公开(公告)号：US20100238311A1

公开(公告)日：2010-09-23

申请号：US12161187

申请日：2007-01-16

申请人： Aleksey Kolesnychenko ,  Levinus Pieter Bakker ,  Frank Jeroen Pieter Schuurmans

发明人： Aleksey Kolesnychenko ,  Levinus Pieter Bakker ,  Frank Jeroen Pieter Schuurmans

IPC分类号： H04N5/228

CPC分类号： G02B27/46 ,  G02B27/58 ,  G06E3/00

摘要： An imaging device for forming an image of a sample object includes an optical device and a processing unit. The optical device captures a Fourier spectrum of an object. The processing unit is arranged for processing the Fourier spectrum from the optical device and is adapted for determining the image of the sample object from the intensity of the Fourier spectrum of the sample object and the intensity of the Fourier spectrum of a combination of the sample object and a reference object.

摘要翻译： 用于形成样本物体的图像的成像装置包括光学装置和处理单元。 光学器件捕获对象的傅里叶谱。 处理单元被布置用于从光学装置处理傅立叶频谱，并且适于根据样本对象的傅立叶频谱的强度和样本对象的组合的傅里叶谱的强度来确定样本对象的图像 和参考对象。

公开(公告)号：US20060138350A1

公开(公告)日：2006-06-29

申请号：US11022943

申请日：2004-12-28

申请人： Vadim Yevgenyevich Banine ,  Levinus Pieter Bakker ,  Aleksey Kolesnychenko ,  Johannes Hubertus Josephina Moors ,  Frank Jeroen Pieter Schuurmans

发明人： Vadim Yevgenyevich Banine ,  Levinus Pieter Bakker ,  Aleksey Kolesnychenko ,  Johannes Hubertus Josephina Moors ,  Frank Jeroen Pieter Schuurmans

IPC分类号： G03F7/20

CPC分类号： G03F7/70916

摘要： A lithographic apparatus includes a source for generating radiation, an illumination system for conditioning the radiation, a patterning device for patterning the conditioned radiation, and a projection system for projecting the patterned radiation onto a target portion of a substrate. The illumination system includes a debris mitigating system for mitigating debris particles that are released with the generation of radiation, and an optical system for collecting the radiation. The debris mitigation system is arranged to directly evaporate the debris particles, or to directly charge the debris particles, or to directly produce a plasma out of the debris particles, or any combination thereof, in a path along which the radiation propagates from the source to the optical system.

摘要翻译： 光刻设备包括用于产生辐射的源，用于调节辐射的照明系统，用于对经调节的辐射进行图案化的图案形成装置，以及用于将图案化的辐射投影到基板的目标部分上的投影系统。 照明系统包括用于减轻随着辐射产生而释放的碎片颗粒的碎片减轻系统和用于收集辐射的光学系统。 碎片减缓系统被设置为直接蒸发碎片颗粒，或直接对碎屑颗粒进行充填，或直接从碎片颗粒或其任何组合产生等离子体，辐射沿着该路径从源传播到 光学系统。

公开(公告)号：US08094311B2

公开(公告)日：2012-01-10

申请号：US11912342

申请日：2006-04-26

申请人： Natallia Uzunbajakava ,  Aleksey Kolesnychenko ,  Antonius Theodorus Martinus Van Gogh ,  Gert 'T Hooft ,  Frank Jeroen Pieter Schuurmans

发明人： Natallia Uzunbajakava ,  Aleksey Kolesnychenko ,  Antonius Theodorus Martinus Van Gogh ,  Gert 'T Hooft ,  Frank Jeroen Pieter Schuurmans

IPC分类号： G01N21/31

CPC分类号： G01J3/32 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/0229 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/28 ,  G01J2003/1282 ,  G01N21/274

摘要： The invention relates to a multivariate calibration which can be used when the optical system used for that method does not comprise a multi-channel detector such as a CCD sensor or a line array of photodiodes. An optical system without a multi-channel detector doesn't allow to carry out preprocessing steps. Thus there is the need to carry out these preprocessing steps in another way. It is suggested to partially replace the preprocessing step by a measurement of the optical signal, whereby the measurement comprises transmitting or reflecting the optical signal by an optical element, thereby weighing the optical signal by a spectral weighing function. The advantage of the invention is to teach how such an optical system without a bulky and expensive CCD sensor can be used to carry out a multivariate calibration and preprocessing steps.

摘要翻译： 本发明涉及当用于该方法的光学系统不包括诸如CCD传感器或光电二极管的线阵列的多通道检测器时可以使用的多变量校准。 没有多通道检测器的光学系统不允许执行预处理步骤。 因此，需要以另一种方式执行这些预处理步骤。 建议通过光信号的测量部分地代替预处理步骤，由此测量包括通过光学元件发送或反射光信号，从而通过光谱称重功能称量光信号。 本发明的优点是教导如何不使用庞大且昂贵的CCD传感器的这种光学系统来执行多变量校准和预处理步骤。

公开(公告)号：US20090268203A1

公开(公告)日：2009-10-29

申请号：US11912342

申请日：2006-04-26

申请人： Natallia Uzunbajakava ,  Aleksey Kolesnychenko ,  Antonius Theodorus Martinus Van Gogh ,  Gert 'T Hooft ,  Frank Jeroen Pieter Schuurmans

发明人： Natallia Uzunbajakava ,  Aleksey Kolesnychenko ,  Antonius Theodorus Martinus Van Gogh ,  Gert 'T Hooft ,  Frank Jeroen Pieter Schuurmans

IPC分类号： G01N21/31

CPC分类号： G01J3/32 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/0229 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/28 ,  G01J2003/1282 ,  G01N21/274

摘要： The invention relates to a multivariate calibration which can be used when the optical system used for that method does not comprise a multi-channel detector such as a CCD sensor or a line array of photodiodes. An optical system without a multi-channel detector doesn't allow to carry out preprocessing steps. Thus there is the need to carry out these preprocessing steps in another way. It is suggested to partially replace the preprocessing step by a measurement of the optical signal, whereby the measurement comprises transmitting or reflecting the optical signal by an optical element, thereby weighing the optical signal by a spectral weighing function. The advantage of the invention is to teach how such an optical system without a bulky and expensive CCD sensor can be used to carry out a multivariate calibration and preprocessing steps.

摘要翻译： 本发明涉及当用于该方法的光学系统不包括诸如CCD传感器或光电二极管的线阵列的多通道检测器时可以使用的多变量校准。 没有多通道检测器的光学系统不允许执行预处理步骤。 因此，需要以另一种方式执行这些预处理步骤。 建议通过光信号的测量部分地代替预处理步骤，由此测量包括通过光学元件发送或反射光信号，从而通过光谱称重功能称量光信号。 本发明的优点是教导如何不使用庞大且昂贵的CCD传感器的这种光学系统来执行多变量校准和预处理步骤。

公开(公告)号：US08797503B2

公开(公告)日：2014-08-05

申请号：US13149404

申请日：2011-05-31

申请人： Joeri Lof ,  Antonius Theodorus Anna Maria Derksen ,  Christiaan Alexander Hoogendam ,  Aleksey Kolesnychenko ,  Erik Roelof Loopstra ,  Theodorus Marinus Modderman ,  Johannes Catharinus Hubertus Mulkens ,  Roelof Aeilko Siebrand Ritsema ,  Klaus Simon ,  Joannes Theodoor De Smit ,  Alexander Straaijer ,  Bob Streefkerk ,  Helmar Van Santen

发明人： Joeri Lof ,  Antonius Theodorus Anna Maria Derksen ,  Christiaan Alexander Hoogendam ,  Aleksey Kolesnychenko ,  Erik Roelof Loopstra ,  Theodorus Marinus Modderman ,  Johannes Catharinus Hubertus Mulkens ,  Roelof Aeilko Siebrand Ritsema ,  Klaus Simon ,  Joannes Theodoor De Smit ,  Alexander Straaijer ,  Bob Streefkerk ,  Helmar Van Santen

IPC分类号： G03B27/52

CPC分类号： G03F7/70341 ,  G03F7/707 ,  G03F7/7085 ,  G03F9/7088

摘要： In a lithographic apparatus, a liquid supply system to provide a liquid to a space between the table and an optical element and to contact a surface of the optical element, the space having a cross-sectional area smaller than the area of the substrate, the liquid supply system comprising a liquid confinement structure extending along at least a part of a boundary of the space between the optical element surface and the table, wherein at least part of the liquid confinement structure is positioned between the optical element surface and the table, the at least part of the liquid confinement structure has an aperture through which the patterned beam can pass, the liquid confinement structure comprises an inlet to supply the liquid to the space above the aperture, and the liquid confinement structure comprises an outlet to remove the liquid, supplied by the inlet, from the space below the aperture.

摘要翻译： 在光刻设备中，液体供应系统将液体提供到工作台与光学元件之间的空间并与光学元件的表面相接触，该空间的横截面积小于衬底的面积， 液体供应系统包括沿着光学元件表面和工作台之间的空间的边界的至少一部分延伸的液体限制结构，其中液体限制结构的至少一部分位于光学元件表面和工作台之间， 所述液体限制结构的至少一部分具有所述图案化束可以穿过的孔，所述液体限制结构包括将所述液体供应到所述孔上方的空间的入口，并且所述液体限制结构包括用于除去所述液体的出口， 由入口提供，从孔下方的空间。

公开(公告)号：US08208120B2

公开(公告)日：2012-06-26

申请号：US12078997

申请日：2008-04-09

申请人： Joeri Lof ,  Antonius Theodorus Anna Maria Derksen ,  Christiaan Alexander Hoogendam ,  Aleksey Kolesnychenko ,  Erik Roelof Loopstra ,  Theodorus Marinus Modderman ,  Johannes Catharinus Hubertus Mulkens ,  Roelof Aeilko Siebrand Ritsema ,  Klaus Simon ,  Joannes Theodoor De Smit ,  Alexander Straaijer ,  Bob Streefkerk ,  Helmar Van Santen ,  Sjoerd Nicolaas Lambertus Donders

发明人： Joeri Lof ,  Antonius Theodorus Anna Maria Derksen ,  Christiaan Alexander Hoogendam ,  Aleksey Kolesnychenko ,  Erik Roelof Loopstra ,  Theodorus Marinus Modderman ,  Johannes Catharinus Hubertus Mulkens ,  Roelof Aeilko Siebrand Ritsema ,  Klaus Simon ,  Joannes Theodoor De Smit ,  Alexander Straaijer ,  Bob Streefkerk ,  Helmar Van Santen ,  Sjoerd Nicolaas Lambertus Donders

IPC分类号： G03B27/42

CPC分类号： G03F7/70341 ,  G03F7/707 ,  G03F7/7085 ,  G03F9/7088

摘要： In a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. Gas is used between the structure and the surface of the substrate to contain liquid in the space.

摘要翻译： 在光刻投影装置中，结构围绕投影系统与光刻投影装置的基板台之间的空间。 在结构和衬底的表面之间使用气体以在空间中容纳液体。

公开(公告)号：US20100182576A1

公开(公告)日：2010-07-22

申请号：US12727456

申请日：2010-03-19

申请人： Helmar VAN SANTEN ,  Aleksey Kolesnychenko

发明人： Helmar VAN SANTEN ,  Aleksey Kolesnychenko

IPC分类号： G03B27/52

CPC分类号： G03F7/70866 ,  G03F7/70341

摘要： A liquid supply system for an immersion lithographic projection apparatus is disclosed in which a space is defined between the projection system, a barrier member and a substrate. The barrier member is not sealed such that, during use, immersion liquid is allowed to flow out the space and between the barrier member and the substrate.

摘要翻译： 公开了一种用于浸没式光刻投影装置的液体供应系统，其中在投影系统，阻挡构件和基板之间限定空间。 阻挡构件不被密封，使得在使用期间，允许浸没液体流出空间以及阻挡构件和基底之间。

公开(公告)号：US07593093B2

公开(公告)日：2009-09-22

申请号：US11710408

申请日：2007-02-26

申请人： Joeri Lof ,  Hans Butler ,  Sjoerd Nicolaas Lambertus Donders ,  Aleksey Kolesnychenko ,  Erik Roelof Loopstra ,  Hendricus Johannes Maria Meijer ,  Jeroen Johannes Sophia Maria Mertens ,  Johannes Catharinus Hubertus Mulkens ,  Roelof Aeilko Siebrand Ritsema ,  Frank Van Schaik ,  Timotheus Franciscus Sengers ,  Klaus Simon ,  Joannes Theodoor De Smit ,  Alexander Straaijer ,  Helmar Van Santen

发明人： Joeri Lof ,  Hans Butler ,  Sjoerd Nicolaas Lambertus Donders ,  Aleksey Kolesnychenko ,  Erik Roelof Loopstra ,  Hendricus Johannes Maria Meijer ,  Jeroen Johannes Sophia Maria Mertens ,  Johannes Catharinus Hubertus Mulkens ,  Roelof Aeilko Siebrand Ritsema ,  Frank Van Schaik ,  Timotheus Franciscus Sengers ,  Klaus Simon ,  Joannes Theodoor De Smit ,  Alexander Straaijer ,  Helmar Van Santen

IPC分类号： G03B27/42 ,  G03B27/52

CPC分类号： G03F7/70341 ,  G03F7/707 ,  G03F7/7085 ,  G03F7/70866

摘要： A lithographic projection apparatus is disclosed in which a space between the projection system and the substrate is filled with a liquid. An edge seal member at least partly surrounds the substrate or other object on a substrate table to prevent liquid loss when edge portions of the substrate or other object are, for example, imaged or illuminated.

公开(公告)号：US20090203544A1

公开(公告)日：2009-08-13

申请号：US12306289

申请日：2007-07-03

申请人： Anke Pierik ,  Johan Frederik Dijksman ,  Hendrik Roelof Stapert ,  Roy Gerardus Franciscus Antonius Verbeek ,  Aleksey Kolesnychenko

发明人： Anke Pierik ,  Johan Frederik Dijksman ,  Hendrik Roelof Stapert ,  Roy Gerardus Franciscus Antonius Verbeek ,  Aleksey Kolesnychenko

IPC分类号： C40B60/14 ,  C40B50/14 ,  C40B40/00

CPC分类号： G01N35/1074 ,  B01J19/0046 ,  B01J2219/0036 ,  B01J2219/00378 ,  B01J2219/00527 ,  B01J2219/00659 ,  B01J2219/00693 ,  G01N35/1016 ,  G01N2035/1076

摘要： The invention relates to a printer device for producing biological test arrays by depositing an array of biofluids onto a substrate. The invention further relates to the use of such a device in the production of biological test arrays. The invention also relates to a method for producing a biological test array. The invention moreover relates to a biological test array. The method according to the invention is failure-proof, and results in biological test arrays of superior quality.

摘要翻译： 本发明涉及一种用于通过将生物流体阵列沉积到基底上来生产生物测试阵列的打印机装置。 本发明还涉及这种装置在生物测试阵列生产中的应用。 本发明还涉及一种用于生产生物测试阵列的方法。 本发明还涉及生物测试阵列。 根据本发明的方法是无故障的，并且导致具有优良品质的生物测试阵列。

公开(公告)号：US20090194693A1

公开(公告)日：2009-08-06

申请号：US12301642

申请日：2007-05-14

申请人： Derk Jan Wilfred Klunder ,  Aleksey Kolesnychenko

发明人： Derk Jan Wilfred Klunder ,  Aleksey Kolesnychenko

IPC分类号： G01N21/64 ,  G01N21/76

CPC分类号： G01N21/6456 ,  G01N21/6428 ,  G01N21/76

摘要： An imaging apparatus is disclosed for combined temperature and luminescence spatial imaging of an object (1), such as a bio-array for detection of biological molecules. Light (5) is separated into a first (10) and a second (20) optical path, where the first optical path (10) guides infrared (IR), and the second optical path (20) guides luminescence light, preferably fluorescence light, from the object (1). Image intensifying means (30) converts infrared light (10a) in the first optical path into intensified light (10b), preferably visible light. Photo detection means (100) are arranged for spatial imaging of the object (1), the photo detection means being arranged for alternately receiving light from the first (10) and the second (20) optical path. Processing means (200) are capable of combining a temperature image (11) with a luminescence image (21) so as to obtain a combined image (25) of the object with a direct spatial correspondence between the two images. For bio-arrays this provides many advantages in relation to combined imaging of an array, whereupon numerous probe molecules are located.

摘要翻译： 公开了用于物体（1）的组合温度和发光空间成像的成像装置，例如用于检测生物分子的生物阵列。 光（5）被分离为第一光路（10）和第二光路（20），其中第一光路（10）引导红外（IR），第二光路（20）引导发光，优选荧光 ，从对象（1）。 图像增强装置（30）将第一光路中的红外光（10a）转换成强光（10b），优选可见光。 照片检测装置（100）布置成用于物体（1）的空间成像，光检测装置被布置成交替地接收来自第一光（10）和第（20）光路的光。 处理装置（200）能够将温度图像（11）与发光图像（21）组合，从而以两个图像之间的直接空间对应来获得对象的组合图像（25）。 对于生物阵列，这提供了与阵列的组合成像相关的许多优点，因此存在许多探针分子。