公开(公告)号：US20140127842A1

公开(公告)日：2014-05-08

申请号：US14071820

申请日：2013-11-05

Applicant: Agency for Science, Technology and Research

Inventor： Jun-Feng Song ,  Xianshu Luo ,  Xiaoguang Tu ,  Patrick Guo-Qiang Lo ,  Mingbin Yu

IPC: G02B6/134

CPC classification number: G02F1/025 ,  G02B2006/12097 ,  G02B2006/12142 ,  G02F2201/063 ,  G02F2202/06 ,  G02F2202/105

Abstract: According to embodiments of the present invention, a method for forming an optical modulator is provided. The method includes providing a substrate, implanting dopants of a first conductivity type into the substrate to form a first doped region, implanting dopants of a second conductivity type into the substrate to form a second doped region, wherein a portion of the second doped region is formed over and overlaps with a portion of the first doped region to form a junction between the respective portions of the first doped region and the second doped region, and wherein a remaining portion of the second doped region is located outside of the junction, and forming a ridge waveguide, wherein the ridge waveguide overlaps with at least a part of the junction.

Abstract translation: 根据本发明的实施例，提供了一种用于形成光调制器的方法。 该方法包括提供衬底，将第一导电类型的掺杂剂注入到衬底中以形成第一掺杂区域，将第二导电类型的掺杂剂注入到衬底中以形成第二掺杂区域，其中第二掺杂区域的一部分是 与第一掺杂区域的一部分形成并重叠，以在第一掺杂区域和第二掺杂区域的各个部分之间形成结，并且其中第二掺杂区域的剩余部分位于结点外部，并形成 脊波导，其中脊波导与结的至少一部分重叠。

公开(公告)号：US09329415B2

公开(公告)日：2016-05-03

申请号：US14071820

申请日：2013-11-05

Applicant: Agency for Science, Technology and Research

Inventor： Jun-Feng Song ,  Xianshu Luo ,  Xiaoguang Tu ,  Patrick Guo-Qiang Lo ,  Mingbin Yu

IPC: G02F1/025 ,  G02B6/12 ,  H01L29/15 ,  H01P11/00 ,  H01L21/3215 ,  H01L21/321 ,  H01L29/49

CPC classification number: G02F1/025 ,  G02B2006/12097 ,  G02B2006/12142 ,  G02F2201/063 ,  G02F2202/06 ,  G02F2202/105

Abstract: According to embodiments of the present invention, a method for forming an optical modulator is provided. The method includes providing a substrate, implanting dopants of a first conductivity type into the substrate to form a first doped region, implanting dopants of a second conductivity type into the substrate to form a second doped region, wherein a portion of the second doped region is formed over and overlaps with a portion of the first doped region to form a junction between the respective portions of the first doped region and the second doped region, and wherein a remaining portion of the second doped region is located outside of the junction, and forming a ridge waveguide, wherein the ridge waveguide overlaps with at least a part of the junction.

Abstract translation: 根据本发明的实施例，提供了一种用于形成光调制器的方法。 该方法包括提供衬底，将第一导电类型的掺杂剂注入到衬底中以形成第一掺杂区域，将第二导电类型的掺杂剂注入到衬底中以形成第二掺杂区域，其中第二掺杂区域的一部分是 与第一掺杂区域的一部分形成并重叠，以在第一掺杂区域和第二掺杂区域的各个部分之间形成结，并且其中第二掺杂区域的剩余部分位于结点外部，并形成 脊波导，其中脊波导与结的至少一部分重叠。