公开(公告)号：US20210087406A1

公开(公告)日：2021-03-25

申请号：US16971869

申请日：2019-02-21

申请人： Antonio SANCHEZ ,  Gennadiy ITOV ,  Manish KHANDELWAL ,  Cole RITTER ,  Peng ZHANG ,  Jean-Marc GIRARD ,  Zhiwen WAN ,  Glenn KUCHENBEISER ,  David ORBAN ,  Sean KERRIGAN ,  Reno PESARESI ,  Matthew Damien STEPHENS ,  Yang WANG ,  Guillaume HUSSON ,  Grigory NIKIFOROV ,  L'Air Liquide, Société Anonyme pour I'Etude et I'Exploitation des Procédés Georges Claude ,  American Air Liquide, Inc.

发明人： Antonio SANCHEZ ,  Gennadiy ITOV ,  Manish KHANDELWAL ,  Cole RITTER ,  Peng ZHANG ,  Jean-Marc GIRARD ,  Zhiwen WAN ,  Glenn KUCHENBEISER ,  David ORBAN ,  Sean KERRIGAN ,  Reno PESARESI ,  Matthew Damien STEPHENS ,  Yang WANG ,  Guillaume HUSSON ,  Grigory NIKIFOROV

IPC分类号： C09D1/00 ,  C09D7/63 ,  C01B21/087 ,  C01B33/12 ,  C01B21/068 ,  C23C18/12 ,  B05D1/00 ,  B05D3/02

摘要： A Si-containing film forming composition comprising a catalyst and/or a polysilane and a N—H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N—H free repeating units having the formula [—N(SiH3)x(SiH2-)y], wherein x=0, 1, or 2 and y=0, 1, or 2 with x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 with x+y=3. Also disclosed are synthesis methods and applications for using the same.

公开(公告)号：US20190040279A1

公开(公告)日：2019-02-07

申请号：US16087464

申请日：2017-03-23

申请人： American Air Liquide, Inc. ,  L'Air Liquide, Société Anonyme pour I'Etude et I'Exploitation des Procédés Georges Claude

发明人： Manish KHANDELWAL ,  Sean KERRIGAN ,  Jean-Marc GIRARD ,  Antonio SANCHEZ ,  Peng ZHANG ,  Yang WANG

IPC分类号： C09D183/16 ,  C08G77/62 ,  C07F7/10

摘要： Si-containing film forming compositions are disclosed comprising a precursor having the formula [—NR—R4R5Si—(CH2)t—SiR2R3—]n wherein n=2 to 400; R, R2, R3, R4, and R5 are independently H, a hydrocarbon group, or an alkylamino group, and provided that at least one of R2, R3, R4, and R5 is H; and R is independently H, a hydrocarbon group, or a silyl group. Exemplary precursors include, but are not limited to, [—NH—SiH2—CH2—SiH2—]n, and [—N(SiH2—CH2—SiH3)—SiH2—CH2—SiH2—]n.

公开(公告)号：US20210087209A1

公开(公告)日：2021-03-25

申请号：US16603358

申请日：2017-04-07

申请人： Manish KHANDELWAL ,  Reno PESARESI ,  Jean-Marc GIRARD ,  L'Air Liquide, Société Anonyme pour I'Etude et I'Exploitation des Procédés Georges Claude ,  AIR LIQUIDE ADVANCED MATERIALS, INC.

发明人： Manish KHANDELWAL ,  Reno PESARESI ,  Jean-Marc GIRARD

IPC分类号： C07F7/08 ,  C07F7/12 ,  B01J31/02

摘要： Selective reduction methods for halogenated carbosilanes and carbodisilanes are disclosed. More particularly, high yields of the desired carbosilanes and carbodisilanes are obtained by reduction of their halogenated counterparts using a reducing agent and tetrabutylphosphonium chloride (TBPC) as a catalyst.

公开(公告)号：US20210102092A1

公开(公告)日：2021-04-08

申请号：US16971873

申请日：2019-02-21

申请人： American Air Liquide, Inc. ,  L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude

发明人： Antonio SANCHEZ ,  Gennadiy ITOV ,  Manish KHANDELWAL ,  Cole RITTER ,  Peng ZHANG ,  Jean-Marc GIRARD ,  Zhiwen WAN ,  Glenn KUCHENBEISER ,  David ORBAN ,  Sean KERRIGAN ,  Reno PESARESI ,  Matthew Damien STEPHENS ,  Yang WANG ,  Guillaume HUSSON ,  Grigory NIKIFOROV

IPC分类号： C09D183/16 ,  C08G77/62 ,  C08J5/18 ,  C08F4/72

摘要： A Si-containing film forming composition comprising a catalyst and/or a polysilane and a N—H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N—H free repeating units having the formula [—N(SiH3)×(SiH2−)y], wherein x=0, 1, or 2 and y=0, 1, or 2 with x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 with x+y=3. Also disclosed are synthesis methods and applications for using the same.

公开(公告)号：US20180072571A1

公开(公告)日：2018-03-15

申请号：US15661412

申请日：2017-07-27

申请人： Air Liquide Advanced Materials Inc. ,  L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude ,  Air Liquide Electronics U.S. LP ,  American Air Liquide, Inc. ,  Air Liquide Advanced Materials LLC

发明人： Antonio SANCHEZ ,  Gennadiy ITOV ,  Manish KHANDELWAL ,  Cole RITTER ,  Peng ZHANG ,  Jean-Marc GIRARD ,  Zhiwen WAN ,  Glenn KUCHENBEISER ,  David ORBAN ,  Sean KERRIGAN ,  Reno PESARESI ,  Matthew Damien STEPHENS ,  Yang WANG ,  Guillaume HUSSON

IPC分类号： C01B21/087 ,  C04B35/589 ,  C04B35/597 ,  C04B35/14 ,  C09D1/00 ,  C01B21/082 ,  B05D1/02 ,  B05D1/00 ,  B05D1/18 ,  C23C16/24

摘要： Solid or liquid N—H free, C-free, and Si-rich perhydropolysilazane compositions comprising units having the following formula [—N(SiH3)x(SiH2-)y], wherein x=0, 1, or 2 and y=0, 1, or 2 when x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 when x+y=3 are disclosed. Also disclosed are synthesis methods and applications for the same.