公开(公告)号：US10063210B2

公开(公告)日：2018-08-28

申请号：US15293108

申请日：2016-10-13

申请人： Qorvo US, Inc.

发明人： Kevin McCarron ,  John Belsick

IPC分类号： H03H3/02 ,  C30B25/06 ,  C30B25/18 ,  C30B29/40 ,  H03H9/205 ,  H03H9/02

CPC分类号： H03H3/02 ,  C23C14/0036 ,  C23C14/024 ,  C23C14/0617 ,  C23C14/086 ,  C23C14/226 ,  C23C14/3442 ,  C23C14/35 ,  C23C14/566 ,  C23C14/568 ,  C30B25/06 ,  C30B25/186 ,  C30B29/403 ,  H01J37/32715 ,  H01J37/3408 ,  H01J37/3417 ,  H01J37/3447 ,  H01J37/347 ,  H01L41/35 ,  H03H9/02015 ,  H03H9/02047 ,  H03H9/02157 ,  H03H9/125 ,  H03H9/173 ,  H03H9/175 ,  H03H9/205

摘要： Systems and methods for growing hexagonal crystal structure piezoelectric material with a c-axis that is tilted (e.g., 25 to 50 degrees) relative to normal of a face of a substrate are provided. A deposition system includes a linear sputtering apparatus, a translatable multi-aperture collimator, and a translatable substrate table arranged to hold multiple substrates, with the substrate table and/or the collimator being electrically biased to a nonzero potential. An enclosure includes first and second deposition stations each including a linear sputtering apparatus, a collimator, and a deposition aperture.

公开(公告)号：US09922809B2

公开(公告)日：2018-03-20

申请号：US15293063

申请日：2016-10-13

申请人： Qorvo US, Inc.

发明人： Kevin McCarron ,  John Belsick

IPC分类号： C23C14/35 ,  H01J37/34 ,  H01L41/35

CPC分类号： H03H3/02 ,  C23C14/0036 ,  C23C14/024 ,  C23C14/0617 ,  C23C14/086 ,  C23C14/226 ,  C23C14/3442 ,  C23C14/35 ,  C23C14/566 ,  C23C14/568 ,  C30B25/06 ,  C30B25/186 ,  C30B29/403 ,  H01J37/32715 ,  H01J37/3408 ,  H01J37/3417 ,  H01J37/3447 ,  H01J37/347 ,  H01L41/35 ,  H03H9/02015 ,  H03H9/02047 ,  H03H9/02157 ,  H03H9/125 ,  H03H9/173 ,  H03H9/175 ,  H03H9/205

摘要： Systems and methods for growing hexagonal crystal structure piezoelectric material with a c-axis that is tilted (e.g., 25 to 50 degrees) relative to normal of a face of a substrate are provided. A deposition system includes a linear sputtering apparatus, a translatable multi-aperture collimator, and a translatable substrate table arranged to hold multiple substrates, with the substrate table and/or the collimator being electrically biased to a nonzero potential. An enclosure includes first and second deposition stations each including a linear sputtering apparatus, a collimator, and a deposition aperture.

公开(公告)号：US20180030839A1

公开(公告)日：2018-02-01

申请号：US15199084

申请日：2016-08-01

申请人： GENERAL ELECTRIC COMPANY

发明人： Patrick James McCluskey ,  Bernard Patrick Bewlay ,  Ambarish Jayant Kulkarni ,  Krzysztof Jacek Lesnicki ,  Byron Andrew Pritchard ,  Nicole Jessica Tibbetts

IPC分类号： F01D5/28 ,  F01D25/00 ,  F04D29/54 ,  F01D9/04 ,  F04D29/02 ,  F04D29/32

CPC分类号： F01D5/288 ,  C23C14/0694 ,  C23C14/08 ,  C23C14/081 ,  C23C14/083 ,  C23C14/10 ,  C23C14/226 ,  C23C14/30 ,  F04D29/023 ,  F04D29/324 ,  F04D29/542 ,  F05D2260/607 ,  Y02T50/672 ,  Y02T50/675 ,  Y02T50/6765

摘要： An article includes a substrate that is substantially opaque to visible light and a coating disposed on the substrate. The coating includes a coating material having an inherent index of refraction, wherein the coating has an effective index of refraction that is less than the inherent index of refraction, and wherein the effective index of refraction is less than 1.8.

公开(公告)号：US20150098051A1

公开(公告)日：2015-04-09

申请号：US14495812

申请日：2014-09-24

申请人： Seiko Epson Corporation

发明人： Yoshimichi Matsumoto ,  Yoshio Taniguchi ,  Norikazu Komatsu

IPC分类号： G02F1/1337 ,  G02F1/1347 ,  G02F1/1343

CPC分类号： G02F1/133734 ,  C23C14/225 ,  C23C14/226

摘要： A liquid crystal device includes a liquid crystal layer, and an inorganic oriented film between the liquid crystal layer and an electrode, in which the inorganic oriented film has a first inorganic oriented film that has a first prismatic structure including silicon oxide, and a second inorganic oriented film that is formed so as to cover at least a portion of the first prismatic structure, and includes nitrogen.

摘要翻译： 液晶装置包括液晶层和液晶层与电极之间的无机取向膜，其中无机取向膜具有第一无机取向膜，该第一无机取向膜具有包含氧化硅的第一棱镜结构，第二无机取向膜 其形成为覆盖第一棱柱结构的至少一部分，并且包括氮。

公开(公告)号：US20150027613A1

公开(公告)日：2015-01-29

申请号：US14341349

申请日：2014-07-25

申请人： HPO Assets LLC

发明人： Anita TRAJKOVSKA-BROACH ,  Ying Sun ,  William Kokonaski ,  Pie Paolo Monticone ,  Niklaus Schneeberger

IPC分类号： G02F1/15 ,  B32B37/24 ,  C25D3/04 ,  C25D7/00 ,  C25D13/02 ,  G02B1/10 ,  C25D13/12

CPC分类号： G02F1/15 ,  B82Y30/00 ,  C23C14/083 ,  C23C14/226 ,  C23C14/505 ,  C25D7/00 ,  C25D9/04 ,  C25D13/02 ,  C25D13/12 ,  G02F2202/36 ,  Y10T156/10

摘要： EC film stacks and different layers within the EC film stacks are disclosed. Methods of manufacturing these layers are also disclosed. In one embodiment, an EC layer comprises nanostructured EC layer. These layers may be manufactured by various methods, including, including, but not limited to glancing, angle deposition, oblique angle deposition, electrophoresis, electrolyte deposition, and atomic layer deposition. The nanostructured EC layers have a high specific surface area, improved response times, and higher color efficiency.

摘要翻译： 公开了EC膜堆中的EC膜堆和EC膜堆内的不同层。 还公开了制造这些层的方法。 在一个实施方案中，EC层包含纳米结构的EC层。 这些层可以通过各种方法制造，包括但不限于扫视角度沉积，斜角沉积，电泳，电解质沉积和原子层沉积。 纳米结构的EC层具有高比表面积，改善的响应时间和更高的颜色效率。

公开(公告)号：US08898811B2

公开(公告)日：2014-11-25

申请号：US13729078

申请日：2012-12-28

申请人： Yi-Jun Jen ,  Ching-Wei Yu

发明人： Yi-Jun Jen ,  Ching-Wei Yu

IPC分类号： G01Q70/16 ,  G01N21/65 ,  B05D5/06 ,  C23C14/14 ,  C23C14/22

CPC分类号： G01N21/658 ,  B05D5/061 ,  C23C14/14 ,  C23C14/226 ,  Y10T428/12535 ,  Y10T428/24355

摘要： Disclosed herein describes an SERS sensing substrate comprising upright metal nanostructures made by using oblique angle deposition (OAD) collocating with self-rotation substrate, wherein said upright nanostructures include individual upright nanopillars and metal/dielectric multilayered upright nanopillar stacks. The SERS sensing substrate exhibits higher and enhanced adsorption spectra for unpolarized incident rays in the visible and infrared wavelength regimes.

摘要翻译： 本文公开了一种SERS感测衬底，其包括通过使用与自旋衬底并置的斜角沉积（OAD）制成的直立金属纳米结构，其中所述直立纳米结构包括单独的直立纳米柱和金属/电介质多层直立纳米柱叠层。 SERS感测基板在可见光和红外波长方案中对非偏振入射光线显示较高和增强的吸收光谱。

公开(公告)号：US20130171474A1

公开(公告)日：2013-07-04

申请号：US13451844

申请日：2012-04-20

申请人： Ji-Hoon YANG ,  Jae-In Jeong

发明人： Ji-Hoon YANG ,  Jae-In Jeong

IPC分类号： B32B9/04 ,  B05D3/10 ,  B05D3/14

CPC分类号： C09D5/00 ,  C23C14/0641 ,  C23C14/226

摘要： The present invention relates to hard coating layer and a method for forming the hard coating layer. A method for forming hard coating layer which comprises: washing a substrate; installing the washed substrate in a vacuum equipment, and vacuating the chamber of the vacuum equipment; cleaning the substrate; forming oblique coating layer on the substrate; and forming vertical coating layer, vertically to the substrate, on the oblique coating layer by applying bias-voltage after forming oblique coating layer is provided. According to present invention, hardness of coating layer may be enhanced by forming a oblique coating layer and vertical coating layer on a substrate.

摘要翻译： 硬涂层技术领域本发明涉及硬涂层及其制造方法。 一种形成硬涂层的方法，包括：洗涤基材; 将洗涤过的衬底安装在真空设备中，并使真空设备的室真空化; 清洗基材; 在基板上形成斜涂层; 并且在形成倾斜涂层之后通过施加偏置电压，在倾斜涂层上形成垂直于衬底的垂直涂层。 根据本发明，通过在基板上形成倾斜涂层和垂直涂层可以提高涂层的硬度。

公开(公告)号：US20120167573A1

公开(公告)日：2012-07-05

申请号：US12981661

申请日：2010-12-30

申请人： Igor V. Belousov ,  Yuriy G. Kononenko ,  Vadim I. Bondarchuk ,  Anatoly Kuzmichev ,  John F. Mullooly, JR.

发明人： Igor V. Belousov ,  Yuriy G. Kononenko ,  Vadim I. Bondarchuk ,  Anatoly Kuzmichev ,  John F. Mullooly, JR.

IPC分类号： F23R3/00 ,  B32B7/00 ,  C23C14/48 ,  F04D29/38 ,  C23C16/44 ,  C23C14/30

CPC分类号： C23C14/083 ,  C23C14/226 ,  C23C28/321 ,  C23C28/3215 ,  C23C28/325 ,  C23C28/345 ,  C23C28/3455 ,  Y10T428/24058 ,  Y10T428/2495 ,  Y10T428/249921 ,  Y10T428/264

摘要： A coated part is exposed to a gas flow. The gas flow has a characteristic gas flow direction distribution over a surface of the coated part. The coated part has a substrate having a substrate surface and a coating over the substrate surface. The coating comprises at least one coating layer. A first such layer is columnar and has a column boundary direction distribution. The column boundary direction distribution is selected for partial local alignment with the gas flow direction distribution.

摘要翻译： 涂覆部分暴露于气流。 气流在涂覆部件的表面上具有特征气流方向分布。 涂覆部分具有基材，该基材具有基材表面和在基材表面上的涂层。 涂层包含至少一层涂层。 第一个这样的层是柱状的并且具有列边界方向分布。 选择柱边界方向分布用于与气体流动方向分布的部分局部对准。

公开(公告)号：US07998539B2

公开(公告)日：2011-08-16

申请号：US12289816

申请日：2008-11-05

申请人： Chia-Hua Chang ,  Chin-Sheng Yang ,  Ching-Hua Chiu ,  Pei-Chen Yu ,  Hao-Chung Kuo

发明人： Chia-Hua Chang ,  Chin-Sheng Yang ,  Ching-Hua Chiu ,  Pei-Chen Yu ,  Hao-Chung Kuo

IPC分类号： C23C14/30

CPC分类号： C23C14/226 ,  C23C14/086 ,  H01L31/022475 ,  H01L31/022483 ,  H01L31/1884 ,  Y02E10/50 ,  Y10T428/249953 ,  Y10T428/249978

摘要： A method of forming thin-film structure by oblique-angle deposition is provided. The method includes the steps of: evaporating target source in a chamber by an electron beam evaporation system, and introducing process gas into the chamber and adjusting tilt angle of the evaporation substrate and controlling temperature in the chamber during evaporation to form thin-film on a evaporation substrate by oblique-angle deposition, and then annealing the evaporation substrate to form a thin-film having porous nanorod microstructure.

摘要翻译： 提供了通过斜角沉积形成薄膜结构的方法。 该方法包括以下步骤：通过电子束蒸发系统蒸发室中的目标源，并且将工艺气体引入室中并调节蒸发衬底的倾斜角度并且在蒸发期间控制室中的温度以在蒸发器中形成薄膜 通过斜角沉积蒸发衬底，然后对蒸发衬底进行退火以形成具有多孔纳米棒微结构的薄膜。

公开(公告)号：US20100209336A1

公开(公告)日：2010-08-19

申请号：US12594047

申请日：2008-03-26

申请人： Toh-Ming Lu ,  Gwo-Ching Wang ,  Fu Tang ,  Thomas Parker

发明人： Toh-Ming Lu ,  Gwo-Ching Wang ,  Fu Tang ,  Thomas Parker

IPC分类号： C01B3/02 ,  B32B7/00 ,  C23C16/06 ,  B01J23/44 ,  B01J23/75 ,  B01J23/20 ,  B01J23/42 ,  H01J1/02

CPC分类号： C01B3/0084 ,  B22F1/0018 ,  B22F2001/0033 ,  B82Y30/00 ,  C01B3/0026 ,  C23C14/16 ,  C23C14/226 ,  C23C14/24 ,  C30B23/00 ,  C30B29/02 ,  C30B29/60 ,  Y02E60/327 ,  Y10T428/23993 ,  Y10T428/24174

摘要： A nanostructure includes a plurality of metal nanoblades positioned with one edge on a substrate. Each of the plurality of metal nanoblades has a large surface area to mass ratio and a width smaller than a length. A method of storing hydrogen includes coating a plurality of magnesium nanoblades with a hydrogen storage catalyst and storing hydrogen by chemically forming magnesium hydride with the plurality of magnesium nanoblades.

摘要翻译： 纳米结构包括多个金属纳米棒，其位于基底上的一个边缘。 多个金属纳米棒中的每一个具有大的表面积与质量比，并且宽度小于长度。 一种储存氢的方法包括用储氢催化剂涂覆多个镁纳米薄片并通过与多个镁纳米薄层化学形成氢化镁来储存氢。