15587997

申请日：2017-05-05

Applicant: APPLIED MATERIALS, INC.

Inventor： JESSICA SEVANNE KACHIAN ,  TOBIN KAUFMAN-OSBORN ,  DAVID THOMPSON

IPC: H01L21/02 ,  C23C16/56 ,  C23C16/455 ,  C23C16/40 ,  C23C16/04 ,  C23C16/02

CPC classification number: H01L21/02118 ,  C23C16/0272 ,  C23C16/04 ,  C23C16/401 ,  C23C16/45525 ,  C23C16/45527 ,  C23C16/45553 ,  C23C16/56 ,  H01L21/02211 ,  H01L21/0228 ,  H01L21/3105 ,  H01L21/76849

Abstract: Methods of depositing a film selectively onto a first substrate surface relative to a second substrate surface are described. The methods include net chemisorption of a self-assembled monolayer on the second surface to prevent deposition of the film on the second surface.