公开(公告)号：US20170178863A1

公开(公告)日：2017-06-22

申请号：US15449239

申请日：2017-03-03

Applicant: APPLIED MATERIALS, INC.

Inventor： DMITRY LUBOMIRSKY ,  VLADIMIR KNYAZIK ,  HAMID NOORBAKHSH ,  JASON DELLA ROSA ,  ZHENG JOHN YE ,  JENNIFER Y. SUN ,  SUMANTH BANDA

IPC: H01J37/32 ,  B05B1/18 ,  B05B1/00

CPC classification number: B05B1/005 ,  B05B1/185 ,  C23C16/45565 ,  H01J37/3211 ,  H01J37/32146 ,  H01J37/32183 ,  H01J37/3244 ,  H01J37/32467 ,  H01J37/32522 ,  H01J37/32623

Abstract: Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a substrate processing chamber includes a body having a first side and an opposing second side; a gas distribution plate disposed proximate the second side of the body; and a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the body, wherein the body is electrically coupled to the gas distribution plate through the clamp.

公开(公告)号：US20140209027A1

公开(公告)日：2014-07-31

申请号：US13833257

申请日：2013-03-15

Applicant: APPLIED MATERIALS, INC.

Inventor： DMITRY LUBOMIRSKY ,  VLADIMIR KNYAZIK ,  HAMID NOORBAKHSH ,  JASON DELLA ROSA ,  ZHENG JOHN YE ,  JENNIFER Y. SUN ,  SUMANTH BANDA

IPC: H01L21/02 ,  B05B1/00

CPC classification number: B05B1/005 ,  B05B1/185 ,  C23C16/45565 ,  H01J37/3211 ,  H01J37/32146 ,  H01J37/32183 ,  H01J37/3244 ,  H01J37/32467 ,  H01J37/32522 ,  H01J37/32623

Abstract: Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a semiconductor processing chamber may include a base having a first side and a second side; a gas distribution plate disposed proximate the second side of the base; a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the base; and a thermal gasket disposed between the base and gas distribution plate.

Abstract translation: 具有可拆卸气体分配板的喷头的实施例在此提供。 在一些实施例中，用于半导体处理室的喷头可包括具有第一侧和第二侧的基座; 设置在所述基座的第二侧附近的气体分配板; 围绕所述气体分配板的周边边缘设置的夹具，以将所述气体分配板可移除地联接到所述基座; 以及设置在基部和气体分配板之间的热垫圈。

公开(公告)号：US20180190473A1

公开(公告)日：2018-07-05

申请号：US15909118

申请日：2018-03-01

Applicant: APPLIED MATERIALS, INC.

Inventor： JASON DELLA ROSA ,  HAMID NOORBAKHSH ,  VLADIMIR KNYAZIK ,  JISOO KIM ,  WONSEOK LEE ,  USAMA DADU

IPC: H01J37/32

CPC classification number: H01J37/3244 ,  H01J37/32807 ,  H01J37/3288

Abstract: Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a semiconductor processing chamber may include a body having a first side and a second side opposing the first side; a gas distribution plate disposed proximate the second side of the body, wherein the gas distribution plate is formed from a material having an electrical resistivity between about 60 ohm-cm to 90 ohm-cm; a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the body; and a thermal gasket disposed in a gap between the body and gas distribution plate.

公开(公告)号：US20160005571A1

公开(公告)日：2016-01-07

申请号：US14729736

申请日：2015-06-03

Applicant: APPLIED MATERIALS, INC.

Inventor： JASON DELLA ROSA ,  HAMID NOORBAKHSH ,  VLADIMIR KNYAZIK ,  JISOO KIM ,  WONSEOK LEE ,  USAMA DADU

IPC: H01J37/32 ,  H01L21/67

CPC classification number: H01J37/3244 ,  H01J37/32807 ,  H01J37/3288

Abstract: Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a semiconductor processing chamber may include a base having a first side and a second side opposing the first side; a gas distribution plate disposed proximate the second side of the base, wherein the gas distribution plate is formed from a material having an electrical resistivity between about 60 ohm-cm to 90 ohm-cm; a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the base; and a thermal gasket disposed in a gap between the base and gas distribution plate.

Abstract translation: 具有可拆卸气体分配板的喷头的实施例在此提供。 在一些实施例中，用于半导体处理室的喷头可以包括具有与第一侧相对的第一侧和第二侧的基部; 设置在所述基座的第二侧附近的气体分配板，其中所述气体分配板由具有约60ohm-cm至90ohm-cm之间的电阻率的材料形成; 围绕所述气体分配板的周缘设置的夹具，以将所述气体分配板可移除地联接到所述基座; 以及设置在基座和气体分配板之间的间隙中的热垫圈。