公开(公告)号：US20170178863A1

公开(公告)日：2017-06-22

申请号：US15449239

申请日：2017-03-03

Applicant: APPLIED MATERIALS, INC.

Inventor： DMITRY LUBOMIRSKY ,  VLADIMIR KNYAZIK ,  HAMID NOORBAKHSH ,  JASON DELLA ROSA ,  ZHENG JOHN YE ,  JENNIFER Y. SUN ,  SUMANTH BANDA

IPC: H01J37/32 ,  B05B1/18 ,  B05B1/00

CPC classification number: B05B1/005 ,  B05B1/185 ,  C23C16/45565 ,  H01J37/3211 ,  H01J37/32146 ,  H01J37/32183 ,  H01J37/3244 ,  H01J37/32467 ,  H01J37/32522 ,  H01J37/32623

Abstract: Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a substrate processing chamber includes a body having a first side and an opposing second side; a gas distribution plate disposed proximate the second side of the body; and a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the body, wherein the body is electrically coupled to the gas distribution plate through the clamp.

公开(公告)号：US20140209027A1

公开(公告)日：2014-07-31

申请号：US13833257

申请日：2013-03-15

Applicant: APPLIED MATERIALS, INC.

Inventor： DMITRY LUBOMIRSKY ,  VLADIMIR KNYAZIK ,  HAMID NOORBAKHSH ,  JASON DELLA ROSA ,  ZHENG JOHN YE ,  JENNIFER Y. SUN ,  SUMANTH BANDA

IPC: H01L21/02 ,  B05B1/00

CPC classification number: B05B1/005 ,  B05B1/185 ,  C23C16/45565 ,  H01J37/3211 ,  H01J37/32146 ,  H01J37/32183 ,  H01J37/3244 ,  H01J37/32467 ,  H01J37/32522 ,  H01J37/32623

Abstract: Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a semiconductor processing chamber may include a base having a first side and a second side; a gas distribution plate disposed proximate the second side of the base; a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the base; and a thermal gasket disposed between the base and gas distribution plate.

Abstract translation: 具有可拆卸气体分配板的喷头的实施例在此提供。 在一些实施例中，用于半导体处理室的喷头可包括具有第一侧和第二侧的基座; 设置在所述基座的第二侧附近的气体分配板; 围绕所述气体分配板的周边边缘设置的夹具，以将所述气体分配板可移除地联接到所述基座; 以及设置在基部和气体分配板之间的热垫圈。

公开(公告)号：US20150228456A1

公开(公告)日：2015-08-13

申请号：US14600397

申请日：2015-01-20

Applicant: Applied Materials, Inc.

Inventor： ZHENG JOHN YE ,  Jay D. Pinson, II ,  Hiroji Hanawa ,  Juan Carlos Rocha-Alvarez

IPC: H01J37/32

CPC classification number: H01J37/3211 ,  H01J37/32458 ,  H01J37/32522 ,  H01J37/32669

Abstract: A plasma source includes a plasma vessel that includes a dielectric material that encloses a cavity of a toroidal shape. The toroidal shape defines a toroidal axis therethrough. The vessel forms input and output connections, each of the input and output connections being in fluid communication with the cavity. One or more metal plates are disposed adjacent to the plasma vessel for cooling the plasma vessel. A magnetic core is disposed along the toroidal axis such that respective first and second ends of the magnetic core extend beyond axially opposed sides of the plasma vessel. First and second induction coils are wound about the respective first and second ends of the magnetic core. A plasma is generated in the cavity when an input gas is supplied through the input connection and an oscillating electrical current is supplied to the first and second induction coils.

Abstract translation: 等离子体源包括等离子体容器，其包括围绕环形形状的空腔的电介质材料。 环形形状限定了穿过其中的环形轴线。 容器形成输入和输出连接，每个输入和输出连接与空腔流体连通。 一个或多个金属板与等离子体容器相邻设置以冷却等离子体容器。 磁芯沿着环形轴线设置，使得磁芯的相应的第一和第二端延伸超过等离子体容器的轴向相对侧。 第一和第二感应线圈缠绕在磁芯的相应的第一和第二端。 当通过输入连接提供输入气体并且向第一和第二感应线圈提供振荡电流时，在空腔中产生等离子体。