摘要:
A substrate table of an immersion lithographic apparatus is disclosed which comprises a barrier configured to collect liquid. The barrier surrounds the substrate and is spaced apart from the substrate. In this way any liquid which is spilt from the liquid supply system can be collected to reduce the risk of contamination of delicate components of the lithographic projection apparatus.
摘要:
A substrate table of an immersion lithographic apparatus is disclosed which comprises a barrier configured to collect liquid. The barrier surrounds the substrate and is spaced apart from the substrate. In this way any liquid which is spilt from the liquid supply system can be collected to reduce the risk of contamination of delicate components of the lithographic projection apparatus.
摘要:
A substrate table of an immersion lithographic apparatus is disclosed which comprises a barrier configured to collect liquid. The barrier surrounds the substrate and is spaced apart from the substrate. In this way any liquid which is spilt from the liquid supply system can be collected to reduce the risk of contamination of delicate components of the lithographic projection apparatus.
摘要:
A substrate table of an immersion lithographic apparatus is disclosed which comprises a barrier configured to collect liquid. The barrier surrounds the substrate and is spaced apart from the substrate. In this way any liquid which is spilt from the liquid supply system can be collected to reduce the risk of contamination of delicate components of the lithographic projection apparatus.
摘要:
The invention relates to x-ray filters in a collimator for controlling the energy of an x-ray beam along a projection axis in computed tomography systems. According to the invention, the filter assembly comprises a filter element for attenuating the x-ray beam, and at least a support plate which fixes the filter element. The filter element and the support plate are notch-shaped in the center part of the filter assembly along a direction perpendicular to the projection axis. The design may free space to be used by other collimator parts and further allows use of more than one filter element in a filter assembly for backup purposes. This simplifies replacement of a defective x-ray filter in the field.
摘要:
A mirror assembly to interact with a beam of radiation of a lithographic apparatus is disclosed. The mirror assembly includes a mirror, a piezo electric actuator, and a mover structure, the mover structure connected to the mirror, an assembly of the mirror and the mover structure being pivotable about a pivot point, the piezo electric actuator having a contacting surface to establish a slip-stick contact with the mover structure.
摘要:
A lithographic apparatus including means for selectively transmitting a projection beam before imaging the patterned projection beam onto a substrate. The means may include any of the following: a selectively transmitting device disposed downstream of a patterning device in the direction of the projection beam, a fixed and a moving set of masking blades in a scanning system or an array of switchable elements. The means may be provided to a mask table/holder or to a frame or structure of the lithographic projection apparatus.
摘要:
A lithographic apparatus including means for selectively transmitting a projection beam before imaging the patterned projection beam onto a substrate. The means may include any of the following: a selectively transmitting device disposed downstream of a patterning device in the direction of the projection beam, a fixed and a moving set of masking blades in a scanning system or an array of switchable elements. The means may be provided to a mask table/holder or to a frame or structure of the lithographic projection apparatus.
摘要:
A method for displacing a movable element (3) by means of at least two actuators (4, 5) facing each other on a stator (2). Electrical wave signals are simultaneously applied to at least two actuators facing each other so that oppositely directed waves are generated in the surface of the stator. The two oppositely directed waves form a compound wave in the surface of the stator by means of which the movable element is displaced over a moving area located between the actuators.
摘要:
An apparatus for determining roll angle of a motorcycle (1) as when taking a curve or bend in a road. The apparatus includes a first gyro sensor (11) that provides a roll rate signal, a second gyro sensor (12) that provides a yaw rate signal, and a velocity sensor (36). The apparatus is configured to integrate the roll rate signal to obtain a first intermediate roll angle value and to determine a second intermediate roll angle value from the yaw rate and the vehicle velocity. The apparatus combines the two intermediate roll angle values into an output value for the roll angle that can be used by a servo (50) to adjust the orientation of the headlamp so that the beam pattern remains leveled with the horizon when the motorcycle (1) rolls when taking a curve.