摘要:
A manufacturing method of a liquid crystal optical device is provided including an alignment film forming step of forming an alignment film containing silicon oxide on a substrate, and a liquid crystal cell forming step of disposing a pair of substrates at least one of which the alignment film has been formed on, opposite to each other interposing a liquid crystal therebetween. In the alignment film forming step, the substrate surface is bombarded with a plasma beam generated by vacuum arc discharge using a cathode containing silicon, where the substrate is disposed on the course of the plasma beam obliquely with an angle. When the plasma beam bombards the substrate surface, plasma ions in the plasma beam have higher kinetic energy or higher flux density than plasma ions in a plasma beam which, if bombarding the substrate obliquely at the angle, form a film having a column structure.
摘要:
A method of forming a film on a substrate is constituted by a step of depositing a material vaporized from an evaporation source onto a surface of a substrate while inclining the surface of the substrate with respect to a direction from the evaporation source to the substrate, and a step of providing the surface of the substrate with an energy depending on a deposition angle.
摘要:
A method for producing an orientation film that causes orientation of a liquid crystal includes a process of vapor depositing an inorganic oxide from an oblique direction on a substrate and forming an obliquely vapor-deposited film composed of a plurality of columnar structural bodies tilted at an angle equal to or greater than 20° from a substrate normal and a process of performing ion beam irradiation onto the plurality of columnar structural bodies constituting the obliquely vapor-deposited film. An ion beam irradiation direction in the ion beam irradiation process is in a plane including a vapor deposition direction of the inorganic oxide and the substrate normal and an angle of the ion beam irradiation direction θIB measured from the direction of the columnar structural bodies is within a range of +50°≦θIB≦+100° (θIB is taken to be positive on a side where the ion beam irradiation direction approaches the substrate normal from the direction of the columnar structural bodies).
摘要:
A liquid crystal apparatus includes a display region in which electrodes are disposed in a matrix pattern, a non-display region provided at a periphery of the display region, and a liquid crystal disposed in the display region and non-display region. The liquid crystal disposed in the display region is splay-aligned when a voltage is not applied and bend-aligned when the voltage is applied. The liquid crystal disposed in the non-display region is bend-aligned. The apparatus also includes an alignment film including an inorganic material provided in at least one of a pair of substrates. The thickness of the alignment film provided in the display region is smaller than the thickness of the alignment film provided in the non-display region.
摘要:
A film forming method is constituted by forming a silicon oxide film on a substrate by causing silicon generated by sputtering with silicon as a target to be incident on the substrate from an oblique direction while supplying oxygen gas onto the substrate.
摘要:
Provided is a liquid crystal apparatus that includes a display region in which electrodes are disposed in a matrix pattern and a non-display region provided at a periphery of the display region and has a liquid crystal disposed in the display region and non-display region, wherein the liquid crystal disposed in the display region is splay-aligned when a voltage is not applied and bend-aligned when the voltage is applied, the liquid crystal disposed in the non-display region is bend-aligned, an alignment film including an inorganic material is provided in at least one of a pair of substrates, and a thickness of the alignment film provided in the display region is smaller than a thickness of the alignment film provided in the non-display region.
摘要:
A liquid crystal device has a pair of substrates, an alignment film formed at least on one of the pair of substrates and liquid crystal showing an orientation defined by the alignment film. The alignment film is a carbon film having a cross-sectional structure inclined relative to the direction of the film thickness by a constant angle.
摘要:
A radiation detection apparatus comprising a sensor panel and a scintillator panel is provided. The scintillator panel including a substrate, a scintillator disposed on the substrate, and a scintillator protective film that has a first organic protective layer and an inorganic protective layer, and covers the scintillator. The scintillator protective film is located between the sensor panel and the scintillator. The first organic protective layer is located on a scintillator side from the inorganic protective layer. A surface on a sensor panel side of the scintillator is partially in contact with the inorganic protective layer.
摘要:
A radiation imaging apparatus includes a sensor which is placed in an internal space in the chassis and detects radiation. The apparatus includes a positioning mechanism which moves the sensor in the internal space to determine a position where radiation is detected, so as to change an area where radiation imaging is performed by detecting radiation using the sensor.