公开(公告)号：US06197121B1

公开(公告)日：2001-03-06

申请号：US09345032

申请日：1999-06-30

申请人： Alexander I. Gurary ,  Richard A. Stall ,  Robert F. Karlicek, Jr. ,  Peter Zawadzki ,  Thomas Salagaj

发明人： Alexander I. Gurary ,  Richard A. Stall ,  Robert F. Karlicek, Jr. ,  Peter Zawadzki ,  Thomas Salagaj

IPC分类号： C23C1600

CPC分类号： C23C16/45574 ,  C23C16/45514 ,  C23C16/45565 ,  C23C16/45572 ,  C23C16/45591 ,  C23C16/4584 ,  C30B25/14

摘要： Reactors for growing epitaxial layers on substrates are disclosed including rotatable substrate carriers and injectors for injecting gases into the reactor towards the substrates on the carriers and including a gas separator for separately maintaining various gases between gas inlets and the injector. Various reactor embodiments are disclosed including removable gas separators, and particular injectors which include cooling channels, as well as flow restrictors mounted within the reactors to restrict the flow of the gases to the substrates from the injector, and heaters mounted within the rotatable shell holding the substrate carriers so that the heaters can be accessed and removed through a lid forming a wall of the reactor.

摘要翻译： 公开了用于在衬底上生长外延层的反应器，其包括可转动的衬底载体和用于将气体注入载体上的衬底的反应器的喷射器，并且包括用于分别保持气体入口和注射器之间的各种气体的气体分离器。 公开了各种反应器实施方案，包括可移除的气体分离器和包括冷却通道的特定注射器以及安装在反应器内的限流器，以限制从喷射器流到基板的气体，以及安装在可旋转外壳内的加热器， 衬底载体，使得可以通过形成反应器的壁的盖子来访问和移除加热器。

公开(公告)号：US20070148329A1

公开(公告)日：2007-06-28

申请号：US11319970

申请日：2005-12-28

申请人： Thomas Salagaj ,  Venkat Selvamanickam

发明人： Thomas Salagaj ,  Venkat Selvamanickam

IPC分类号： B05D5/12 ,  H01L39/24

CPC分类号： C23C16/545 ,  C23C16/408 ,  H01L39/2441 ,  Y10S505/73 ,  Y10S505/74 ,  Y10T29/49014

摘要： A method of forming a superconducting conductor is disclosed. The method provides translating a substrate tape through a deposition chamber and along a helical path, where the helical path has multiple windings of the substrate tape and each winding of the substrate tape extends along a feed path and a return path. The method further provides depositing a HTS layer overlying the substrate tape within a deposition chamber, wherein the deposition chamber houses the substrate tape along the feed path but not the return path.

摘要翻译： 公开了一种形成超导体的方法。 该方法提供了通过沉积室并沿着螺旋路径翻转衬底带，其中螺旋路径具有衬底带的多个绕组，并且衬底带的每个绕组沿着馈送路径和返回路径延伸。 该方法还提供在沉积室内沉积覆盖衬底带的HTS层，其中沉积室沿着馈送路径容纳衬底带，而不是返回路径。