公开(公告)号：US11996267B2

公开(公告)日：2024-05-28

申请号：US17271667

申请日：2019-08-22

申请人： ASML NETHERLANDS B.V.

发明人： Ruben Cornelis Maas ,  Alexey Olegovich Polyakov ,  Teis Johan Coenen

IPC分类号： H01J37/304 ,  G03F7/00 ,  H01J37/147 ,  H01J37/302 ,  H01J37/317 ,  H01L21/263

CPC分类号： H01J37/304 ,  G03F7/70591 ,  H01J37/1474 ,  H01J37/3023 ,  H01J37/3174 ,  H01L21/263 ,  H01J2237/31755

摘要： A particle beam apparatus includes an object table configured to hold a semiconductor substrate; a particle beam source configured to generate a particle beam; a detector configured to detect a response of the substrate caused by interaction of the particle beam with the substrate and to output a detector signal representative of the response; and a processing unit configured to: receive or determine a location of one or more defect target areas on the substrate; control the particle beam source to inspect the one or more defect target areas; identify one or more defects within the one or more defect target areas, based on the detector signal obtained during the inspection of the one or more defect target areas; control the particle beam source to repair the one or more defects.

公开(公告)号：US11733614B2

公开(公告)日：2023-08-22

申请号：US17467441

申请日：2021-09-06

申请人： ASML Netherlands B.V.

发明人： Thomas Jarik Huisman ,  Ruben Cornelis Maas ,  Hermanus Adrianus Dillen

IPC分类号： G06T7/12 ,  G03F7/00 ,  G01B9/04 ,  G03F1/84 ,  G03F1/86

CPC分类号： G03F7/70625 ,  G01B9/04 ,  G03F1/84 ,  G03F1/86 ,  G06T7/12 ,  G06T2207/10061 ,  G06T2207/20168 ,  G06T2207/30148

摘要： Disclosed is a method of, and associated apparatus for, determining an edge position relating to an edge of a feature comprised within an image, such as a scanning electron microscope image, which comprises noise. The method comprises determining a reference signal from said image; and determining said edge position with respect to said reference signal. The reference signal may be determined from the image by applying a 1-dimensional low-pass filter to the image in a direction parallel to an initial contour estimating the edge position.

公开(公告)号：US20190294055A1

公开(公告)日：2019-09-26

申请号：US16362025

申请日：2019-03-22

申请人： ASML Netherlands B.V.

发明人： Thomas Jarik Huisman ,  Ruben Cornelis Maas ,  Hermanus Adrianus Dillen

IPC分类号： G03F7/20 ,  G01B9/04

摘要： Disclosed is a method of, and associated apparatus for, determining an edge position relating to an edge of a feature comprised within an image, such as a scanning electron microscope image, which comprises noise. The method comprises determining a reference signal from said image; and determining said edge position with respect to said reference signal. The reference signal may be determined from the image by applying a 1-dimensional low-pass filter to the image in a direction parallel to an initial contour estimating the edge position.

公开(公告)号：US11112703B2

公开(公告)日：2021-09-07

申请号：US16362025

申请日：2019-03-22

申请人： ASML Netherlands B.V.

发明人： Thomas Jarik Huisman ,  Ruben Cornelis Maas ,  Hermanus Adrianus Dillen

IPC分类号： G06K9/00 ,  G03F7/20 ,  G01B9/04 ,  G03F1/84 ,  G06T7/12 ,  G03F1/86

摘要： Disclosed is a method of, and associated apparatus for, determining an edge position relating to an edge of a feature comprised within an image, such as a scanning electron microscope image, which comprises noise. The method comprises determining a reference signal from said image; and determining said edge position with respect to said reference signal. The reference signal may be determined from the image by applying a 1-dimensional low-pass filter to the image in a direction parallel to an initial contour estimating the edge position.