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公开(公告)号：US20100156198A1
公开(公告)日：2010-06-24
申请号：US12643888
申请日：2009-12-21
申请人： Alexander Cooper , Scott Coakley , Douglas C. Watson , Alton H. Phillips , Gaurav Keswani , Michael B. Binnard
发明人： Alexander Cooper , Scott Coakley , Douglas C. Watson , Alton H. Phillips , Gaurav Keswani , Michael B. Binnard
CPC分类号： G03F7/70858 , G03F7/70758 , H02K9/19 , H02K9/20 , H02K41/031 , H02K2201/18
摘要： According to one aspect of the present invention, a motor arrangement includes at least one coil, a cover plate, and a shield layer. The at least one coil has a first side and a second side. The cover plate is positioned substantially over the first side of the at least one coil at a distance from the at least one coil. The shield layer is positioned between the first side of the at least one coil and the cover plate, and has a top surface. The top surface contacts the cover plate, and includes a liquid and a gas that form a mixture and cause the top surface to have a substantially constant temperature.
摘要翻译： 根据本发明的一个方面，电动机装置包括至少一个线圈，盖板和屏蔽层。 该至少一个线圈具有第一侧和第二侧。 覆盖板基本上位于距离至少一个线圈一定距离的至少一个线圈的第一侧上方。 屏蔽层位于至少一个线圈的第一侧和盖板之间，并具有顶面。 顶表面接触盖板，并且包括形成混合物的液体和气体，并使顶表面具有基本恒定的温度。
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公开(公告)号：US20090033895A1
公开(公告)日：2009-02-05
申请号：US11882027
申请日：2007-07-30
IPC分类号： G03B27/42
CPC分类号： G03F7/709 , G03F7/70833
摘要： A lithography apparatus includes a projection optical system that projects an image of a pattern, a first support member, a second support member that is flexibly coupled to the first support member by a first flexible coupling device such that the second support member is suspended from the first support member, and a second flexible coupling device that flexibly couples the projection optical system to the second support structure. This arrangement is capable of improving the vibration characteristics of the projection optical system.
摘要翻译： 光刻设备包括投影光学系统，其投影图案的图像，第一支撑构件和第二支撑构件，第二支撑构件通过第一柔性联接装置柔性地联接到第一支撑构件，使得第二支撑构件从 第一支撑构件和将投影光学系统柔性地耦合到第二支撑结构的第二柔性耦合装置。 这种布置能够改善投影光学系统的振动特性。
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公开(公告)号：US20070267995A1
公开(公告)日：2007-11-22
申请号：US11750604
申请日：2007-05-18
IPC分类号： B64C17/06
CPC分类号： G03F7/70716 , G03F7/70766
摘要： Methods and apparatus for providing a fine stage with up to six degrees of freedom are disclosed. According to one aspect of the present invention, a stage apparatus includes a first stage assembly, a second stage assembly, and a countermass arrangement. The first stage assembly including a first component of a first actuator, and supports a second actuator arrangement. The second stage assembly is supported over the first stage assembly such that the second actuator arrangement drives the second stage assembly along a vertical axis. The countermass arrangement includes a second component of the first actuator. The first component cooperates with the second component to allow the first stage assembly to move relative to a first horizontal axis. The countermass arrangement absorbs reaction forces associated with the first and second stage assemblies.
摘要翻译： 公开了提供高达六个自由度的精细台阶的方法和装置。 根据本发明的一个方面，一种舞台装置包括第一舞台组件，第二舞台组件和反对质量装置。 第一级组件包括第一致动器的第一部件，并且支撑第二致动器装置。 第二级组件被支撑在第一级组件上，使得第二致动器装置沿着垂直轴驱动第二级组件。 反对质量布置包括第一致动器的第二部件。 第一部件与第二部件配合以允许第一级组件相对于第一水平轴线移动。 反作用装置吸收与第一和第二级组件相关联的反作用力。
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公开(公告)号：US20080285004A1
公开(公告)日：2008-11-20
申请号：US11750545
申请日：2007-05-18
CPC分类号： G03F7/709 , G03F7/70725 , G03F7/70758 , G03F7/70766 , G03F7/70816
摘要： Methods and apparatus for controlling a stage assembly in up to six degrees of freedom using actuators which each allow for forces to be generated in a horizontal direction and a vertical direction are disclosed. According to one aspect of the present invention, a stage apparatus includes a stage assembly and a first stator arrangement. The stage assembly includes a first magnet arrangement of an actuator assembly, and the first stator arrangement is part of the actuator assembly. The first magnet arrangement cooperates with the first stator arrangement to allow the stage assembly to move relative to a first horizontal axis as well as a vertical axis.
摘要翻译： 公开了使用致动器在多达六个自由度中控制台组件的方法和装置，每个致动器允许在水平方向和垂直方向上产生力。 根据本发明的一个方面，舞台装置包括舞台组件和第一定子装置。 舞台组件包括致动器组件的第一磁体布置，并且第一定子布置是致动器组件的一部分。 第一磁体装置与第一定子装置配合以允许载物台组件相对于第一水平轴线和垂直轴线移动。
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公开(公告)号：US20110109419A1
公开(公告)日：2011-05-12
申请号：US12616907
申请日：2009-11-12
IPC分类号： H01F27/32
CPC分类号： H01F5/06 , H01F27/22 , H01F41/074
摘要： Embodiments of the invention provide improved thermal conductivity within, among other things, electromagnetic coils, coil assemblies, electric motors, and lithography devices. In one embodiment, a thermally conductive coil includes at least two adjacent coil layers. The coil layers include windings of wires formed from a conductor and an insulator that electrically insulates the windings within each coil layer. In some cases the insulator of the wires is at least partially absent along an outer surface of one or both coil layers to increase the thermal conductivity between the coil layers. In some embodiments, an insulation layer is provided between the coil layers to electrically insulate the coil layers. In some cases the insulation layer has a thermal conductivity greater than the thermal conductivity of the wire insulator.
摘要翻译： 本发明的实施例尤其提供了电磁线圈，线圈组件，电动马达和光刻装置之内的改进的导热性。 在一个实施例中，导热线圈包括至少两个相邻的线圈层。 线圈层包括由导体和绝缘体形成的导线的绕组，其将线圈电绝缘在每个线圈层内。 在一些情况下，线的绝缘体至少部分地沿着一个或两个线圈层的外表面不存在，以增加线圈层之间的热导率。 在一些实施例中，绝缘层设置在线圈层之间以使线圈层电绝缘。 在一些情况下，绝缘层的导热率大于导线绝缘体的导热率。
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公开(公告)号：US08847721B2
公开(公告)日：2014-09-30
申请号：US12616907
申请日：2009-11-12
CPC分类号： H01F5/06 , H01F27/22 , H01F41/074
摘要： Embodiments of the invention provide improved thermal conductivity within, among other things, electromagnetic coils, coil assemblies, electric motors, and lithography devices. In one embodiment, a thermally conductive coil includes at least two adjacent coil layers. The coil layers include windings of wires formed from a conductor and an insulator that electrically insulates the windings within each coil layer. In some cases the insulator of the wires is at least partially absent along an outer surface of one or both coil layers to increase the thermal conductivity between the coil layers. In some embodiments, an insulation layer is provided between the coil layers to electrically insulate the coil layers. In some cases the insulation layer has a thermal conductivity greater than the thermal conductivity of the wire insulator.
摘要翻译： 本发明的实施例尤其提供了电磁线圈，线圈组件，电动马达和光刻装置之内的改进的导热性。 在一个实施例中，导热线圈包括至少两个相邻的线圈层。 线圈层包括由导体和绝缘体形成的导线的绕组，其将线圈电绝缘在每个线圈层内。 在一些情况下，线的绝缘体至少部分地沿着一个或两个线圈层的外表面不存在，以增加线圈层之间的热导率。 在一些实施例中，绝缘层设置在线圈层之间以使线圈层电绝缘。 在一些情况下，绝缘层的导热率大于导线绝缘体的导热率。
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7.发明授权Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same 失效具有低横向刚度的振动衰减装置，以及包括其的曝光装置公开(公告)号：US06987559B2
公开(公告)日：2006-01-17
申请号：US10272195
申请日：2002-10-15
CPC分类号： F16F15/0275 , G03B27/48 , G03F7/709
摘要： Devices are disclosed for placement between first and second masses for attenuating transmission of motions from one of the masses to the other. A general embodiment of such a device includes a fluid isolator and a lateral fluid bearing situated along a support axis. The fluid isolator includes a housing defining an isolator chamber pressurized with a gas at pressure Pisol. The fluid isolator is situated such that motion of the masses relative to each other along the support axis is at the fluid isolator, and lateral motion is at the lateral fluid bearing. The lateral fluid bearing includes first and second bearing surfaces that are transverse to the support axis. At least one such surface defines three channels: pressure channel, atmospheric pressure channel, and vacuum channel. In order from the isolator chamber, the pressure channel (at pressure PXYbearing≈Pisol) is first, the atmospheric pressure channel (at pressure Patm) is second, and the vacuum channel (at pressure Pvac) is third. From this general embodiment, a number of configurations are possible.
摘要翻译： 公开了用于放置在第一和第二质量块之间的装置，用于衰减从一个质量到另一个的运动的传递。 这种装置的一般实施例包括沿着支撑轴线定位的流体隔离器和侧向流体轴承。 流体隔离器包括壳体，该壳体限定了用压力P＆gt;的气体加压的隔离室。 液体隔离器的位置使得质量块沿着支撑轴线相对于彼此的运动位于流体隔离器处，并且横向运动位于侧向流体轴承处。 横向流体轴承包括横向于支撑轴线的第一和第二支承表面。 至少一个这样的表面限定了三个通道：压力通道，大气压力通道和真空通道。 按照隔离器室的顺序，压力通道（处于压力P）处于第一位置，大气压力通道（在压力P大气压< SUB>）为第二，真空通道（处于压力P IN）为第三。 从该一般实施例中，可以进行多种配置。
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公开(公告)号：US07477358B2
公开(公告)日：2009-01-13
申请号：US11238237
申请日：2005-09-28
CPC分类号： G03F7/70741
摘要： An enclosure for protecting at least a pattern side and an opposing side of a reticle is disclosed. The enclosure includes a first and second part that form an enclosure around a reticle to be protected during handling, inspection, storage, and transport. The enclosure in conjunction with a heater and heat sink provides thermophoretic protection of an enclosed reticle.
摘要翻译： 公开了用于保护掩模版的至少一个图案侧和相对侧的外壳。 外壳包括第一和第二部分，其在处理，检查，存储和运输期间形成围绕保护的掩模版的外壳。 外壳与加热器和散热器一起提供封闭的掩模版的热泳保护。
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公开(公告)号：US06953109B2
公开(公告)日：2005-10-11
申请号：US10267489
申请日：2002-10-08
IPC分类号： F16F9/02 , F16F15/023 , F16F7/10
CPC分类号： F16F15/0232 , F16F9/02
摘要： A vibration isolator (200) for isolating a first assembly (202) from vibration from a second assembly (204) includes a housing (206) that is secured to the second assembly (204) and a pendulum assembly (208). The pendulum assembly (208) includes one or more pistons (226) and a connector assembly (224). The piston (226) is coupled to the first assembly (202). The connector assembly (224) couples the piston (226) to the housing (206) and allows the piston (226) to swing laterally relative to the housing (206). The vibration isolator (200) can also include a pendulum support (264) and/or a mover (580) that moves the piston (226) and assists in supporting the load of the first assembly (202).
摘要翻译： 用于将第一组件（202）与来自第二组件（204）的振动隔离的隔振器（200）包括固定到第二组件（204）和摆锤组件（208）的壳体（206）。 摆锤组件（208）包括一个或多个活塞（226）和连接器组件（224）。 活塞（226）联接到第一组件（202）。 连接器组件（224）将活塞（226）联接到壳体（206）并允许活塞（226）相对于壳体（206）横向摆动。 隔振器（200）还可以包括使活塞（226）移动并有助于支撑第一组件（202）的负载的摆动支撑件（264）和/或移动器（580）。
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10.发明授权Method and apparatus for utilizing in-situ measurements techniques in conjunction with thermoelectric chips (TECs) 有权利用原位测量技术结合热电芯片（TEC）的方法和装置公开(公告)号：US08794011B2
公开(公告)日：2014-08-05
申请号：US13270522
申请日：2011-10-11
申请人： Alton H. Phillips , Akio Ohta , Douglas C. Watson
发明人： Alton H. Phillips , Akio Ohta , Douglas C. Watson
IPC分类号： F25B21/02
CPC分类号： G01J5/0275 , G01J2005/0077 , G03F7/70875
摘要： According to one aspect of the present invention, an apparatus includes a surface and a first array. The surface emits radiation, and the first array is arranged over the surface and arranged to provide cooling to the surface, the first array including a plurality of TECs. At least a first sensing arrangement is substantially integrated with the first array, wherein the first sensing arrangement is arranged to make a non-contact measurement associated with the surface. The apparatus also includes a controller arranged to obtain the non-contact measurement and to use the non-contact measurement to control the cooling provided by the first array.
摘要翻译： 根据本发明的一个方面，一种装置包括表面和第一阵列。 表面发射辐射，并且第一阵列布置在表面上并且布置成向表面提供冷却，第一阵列包括多个TEC。 至少第一感测装置基本上与第一阵列一体化，其中第一感测装置布置成进行与表面相关联的非接触测量。 该装置还包括控制器，其布置成获得非接触式测量并使用非接触测量来控制第一阵列所提供的冷却。
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