公开(公告)号：US20240300808A1

公开(公告)日：2024-09-12

申请号：US18596223

申请日：2024-03-05

申请人： Analog Devices, Inc.

发明人： Kemiao Jia ,  Gaurav Vohra ,  Xin Zhang ,  Christine H. Tsau ,  Chen Yang ,  Andrew Proudman ,  Matthew Kent Emsley ,  George M. Molnar, II ,  Nikolay Pokrovskiy ,  Ali Mohammed Shakir ,  Michael Judy

IPC分类号： B81C1/00 ,  B81B3/00

CPC分类号： B81C1/00666 ,  B81B3/0072 ,  B81B2203/0118 ,  B81B2203/0307 ,  B81B2203/0315 ,  B81C2201/0111 ,  B81C2201/019

摘要： Described herein are manufacturing techniques for achieving stress isolation in microelectromechanical systems (MEMS) devices that involve isolation trenches formed from the backside of the substrate. The techniques described herein involve etching a trench in the bottom side of the substrate subsequent to forming a MEMS platform, and processing the MEMS platform to form a MEMS device on the top side of the substrate subsequent to etching the trench.

公开(公告)号：US20180172631A1

公开(公告)日：2018-06-21

申请号：US15383415

申请日：2016-12-19

申请人： Analog Devices, Inc.

发明人： Chen Yang ,  Yumeng Liu ,  Li Chen ,  Kuang L. Yang

IPC分类号： G01N27/447

摘要： A microfluidic ion detector for detecting heavy metal ions in liquid and particulate matter from gas samples is described. The microfluidic ion detector includes a sample extraction structure for extracting sample ions from a sample liquid or extracting sample ions from the particulate matter of a gas sample, a separation structure for separating sample ions of different types once extracted, and a detection structure for detecting the sample ions. The microfluidic ion detector also includes a reference reservoir providing a reference ion against which the sample may be calibrated based on the operation of the separation structure. A portable, self-calibrating ion detector may be realized by including the described components on a single substrate.

公开(公告)号：US10746696B2

公开(公告)日：2020-08-18

申请号：US15383415

申请日：2016-12-19

申请人： Analog Devices, Inc.

发明人： Chen Yang ,  Yumeng Liu ,  Li Chen ,  Kuang L. Yang

IPC分类号： G01N27/447

摘要： A microfluidic ion detector for detecting heavy metal ions in liquid and particulate matter from gas samples is described. The microfluidic ion detector includes a sample extraction structure for extracting sample ions from a sample liquid or extracting sample ions from the particulate matter of a gas sample, a separation structure for separating sample ions of different types once extracted, and a detection structure for detecting the sample ions. The microfluidic ion detector also includes a reference reservoir providing a reference ion against which the sample may be calibrated based on the operation of the separation structure. A portable, self-calibrating ion detector may be realized by including the described components on a single substrate.