公开(公告)号：US20100258723A1

公开(公告)日：2010-10-14

申请号：US12823296

申请日：2010-06-25

申请人： Akira IKEGAMI ,  Hideyuki KAZUMI ,  Koichiro TAKEUCHI ,  Atsushi KOBARU ,  Seiko OOMORI

发明人： Akira IKEGAMI ,  Hideyuki KAZUMI ,  Koichiro TAKEUCHI ,  Atsushi KOBARU ,  Seiko OOMORI

IPC分类号： H01J37/28

CPC分类号： G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24485 ,  H01J2237/2449

摘要： In a scanning electron microscope, an optimum scanning method for reducing the amount of deflection of a primary electron beam and secondary electrons is determined to acquire stable images. An energy filter is used to discriminate between energy levels. The change in yield of obtained electrons is used to measure the variation in specimen potential. The time constant of charging created during electron beam irradiation is extracted. The scanning method is optimized based on the extracted time constant to reduce the distortion and magnification variation that appear in a SEM image.

摘要翻译： 在扫描电子显微镜中，确定用于减少一次电子束和二次电子的偏转量的最佳扫描方法以获得稳定的图像。 能量滤波器用于区分能级。 获得的电子的产量变化用于测量样品电位的变化。 提取电子束照射期间产生的充电时间常数。 基于提取的时间常数优化扫描方法，以减少出现在SEM图像中的失真和放大变化。

公开(公告)号：US20110278454A1

公开(公告)日：2011-11-17

申请号：US13190153

申请日：2011-07-25

申请人： Akira IKEGAMI ,  Minoru YAMAZAKI ,  Hideyuki KAZUMI ,  Koichiro TAKEUCHI ,  HIsaya Murakoshi

发明人： Akira IKEGAMI ,  Minoru YAMAZAKI ,  Hideyuki KAZUMI ,  Koichiro TAKEUCHI ,  HIsaya Murakoshi

IPC分类号： H01J37/28

CPC分类号： H01J37/244 ,  H01J37/21 ,  H01J37/28 ,  H01J37/3045 ,  H01J2237/24564 ,  H01J2237/2594 ,  H01J2237/28 ,  H01J2237/2816 ,  H01J2237/30461

摘要： A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring.

摘要翻译： 具有带电粒子束的扫描电子显微镜，当在向样品照射的状态下，向样品施加电压，使得带电粒子束不到达样品。 扫描电子显微镜还使用所获得的信号检测样品的电位信息，以及根据测定结果自动调整条件的装置。

公开(公告)号：US20080023641A1

公开(公告)日：2008-01-31

申请号：US11828714

申请日：2007-07-26

申请人： Koichiro TAKEUCHI ,  Tohru Ishitani

发明人： Koichiro TAKEUCHI ,  Tohru Ishitani

IPC分类号： G21K1/093

CPC分类号： H01J37/3056 ,  H01J37/09 ,  H01J37/1471 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A focused ion beam apparatus enables an ion beam to be focused highly accurately on a sample at the beam spot position of the case of the absence of magnetic field without causing isotope separation of the ion beam on the sample, even when there is a magnetic field on the ion beam optical axis or the magnetic field fluctuates. The focused ion beam apparatus comprises a corrective magnetic field generating unit 10 disposed on the optical axis of the ion beam 3 for correcting the deflection of the ion beam 3 due to an external magnetic field. The corrective magnetic field generating unit 10 includes pole-piece pairs 26A and 26B, each of which having two pole pieces 26a and 26b or 26c and 26d that are adjacent to each other with a gap d. The pole-piece pairs 26A and 26B are disposed opposite to each other with a gap g (>d) across the optical axis of the ion beam 3. Each of the pole pieces 26a to 26d is wound with an internal coil 29, and the pole-piece pairs 26A and 26B are each wound with an external coil 30 in such a manner as to surround the internal coils 29.

摘要翻译： 聚焦离子束装置使得离子束能够在不存在磁场的情况下的光束位置处的样品上高精度地聚焦，而不会导致样品上的离子束同位素分离，即使存在磁场 在离子束光轴上或磁场波动。 聚焦离子束装置包括设置在离子束3的光轴上的校正磁场产生单元10，用于校正由外部磁场引起的离子束3的偏转。 校正磁场产生单元10包括极片对26A和26B，其中每个具有间隙d彼此相邻的两个极片26a和26b或26c和26d。 极片对26A和26B彼此相对地设置有跨越离子束3的光轴的间隙g（> d）。 每个极片26a至26d都缠绕有内部线圈29，并且极靴对26A和26B以包围内部线圈29的方式各自缠绕有外部线圈30。