Substrate polishing device and method
    2.
    发明授权
    Substrate polishing device and method 失效
    基材抛光装置及方法

    公开(公告)号:US06688956B1

    公开(公告)日:2004-02-10

    申请号:US09934780

    申请日:2001-08-22

    IPC分类号: B24D1100

    摘要: To address the deficiencies of the prior art, the present invention provides a polishing pad comprising a thermoplastic polymer and a method of manufacturing therefor. More specifically, the present invention polishing pad fabricated from an extruded amorphous thermoplastic and free of a gate vestige. The invention also provides a method of manufacturing a polishing pad that is free from a gate vestige pad from an extruded amorphous thermoplastic.

    摘要翻译: 为了解决现有技术的缺点,本发明提供一种包含热塑性聚合物的抛光垫及其制造方法。 更具体地说,本发明的抛光垫由挤出的非晶态热塑性塑料制成并且没有浇口痕迹。 本发明还提供了一种制造抛光垫的方法,所述抛光垫与挤出的非晶态热塑性材料不相隔离。

    Polishing pad and method for in situ delivery of chemical mechanical polishing slurry modifiers and applications thereof
    5.
    发明授权
    Polishing pad and method for in situ delivery of chemical mechanical polishing slurry modifiers and applications thereof 失效
    抛光垫和化学机械抛光浆料改性剂的原位输送方法及其应用

    公开(公告)号:US06575823B1

    公开(公告)日:2003-06-10

    申请号:US10077709

    申请日:2002-03-04

    IPC分类号: B24D328

    CPC分类号: B24B37/24 B24D3/28 B24D3/346

    摘要: The present invention is directed, in general, to polishing pads for chemical mechanical polishing of semiconductor wafers and integrated circuits. More specifically, the invention is directed to polishing pads containing a precursor slurry modifier. In the presence of a polishing slurry during chemical mechanical polishing, the precursor is released to the polishing slurry to form a slurry modifier thereby improving polishing.

    摘要翻译: 本发明一般涉及用于半导体晶片和集成电路的化学机械抛光的抛光垫。 更具体地,本发明涉及包含前体浆料改性剂的抛光垫。 在化学机械抛光期间在抛光浆料存在下,将前体释放到抛光浆料中以形成浆料改性剂,从而改善抛光。

    SYSTEM FOR AND METHOD FOR PSYCHOLOGICAL ASSESSMENT
    7.
    发明申请
    SYSTEM FOR AND METHOD FOR PSYCHOLOGICAL ASSESSMENT 审中-公开
    心理评估系统和方法

    公开(公告)号:US20100055658A1

    公开(公告)日:2010-03-04

    申请号:US12282858

    申请日:2007-03-13

    IPC分类号: G09B7/00

    CPC分类号: G09B7/00

    摘要: In systems, methods and program products relating to the assessment of individuals, a subject can be provided with an assessment through software and a computer for improved functionality. The software may be directly installed on the subject's computer or may be on a remote server accessible through a communication network, such as a local network or the Internet. Stimuli to be presented to subject are selected in real time and may be selected randomly from a database of stimuli. Further, in the event of borderline cases, a refinement process may be used to provide an accurate assessment of the subject. Methods for the assessment of teams, comprising subject individuals, for the construction of ideal process profiles, and for coaching individuals are provided.

    摘要翻译: 在与个人评估有关的系统,方法和程序产品中,可以通过软件和计算机提供对主题的评估以改进功能。 该软件可以直接安装在被摄体的计算机上,或者可以在可通过诸如本地网络或因特网的通信网络访问的远程服务器上。 要呈现给受试者的刺激是实时选择的,并且可以从刺激数据库中随机选择。 此外,如果发生边界案件,可以使用细化过程来提供对主题的准确评估。 提供了评估团队的方法,包括受试者个人,构建理想的过程简档和辅导人员。

    Polishing pad composition and method of use
    9.
    发明授权
    Polishing pad composition and method of use 失效
    抛光垫组成及使用方法

    公开(公告)号:US06764574B1

    公开(公告)日:2004-07-20

    申请号:US09938150

    申请日:2001-08-22

    IPC分类号: H01L21302

    CPC分类号: B24B37/24 B24D3/28 B24D3/346

    摘要: The present invention is directed, in general, to packaged polishing pads for chemical mechanical polishing of semiconductor wafers and integrated circuits. More specifically, the invention is directed to a method of preparing and packing the pad and the packaging therefor. Prior to placing the pad on a platen and polishing with the pad, a polishing pad having an hygroscopic absorbency is soaked with an aqueous media for a time sufficient to equilibrate the pad. The pad maybe packaged by placement in a sealable moisture tight package after soaking or before soaking along with a sufficient quantity of aqueous media to allow the pad to equilibrate.

    摘要翻译: 本发明一般涉及用于半导体晶片和集成电路的化学机械抛光的封装抛光垫。 更具体地,本发明涉及一种制备和包装垫及其包装的方法。 在将垫放置在压板上并用垫抛光之前,将具有吸湿吸收性的抛光垫用水性介质浸泡足以平衡垫的时间。 在浸泡之后或在浸泡之前,通过放置在可密封的防潮包装中,垫可以包含足够量的水性介质以使垫平衡。