公开(公告)号：US20220298630A1

公开(公告)日：2022-09-22

申请号：US17835082

申请日：2022-06-08

申请人： ASM IP Holding B.V.

发明人： SungHoon Jun ,  HeeChul Jung ,  YonJong Jeon

IPC分类号： C23C16/455 ,  C23C16/50 ,  C23C16/52 ,  C23C16/44

摘要： Exemplary embodiments of the disclosure provide improved reactor systems, assemblies, and methods for controlling a temperature within the reactor system, such as a temperature of a gas supply unit. Exemplary systems and methods employ an exhaust unit to cause movement of a fluid over a portion of the gas supply unit to better control the temperature of the gas supply unit.

公开(公告)号：US12077857B2

公开(公告)日：2024-09-03

申请号：US18222024

申请日：2023-07-14

申请人： ASM IP Holding B.V.

发明人： SungHoon Jun ,  HeeChul Jung ,  YonJong Jeon

IPC分类号： C23C16/40 ,  C23C16/44 ,  C23C16/455 ,  C23C16/50 ,  C23C16/52

CPC分类号： C23C16/455 ,  C23C16/4412 ,  C23C16/45565 ,  C23C16/50 ,  C23C16/52

摘要： Exemplary embodiments of the disclosure provide improved reactor systems, assemblies, and methods for controlling a temperature within the reactor system, such as a temperature of a gas supply unit. Exemplary systems and methods employ an exhaust unit to cause movement of a fluid over a portion of the gas supply unit to better control the temperature of the gas supply unit.

公开(公告)号：US20230357925A1

公开(公告)日：2023-11-09

申请号：US18222024

申请日：2023-07-14

申请人： ASM IP Holding B.V.

发明人： SungHoon Jun ,  HeeChul Jung ,  YonJong Jeon

IPC分类号： C23C16/455 ,  C23C16/50 ,  C23C16/52 ,  C23C16/44

CPC分类号： C23C16/455 ,  C23C16/50 ,  C23C16/52 ,  C23C16/4412 ,  C23C16/45565

摘要： Exemplary embodiments of the disclosure provide improved reactor systems, assemblies, and methods for controlling a temperature within the reactor system, such as a temperature of a gas supply unit. Exemplary systems and methods employ an exhaust unit to cause movement of a fluid over a portion of the gas supply unit to better control the temperature of the gas supply unit.

公开(公告)号：US11746414B2

公开(公告)日：2023-09-05

申请号：US17835082

申请日：2022-06-08

申请人： ASM IP Holding B.V.

发明人： SungHoon Jun ,  HeeChul Jung ,  YonJong Jeon

IPC分类号： C23C16/40 ,  C23C16/455 ,  C23C16/50 ,  C23C16/52 ,  C23C16/44

CPC分类号： C23C16/455 ,  C23C16/4412 ,  C23C16/45565 ,  C23C16/50 ,  C23C16/52

摘要： Exemplary embodiments of the disclosure provide improved reactor systems, assemblies, and methods for controlling a temperature within the reactor system, such as a temperature of a gas supply unit. Exemplary systems and methods employ an exhaust unit to cause movement of a fluid over a portion of the gas supply unit to better control the temperature of the gas supply unit.

公开(公告)号：USD922229S1

公开(公告)日：2021-06-15

申请号：US29693892

申请日：2019-06-05

申请人： ASM IP Holding B.V.

设计人： SungHoon Jun ,  HeeChul Jung ,  YonJong Jeon

公开(公告)号：US20210002762A1

公开(公告)日：2021-01-07

申请号：US16917859

申请日：2020-06-30

申请人： ASM IP Holding B.V.

发明人： SungHoon Jun ,  HeeChul Jung ,  YonJong Jeon

IPC分类号： C23C16/455 ,  C23C16/44 ,  C23C16/52 ,  C23C16/50

摘要： Exemplary embodiments of the disclosure provide improved reactor systems, assemblies, and methods for controlling a temperature within the reactor system, such as a temperature of a gas supply unit. Exemplary systems and methods employ an exhaust unit to cause movement of a fluid over a portion of the gas supply unit to better control the temperature of the gas supply unit.