公开(公告)号：US10895457B2

公开(公告)日：2021-01-19

申请号：US15915870

申请日：2018-03-08

Applicant: Analog Devices, Inc.

Inventor： Mehrnaz Motiee

IPC: G01C19/5712

Abstract: A MEMS resonant accelerometer includes two proof masses configured to resonate when driven with periodic signals. Each proof mass includes a resonator structure that vibrates relative to the proof mass and a dummy structure that does not resonate. When driven by a periodic drive signal, the resonator structures of the two proof masses may be used to determine the magnitude of acceleration in the direction perpendicular to the planes of the proof masses by sensing the frequency at which the resonators vibrate. For example, a differential oscillation frequency may be computed from the two sensed frequencies. The dummy structures are used to make the mass distribution of the two proof masses similar.

公开(公告)号：US20190277634A1

公开(公告)日：2019-09-12

申请号：US15915870

申请日：2018-03-08

Applicant: Analog Devices, Inc.

Inventor： Mehrnaz Motiee

IPC: G01C19/5712

Abstract: A MEMS resonant accelerometer includes two proof masses configured to resonate when driven with periodic signals. Each proof mass includes a resonator structure that vibrates relative to the proof mass and a dummy structure that does not resonate. When driven by a periodic drive signal, the resonator structures of the two proof masses may be used to determine the magnitude of acceleration in the direction perpendicular to the planes of the proof masses by sensing the frequency at which the resonators vibrate. For example, a differential oscillation frequency may be computed from the two sensed frequencies. The dummy structures are used to make the mass distribution of the two proof masses similar.

公开(公告)号：US20190078912A1

公开(公告)日：2019-03-14

申请号：US16184664

申请日：2018-11-08

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra ,  William A. Clark ,  Mehrnaz Motiee

IPC: G01D21/00 ,  H03L7/00 ,  H03L7/18 ,  H03L7/14 ,  G01D18/00

CPC classification number: G01D21/00 ,  G01D18/00 ,  H03L7/00 ,  H03L7/141 ,  H03L7/18

Abstract: Various embodiments mitigate the risk of frequency-lock in systems having multiple resonators by dynamically changing the frequency at which at least one of the resonators is driven. More particularly, the drive frequency of at least one of the resonators is changed often enough that the multiple resonators do not have time to achieve frequency lock. Changes in the oscillation of the resonators may be analyzed to determine, for example, acceleration of such systems. Some embodiments implement self-test by assessing expected performance of a system with toggling drive frequencies. More particularly, some embodiments implement self-test by artificially inducing displacement of a movable member of a system.

公开(公告)号：US10545167B2

公开(公告)日：2020-01-28

申请号：US14887973

申请日：2015-10-20

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Michael W. Judy ,  Mehrnaz Motiee

IPC: G01P15/097 ,  G01P15/18

Abstract: Multiple-axis resonant accelerometers are based on detection of resonance frequency changes of one or more electrostatically-driven resonator masses due to electrostatic gap changes under acceleration. Specifically, one or more resonator masses are configured to resonate simultaneously in different directions associated with different axes of sensitivity (e.g., X, Y, and/or Z axes). The motion of each resonator mass is monitored through one or more electrostatically-coupled sense electrodes. An acceleration along a particular axis of sensitivity causes a small change in the electrostatic gap(s) between the corresponding resonator mass(es) and the sense electrode(s) associated with that axis of sensitivity, and this electrostatic gap change manifests as a small change in the resonance frequency of the resonator from which an accelerometer output signal can be produced.

公开(公告)号：US10451454B2

公开(公告)日：2019-10-22

申请号：US16184664

申请日：2018-11-08

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra ,  William A. Clark ,  Mehrnaz Motiee

IPC: G01D21/00 ,  H03L7/00 ,  H03L7/14 ,  H03L7/18 ,  G01D18/00

Abstract: Various embodiments mitigate the risk of frequency-lock in systems having multiple resonators by dynamically changing the frequency at which at least one of the resonators is driven. More particularly, the drive frequency of at least one of the resonators is changed often enough that the multiple resonators do not have time to achieve frequency lock. Changes in the oscillation of the resonators may be analyzed to determine, for example, acceleration of such systems. Some embodiments implement self-test by assessing expected performance of a system with toggling drive frequencies. More particularly, some embodiments implement self-test by artificially inducing displacement of a movable member of a system.

公开(公告)号：US20190049482A1

公开(公告)日：2019-02-14

申请号：US15674410

申请日：2017-08-10

Applicant: Analog Devices, Inc.

Inventor： Mehrnaz Motiee

IPC: G01P15/125 ,  G01P15/18

Abstract: A MEMS resonant accelerometer is described. The MEMS resonant accelerometer may comprise a pair of proof masses configured to resonate when driven with periodic signals. In this respect, the accelerometer's proof masses may serve as masses for detecting accelerations as well as resonators. The MEMS resonant accelerometer may comprise drive electrodes for causing the proof masses to resonate and sense electrodes for sensing motion of the proof masses. The magnitude of a z-axis acceleration, that is, an acceleration perpendicular to the plane of the proof masses, may be detected by sensing the frequency at which the proof masses resonate in the presence of such an acceleration. The proof masses may be arranged to produce differential signals.

公开(公告)号：US10168194B2

公开(公告)日：2019-01-01

申请号：US14998168

申请日：2015-12-24

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra ,  William A. Clark ,  Mehrnaz Motiee

IPC: G01D21/00 ,  H03L7/00 ,  H03L7/14 ,  H03L7/18 ,  G01D18/00

Abstract: Various embodiments mitigate the risk of frequency-lock in systems having multiple resonators by dynamically changing the frequency at which at least one of the resonators is driven. More particularly, the drive frequency of at least one of the resonators is changed often enough that the multiple resonators do not have time to achieve frequency lock. Changes in the oscillation of the resonators may be analyzed to determine, for example, acceleration of such systems. Some embodiments implement self-test by assessing expected performance of a system with toggling drive frequencies. More particularly, some embodiments implement self-test by artificially inducing displacement of a movable member of a system.

公开(公告)号：US20170108529A1

公开(公告)日：2017-04-20

申请号：US14887973

申请日：2015-10-20

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Michael W. Judy ,  Mehrnaz Motiee

IPC: G01P15/097

Abstract: Multiple-axis resonant accelerometers are based on detection of resonance frequency changes of one or more electrostatically-driven resonator masses due to electrostatic gap changes under acceleration. Specifically, one or more resonator masses are configured to resonate simultaneously in different directions associated with different axes of sensitivity (e.g., X, Y, and/or Z axes). The motion of each resonator mass is monitored through one or more electrostatically-coupled sense electrodes. An acceleration along a particular axis of sensitivity causes a small change in the electrostatic gap(s) between the corresponding resonator mass(es) and the sense electrode(s) associated with that axis of sensitivity, and this electrostatic gap change manifests as a small change in the resonance frequency of the resonator from which an accelerometer output signal can be produced.