公开(公告)号：US20100258723A1

公开(公告)日：2010-10-14

申请号：US12823296

申请日：2010-06-25

申请人： Akira IKEGAMI ,  Hideyuki KAZUMI ,  Koichiro TAKEUCHI ,  Atsushi KOBARU ,  Seiko OOMORI

发明人： Akira IKEGAMI ,  Hideyuki KAZUMI ,  Koichiro TAKEUCHI ,  Atsushi KOBARU ,  Seiko OOMORI

IPC分类号： H01J37/28

CPC分类号： G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24485 ,  H01J2237/2449

摘要： In a scanning electron microscope, an optimum scanning method for reducing the amount of deflection of a primary electron beam and secondary electrons is determined to acquire stable images. An energy filter is used to discriminate between energy levels. The change in yield of obtained electrons is used to measure the variation in specimen potential. The time constant of charging created during electron beam irradiation is extracted. The scanning method is optimized based on the extracted time constant to reduce the distortion and magnification variation that appear in a SEM image.

摘要翻译： 在扫描电子显微镜中，确定用于减少一次电子束和二次电子的偏转量的最佳扫描方法以获得稳定的图像。 能量滤波器用于区分能级。 获得的电子的产量变化用于测量样品电位的变化。 提取电子束照射期间产生的充电时间常数。 基于提取的时间常数优化扫描方法，以减少出现在SEM图像中的失真和放大变化。

公开(公告)号：US20090001279A1

公开(公告)日：2009-01-01

申请号：US12163121

申请日：2008-06-27

申请人： Atsushi KOBARU

发明人： Atsushi KOBARU

IPC分类号： H01J3/14

CPC分类号： H01J37/28 ,  H01J37/21 ,  H01J2237/21 ,  H01J2237/281 ,  H01J2237/2815

摘要： A charged particle beam apparatus for measuring and inspecting a sample having some parts in focus and other parts out of focus in an image due to the effect of the roughness of the sample surface is disclosed, in which in order to acquire a clear image of the whole or a predetermined area in the image, the focus adjustment conditions for each point in the area to be scanned by the charged particle beam are determined in advance, and the focus adjustment conditions thus determined are applied selectively to the patterns formed under the same fabrication conditions as the sample for which the focus adjustment conditions are determined.

摘要翻译： 公开了一种带电粒子束装置，用于测量和检查由于样品表面的粗糙度的影响而在图像中具有焦点部分和其他部分焦点的样品的样品，其中为了获得样品表面的清晰图像 整个或预定区域，预先确定要由被带电粒子束扫描的区域中的每个点的焦点调整条件，并且将如此确定的聚焦调节条件选择性地施加到在相同制造下形成的图案 作为确定焦点调整条件的样本的条件。

公开(公告)号：US20110032176A1

公开(公告)日：2011-02-10

申请号：US12907912

申请日：2010-10-19

申请人： Atsushi KOBARU ,  Hidetoshi Morokuma ,  Hiroki Kawada ,  Sho Takami ,  Katsuhiro Sasada ,  Kouichi Yamamoto ,  Norio Satou ,  Kunio Nakanishi

发明人： Atsushi KOBARU ,  Hidetoshi Morokuma ,  Hiroki Kawada ,  Sho Takami ,  Katsuhiro Sasada ,  Kouichi Yamamoto ,  Norio Satou ,  Kunio Nakanishi

IPC分类号： G09G1/06

CPC分类号： H01J37/265 ,  H01J37/28 ,  H01J2237/1536 ,  H01J2237/31749

摘要： An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.

摘要翻译： 一种适于在用带电粒子束扫描二维区域时抑制充电倾斜的图像形成方法和带电粒子束装置。 扫描位于第一扫描线和第二扫描线之间的第三扫描线。 在扫描第一，第二和第三扫描线之后，在第一扫描线和第三扫描线之间以及第二和第三扫描线之间扫描多条扫描线。

公开(公告)号：US20090194692A1

公开(公告)日：2009-08-06

申请号：US12362000

申请日：2009-01-29

申请人： Atsushi KOBARU

发明人： Atsushi KOBARU

IPC分类号： G01N23/00 ,  G21F3/00 ,  H01J3/14

CPC分类号： H01J37/09 ,  H01J2237/0264 ,  H01J2237/26 ,  H01J2237/28 ,  H01J2237/31749

摘要： A magnetic shield with which a high magnetic field suppression effect is realized in a restricted space and a charged particle radiation apparatus using the magnetic shield are described below. To achieve the above-described object, a scanning electron microscope wherein a shield for shielding against an external magnetic field is formed of a plurality of plate portions made of a magnetic material, the plate portions being disposed on the circumference of a circle whose center corresponds to a center of the space so that each plate portion has a surface direction set different from a line tangent to the circle, is proposed (see FIG. 1).

摘要翻译： 下面描述在限制空间中实现高磁场抑制效果的磁屏蔽和使用磁屏蔽的带电粒子辐射装置。 为了实现上述目的，一种扫描电子显微镜，其中用于屏蔽外部磁场的屏蔽件由多个由磁性材料制成的板部分形成，所述板部分设置在其中心对应于圆周的圆周上 提供到该空间的中心，使得每个板部具有与圆相切的线不同的表面方向（参见图1）。

公开(公告)号：US20080215260A1

公开(公告)日：2008-09-04

申请号：US12021619

申请日：2008-01-29

申请人： Atsushi KOBARU

发明人： Atsushi KOBARU

IPC分类号： G06F19/00

CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J2237/24495

摘要： An object of the present invention is to provide a synthesized signal forming method and an apparatus thereof for realizing both noise reduction and dosage reduction when synthesizing signals detected based on scans performed on a charged particle beam. In order to achieve the above object, with a method that synthesizes signals detected based on a plurality of scans performed on a charged particle beam to form a synthesized signal, a multiplication is performed among a plurality of signals obtained by the plurality of scans and, at the same time, for a multiplied signal, a calculation is performed in which an inverse of the number of previous scans is used as an exponent.

摘要翻译： 本发明的目的是提供一种合成信号形成方法及其装置，用于在合成基于对带电粒子束执行的扫描检测到的信号时实现降噪和减少剂量。 为了实现上述目的，通过合成基于对带电粒子束执行的多次扫描检测的信号以形成合成信号的方法，在通过多次扫描获得的多个信号之间执行相乘， 同时，对于相乘的信号，执行其中先前扫描次数的倒数作为指数的计算。