公开(公告)号：US08299446B2

公开(公告)日：2012-10-30

申请号：US12803344

申请日：2010-06-24

申请人： Andrew M. Hawryluk ,  Emily True ,  Manish Ranjan ,  Warren Flack ,  Detlef Fuchs

发明人： Andrew M. Hawryluk ,  Emily True ,  Manish Ranjan ,  Warren Flack ,  Detlef Fuchs

IPC分类号： G06F17/50 ,  G03B27/00 ,  G03B27/52

CPC分类号： G03F9/7003 ,  H01L21/568 ,  H01L23/3107 ,  H01L24/03 ,  H01L24/96 ,  H01L25/105 ,  H01L2224/02371 ,  H01L2224/02379 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/05554 ,  H01L2224/12105 ,  H01L2224/96 ,  H01L2225/1035 ,  H01L2225/1058 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/10253 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/15331 ,  H01L2924/181 ,  H01L2224/03 ,  H01L2224/11 ,  H01L2924/00

摘要： Sub-field enhanced global alignment (SEGA) methods for aligning reconstituted wafers in a lithography process are disclosed. The SEGA methods provide the ability to accommodate chip placement errors for chips supported by a reconstituted wafer when performing a lithographic process having an overlay requirement. The SEGA methods include measuring chip locations to determine sub-fields of the reconstituted wafer over which enhanced global alignment (EGA) can be performed on the chips therein to within the overlay requirement. The SEGA methods further included individually performing EGA over the respective sub-fields. The SEGA methods take advantage of the benefits of both EGA and site-by-site alignment and are particularly applicable to wafer-level packing lithographic processes such as fan-out wafer-level packaging.

摘要翻译： 公开了用于在光刻工艺中对准重构晶片的子场增强全局对准（SEGA）方法。 当执行具有覆盖要求的光刻工艺时，SEGA方法能够适应由重构的晶片支持的芯片的芯片放置误差。 SEGA方法包括测量芯片位置以确定重构晶片的子场，通过该子场可以在覆盖要求内对其上的芯片执行增强的全局对准（EGA）。 SEGA方法还包括在各个子场上单独执行EGA。 SEGA方法利用了EGA和现场对准的优点，特别适用于晶圆级封装光刻工艺，如扇形晶圆级封装。

公开(公告)号：US20110038704A1

公开(公告)日：2011-02-17

申请号：US12803344

申请日：2010-06-24

申请人： Andrew M. Hawryluk ,  Emily True ,  Ranjan Manish ,  Warren Flack ,  Detlef Fuchs

发明人： Andrew M. Hawryluk ,  Emily True ,  Ranjan Manish ,  Warren Flack ,  Detlef Fuchs

IPC分类号： H01L21/68

CPC分类号： G03F9/7003 ,  H01L21/568 ,  H01L23/3107 ,  H01L24/03 ,  H01L24/96 ,  H01L25/105 ,  H01L2224/02371 ,  H01L2224/02379 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/05554 ,  H01L2224/12105 ,  H01L2224/96 ,  H01L2225/1035 ,  H01L2225/1058 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/10253 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/15331 ,  H01L2924/181 ,  H01L2224/03 ,  H01L2224/11 ,  H01L2924/00

摘要： Sub-field enhanced global alignment (SEGA) methods for aligning reconstituted wafers in a lithography process are disclosed. The SEGA methods provide the ability to accommodate chip placement errors for chips supported by a reconstituted wafer when performing a lithographic process having an overlay requirement. The SEGA methods include measuring chip locations to determine sub-fields of the reconstituted wafer over which enhanced global alignment (EGA) can be performed on the chips therein to within the overlay requirement. The SEGA methods further included individually performing EGA over the respective sub-fields. The SEGA methods take advantage of the benefits of both EGA and site-by-site alignment and are particularly applicable to wafer-level packing lithographic processes such as fan-out wafer-level packaging.

摘要翻译： 公开了用于在光刻工艺中对准重构晶片的子场增强全局对准（SEGA）方法。 当执行具有覆盖要求的光刻工艺时，SEGA方法能够适应由重构的晶片支持的芯片的芯片放置误差。 SEGA方法包括测量芯片位置以确定重构晶片的子场，通过该子场可以在覆盖要求内对其上的芯片执行增强的全局对准（EGA）。 SEGA方法还包括在各个子场上单独执行EGA。 SEGA方法利用了EGA和现场对准的优点，特别适用于晶圆级封装光刻工艺，如扇形晶圆级封装。

公开(公告)号：US20100217463A1

公开(公告)日：2010-08-26

申请号：US12376721

申请日：2007-08-06

申请人： Detlef Fuchs ,  Lothar Rehm ,  Thomas Von Raumer

发明人： Detlef Fuchs ,  Lothar Rehm ,  Thomas Von Raumer

IPC分类号： B60W50/00 ,  B60W20/00

CPC分类号： B60W50/04 ,  B60L15/2054 ,  B60L2240/423 ,  B60L2240/443 ,  B60L2240/486 ,  B60W10/06 ,  B60W10/08 ,  B60W20/11 ,  B60W2710/0666 ,  B60W2710/083 ,  B60W2710/105 ,  Y02T10/6286 ,  Y02T10/645 ,  Y02T10/72 ,  Y02T10/7275 ,  Y10T477/23 ,  Y10T477/30

摘要： An actuation system for a drive unit of a motor vehicle includes a control unit which is assigned to the drive unit and which has a function level, a function monitoring level, and a power output stage for actuating the drive unit or actuators or sensors which are assigned to the drive unit. To relieve the function level, a data transmission device for outputting data to a data bus is arranged in the function monitoring level. The data transmission device can output a drive setpoint torque to the drive unit, to actuators or sensors which are assigned to it, or to a power output stage (9, 9′) of a separate, second drive unit.

摘要翻译： 用于机动车辆的驱动单元的致动系统包括被分配给驱动单元并且具有功能级别，功能监控级别和用于致动驱动单元或致动器或传感器的功率输出级的控制单元，所述驱动单元或致动器或传感器是 分配给驱动单元。 为了减轻功能水平，在功能监视级别中布置了用于将数据输出到数据总线的数据传输装置。 数据传输装置可以向驱动单元，分配给其的致动器或传感器或单独的第二驱动单元的功率输出级（9,9'）输出驱动设定点转矩。

公开(公告)号：US08608614B2

公开(公告)日：2013-12-17

申请号：US12376721

申请日：2007-08-06

申请人： Detlef Fuchs ,  Lothar Rehm ,  Thomas Von Raumer

发明人： Detlef Fuchs ,  Lothar Rehm ,  Thomas Von Raumer

IPC分类号： B60K1/02 ,  H02P1/00 ,  H02P3/00 ,  H02P7/00

CPC分类号： B60W50/04 ,  B60L15/2054 ,  B60L2240/423 ,  B60L2240/443 ,  B60L2240/486 ,  B60W10/06 ,  B60W10/08 ,  B60W20/11 ,  B60W2710/0666 ,  B60W2710/083 ,  B60W2710/105 ,  Y02T10/6286 ,  Y02T10/645 ,  Y02T10/72 ,  Y02T10/7275 ,  Y10T477/23 ,  Y10T477/30

摘要： An actuation system for a drive unit of a motor vehicle includes a control unit which is assigned to the drive unit and which has a function level, a function monitoring level, and having a power output stage for actuating the drive unit or actuators or sensors which are assigned to the drive unit. To relieve the function a data transmission device for outputting data to a data bus is arranged in the function monitoring level. The data transmission device can output a drive setpoint torque to the drive unit, to actuators or sensors which are assigned to it, or to a power output stage (9, 9′) of a separate, second drive unit.

摘要翻译： 用于机动车辆的驱动单元的致动系统包括被分配给驱动单元并具有功能级别，功能监控级别以及具有用于致动驱动单元或致动器或传感器的功率输出级的控制单元 被分配到驱动单元。 为了减轻功能，在功能监视级别中布置用于将数据输出到数据总线的数据传输装置。 数据传输装置可以向驱动单元，分配给其的致动器或传感器或单独的第二驱动单元的功率输出级（9,9'）输出驱动设定点转矩。

公开(公告)号：US08447447B2

公开(公告)日：2013-05-21

申请号：US12376764

申请日：2007-08-06

申请人： Detlef Fuchs ,  Lothar Rehm ,  Thomas Von Raumer

发明人： Detlef Fuchs ,  Lothar Rehm ,  Thomas Von Raumer

IPC分类号： G06F17/00

CPC分类号： B60T8/885 ,  B60T2270/404 ,  B60T2270/413 ,  B60T2270/82 ,  B60W50/023 ,  F02D41/22 ,  F02D41/26 ,  F02D2041/227 ,  F02D2041/228 ,  F02D2250/18

摘要： The invention relates to an actuation system for a drive unit of a motor vehicle, having has a drive control unit which is assigned to the drive unit and which has a function level and a function monitoring level. A (4), a first data transmission device (5) which is arranged in the function level (3), of the drive control unit and is connected to a separate external control unit via a first communication path via which a predefined setpoint torque (Msoll) can be forwarded from the external control unit to the first data transmission device. In addition, the drive control unit also has a second data transmission device which is likewise additionally connected to the external control unit via a second communication path. The same predefined setpoint torque can also be forwarded from the external control unit to the second data transmission device via the second communication path.

摘要翻译： 本发明涉及一种用于机动车辆的驱动单元的致动系统，其具有分配给驱动单元并具有功能级别和功能监控级别的驱动控制单元。 A（4），布置在功能级（3）中的驱动控制单元的第一数据传输设备（5），并经由第一通信路径连接到单独的外部控制单元，经由该第一通信路径预定的设定转矩 Msoll）可以从外部控制单元转发到第一数据传输设备。 此外，驱动控制单元还具有第二数据传输装置，其另外经由第二通信路径另外连接到外部控制单元。 相同的预定义设定转矩也可以经由第二通信路径从外部控制单元转发到第二数据传输设备。

公开(公告)号：US20110130900A1

公开(公告)日：2011-06-02

申请号：US12376764

申请日：2007-08-06

申请人： Detlef Fuchs ,  Lothar Rehm ,  Thomas Von Raumer

发明人： Detlef Fuchs ,  Lothar Rehm ,  Thomas Von Raumer

IPC分类号： G06F7/00

CPC分类号： B60T8/885 ,  B60T2270/404 ,  B60T2270/413 ,  B60T2270/82 ,  B60W50/023 ,  F02D41/22 ,  F02D41/26 ,  F02D2041/227 ,  F02D2041/228 ,  F02D2250/18

摘要： The invention relates to an actuation system for a drive unit of a motor vehicle, having a drive control unit (1) which is assigned to the drive unit and which has a function level (3) and a function monitoring level (4), a first data transmission device (5) which is arranged in the function level (3), and is connected to a separate external control unit (2) via a first communication path (A) via which a predefined setpoint torque (Msoll) can be forwarded from the external control unit (2) to the first data transmission device (5).The object of the invention is to provide a highly available actuation system.According to the invention, the object is achieved in that the drive control unit (1) has a second data transmission device (6), and is additionally connected to the external control unit (2) via a second communication path (B), wherein the predefined setpoint torque (Msoll) can be forwarded from the external control unit (2) to the second data transmission device (5) via the second communication path.

摘要翻译： 本发明涉及一种用于机动车辆的驱动单元的致动系统，其具有分配给驱动单元并具有功能级别（3）和功能监控级别（4）的驱动控制单元（1） 第一数据传输装置（5），其布置在功能级（3）中，并且经由第一通信路径（A）连接到单独的外部控制单元（2），经由该第一通信路径可以转发预定的设定转矩（Msol1） 从外部控制单元（2）到第一数据传输装置（5）。 本发明的目的是提供一种高度可用的致动系统。 根据本发明，实现的目的在于驱动控制单元（1）具有第二数据传输装置（6），并且经由第二通信路径（B）另外连接到外部控制单元（2），其中 预定义的设定转矩（Msol1）可以经由第二通信路径从外部控制单元（2）转发到第二数据传输设备（5）。