公开(公告)号：US20210257181A1

公开(公告)日：2021-08-19

申请号：US17179165

申请日：2021-02-18

Applicant: ASML Netherlands B.V.

Inventor： Marcus Adrianus VAN DE KERKHOF ,  Jing ZHANG ,  Martijn Petrus Christianus VAN HEUMEN ,  Patriek Adrianus Alphonsus Maria BRUURS ,  Erheng WANG ,  Vineet SHARMA ,  Makfir SEFA ,  Shao-Wei FU ,  Simone Maria SCOLARI ,  Johannes Andreas Henricus Maria JACOBS

IPC: H01J37/20 ,  C23C16/27 ,  C23C16/40 ,  C23C16/06 ,  C23C16/50 ,  B05D1/00

Abstract: Apparatuses, systems, and methods for transferring fluid to a stage in a charged particle beam system are disclosed. In some embodiments, a stage may be configured to secure a wafer; a chamber may be configured to house the stage; and a tube may be provided within the chamber to transfer fluid between the stage and outside of the chamber. The tube may include a first tubular layer of first material, wherein the first material is a flexible polymer; and a second tubular layer of second material, wherein the second material is configured to reduce permeation of fluid or gas through the tube. In some embodiments, a system may include a degasser system outside of the chamber, where the degasser system may be configured to remove gases from the transfer fluid before the transfer fluid enters the tube.

公开(公告)号：US20240274400A1

公开(公告)日：2024-08-15

申请号：US18643379

申请日：2024-04-23

Applicant: ASML Netherlands B.V.

Inventor： Marcus Adrianus VAN DE KERKHOF ,  Jing ZHANG ,  Martijn Petrus Christianus VAN HEUMEN ,  Patriek Adrianus Alphonsus Maria BRUURS ,  Erheng WANG ,  Vineet SHARMA ,  Makfir SEFA ,  Shao-Wei FU ,  Simone Maria SCOLARI ,  Johannes Andreas Henricus Maria JACOBS

IPC: H01J37/20 ,  B01D19/00 ,  F16L11/04 ,  F16L11/12 ,  H01L21/67

CPC classification number: H01J37/20 ,  F16L11/04 ,  F16L11/12 ,  B01D19/0068 ,  H01J2237/2001 ,  H01L21/67288

Abstract: Apparatuses, systems, and methods for transferring fluid to a stage in a charged particle beam system are disclosed. In some embodiments, a stage may be configured to secure a wafer; a chamber may be configured to house the stage; and a tube may be provided within the chamber to transfer fluid between the stage and outside of the chamber. The tube may include a first tubular layer of first material, wherein the first material is a flexible polymer; and a second tubular layer of second material, wherein the second material is configured to reduce permeation of fluid or gas through the tube. In some embodiments, a system may include a degasser system outside of the chamber, where the degasser system may be configured to remove gases from the transfer fluid before the transfer fluid enters the tube.

公开(公告)号：US20210272829A1

公开(公告)日：2021-09-02

申请号：US17257900

申请日：2019-06-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Patriek Adrianus Alphonsus Maria BRUURS ,  Dennis Herman Caspar VAN BANNING ,  Jan-Gerard Cornelis VAN DER TOORN ,  Edwin Cornelis KADIJK

IPC: H01L21/67 ,  H01J37/244 ,  H01J37/20 ,  H01L21/68 ,  G01K11/125 ,  G01K1/14

Abstract: A stage apparatus including: an object table configured to hold an object; a positioning device configured to position the object table and the object held by the object table; and a remote temperature sensor configured to measure a temperature of the object table and/or the object, wherein the remote temperature sensor comprises a passive temperature sensing element.