公开(公告)号：US12032299B2

公开(公告)日：2024-07-09

申请号：US17784566

申请日：2020-12-03

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Patricius Aloysius Jacobus Tinnemans ,  Igor Matheus Petronella Aarts ,  Kaustuve Bhattacharyya ,  Ralph Brinkhof ,  Leendert Jan Karssemeijer ,  Stefan Carolus Jacobus Antonius Keij ,  Haico Victor Kok ,  Simon Gijsbert Josephus Mathijssen ,  Henricus Johannes Lambertus Megens ,  Samee Ur Rehman

IPC: G03F7/00 ,  G03F9/00

CPC classification number: G03F7/70633 ,  G03F7/706837 ,  G03F9/7034 ,  G03F9/7092

Abstract: A metrology method relating to measurement of a structure on a substrate, the structure being subject to one or more asymmetric deviation. The method includes obtaining at least one intensity asymmetry value relating to the one or more asymmetric deviations, wherein the at least one intensity asymmetry value includes a metric related to a difference or imbalance between the respective intensities or amplitudes of at least two diffraction orders of radiation diffracted by the structure; determining at least one phase offset value corresponding to the one or more asymmetric deviations based on the at least one intensity asymmetry value; and determining one or more measurement corrections for the one or more asymmetric deviations from the at least one phase offset value.

公开(公告)号：US12189314B2

公开(公告)日：2025-01-07

申请号：US18035008

申请日：2021-11-04

Applicant: ASML NETHERLANDS B.V.

Inventor： Sebastianus Adrianus Goorden ,  Simon Gijsbert Josephus Mathijssen ,  Leendert Jan Karssemeijer ,  Manouk Rijpstra ,  Ralph Brinkhof ,  Kaustuve Bhattacharyya

IPC: G03F9/00 ,  G03F7/00

Abstract: A method for a metrology process, the method includes obtaining first measurement data relating to a first set of measurement conditions and determining a first measurement recipe based on the first measurement data. At least one performance indicator is determined from one or more components of the first measurement data obtained from a component analysis or statistical decomposition. Alternatively, at least one performance indicator is determined from a comparison of one or more first measurement values relating to the first measurement recipe and one or more second measurement values relating to a second measurement recipe, where second measurement recipe is different to the first measurement data and relates a second set of measurement conditions, the second set of measurement conditions being different to the first set of measurement conditions.