公开(公告)号：US06607926B1

公开(公告)日：2003-08-19

申请号：US09371665

申请日：1999-08-10

申请人： Anthony J. Toprac ,  William J. Campbell ,  Christopher A. Bode

发明人： Anthony J. Toprac ,  William J. Campbell ,  Christopher A. Bode

IPC分类号： H01L2100

CPC分类号： G03F7/70633 ,  H01L22/20

摘要： The present invention provides for a method and an apparatus for controlling manufacturing processes using a hierarchical system. A first lot of semiconductor devices is processed using a first set of control input parameters. The first set of control input parameters is stored in one of a plurality of hierarchical levels, the first set of control input parameters being available for processing of a second lot of semiconductor devices. Process data is acquired from the processing of the first lot of semiconductor devices. A second set of control input parameters is determined for a subsequent lot of semiconductor devices based upon the acquired process data. The second set of control input parameters is stored in one of a plurality of hierarchical levels, the first and second sets of control input settings being available for processing of a third lot of semiconductor devices.

摘要翻译： 本发明提供一种使用分级系统来控制制造过程的方法和装置。 使用第一组控制输入参数来处理第一批半导体器件。 第一组控制输入参数被存储在多个层级之一中，第一组控制输入参数可用于处理第二批半导体器件。 从第一批半导体器件的处理中获取工艺数据。 基于所获取的处理数据，为随后的许多半导体器件确定第二组控制输入参数。 第二组控制输入参数存储在多个分层级之一中，第一组和第二组控制输入设置可用于处理第三批半导体器件。

公开(公告)号：US06560503B1

公开(公告)日：2003-05-06

申请号：US09412679

申请日：1999-10-05

申请人： Anthony J. Toprac ,  William J. Campbell

发明人： Anthony J. Toprac ,  William J. Campbell

IPC分类号： G06F1900

CPC分类号： G05B19/41885 ,  G05B19/41875 ,  G05B2219/32017 ,  G05B2219/32191 ,  G05B2219/32201 ,  G05B2219/42001 ,  Y02P90/22 ,  Y02P90/26

摘要： The present invention provides for a method and an apparatus for monitoring controller performance using statistical process control analysis. A manufacturing model is defined. A processing run of semiconductor devices is performed as defined by the manufacturing model and implemented by a process controller. A fault detection analysis is performed on the process controller. At least one control input signal generated by the process controller is updated. The apparatus of the present invention comprises: a processing controller; a processing tool coupled with the processing controller; a metrology tool interfaced with the processing tool; a control modification data calculation unit interfaced with the metrology and connected to the processing controller in a feedback manner; a predictor function interfaced with the processing controller; an statistical process control analysis unit interfaced with the predictor function and the processing tool; and a results versus prediction analysis unit interfaced with the statistical process control analysis unit and connected to the processing controller in a feedback manner.

摘要翻译： 本发明提供一种使用统计过程控制分析来监视控制器性能的方法和装置。 定义了一个制造模型。 半导体器件的处理运行由制造模型定义并由过程控制器实现。 对过程控制器进行故障检测分析。 由过程控制器生成的至少一个控制输入信号被更新。 本发明的装置包括：处理控制器; 与处理控制器耦合的处理工具; 与加工工具接口的计量工具; 控制修改数据计算单元，与测量接口并以反馈方式连接到处理控制器; 与处理控制器接口的预测器功能; 与预测器功能和处理工具接口的统计过程控制分析单元; 以及与统计过程控制分析单元连接并以反馈方式连接到处理控制器的结果与预测分析单元。

公开(公告)号：US5361526A

公开(公告)日：1994-11-08

申请号：US207225

申请日：1994-03-04

申请人： William J. Campbell

发明人： William J. Campbell

IPC分类号： F41A17/44 ,  F41A17/34

CPC分类号： F41A17/44

摘要： A child resistant quick release firearm safety and security device wherein the one piece device is inserted into the loading port of a tubular magazine, bottom loading, firearm. The operative position places the safety and security device under pressure from the magazine spring and the firearm is disabled by blocking internal mechanisms. The firearm cannot be loaded either externally through the ejection port or internally from the magazine. Further, the outer surface of the safety and security device substantially fills the loading port to act as both a dust and anti-tamporing cover. The body is shared so as to retain anti-corrosion, agents within the firearm. Removal is by catching the fingernails in a recess on the outer surface of the body and pulling the safety and security device forward toward the magazine tube. Upon being moved forward as far as possible the safety and security device will flip free of the firearm, thereby enabling immediate operation of the firearm.

摘要翻译： 防儿童快速释放枪支安全保护装置，其中一体式装置插入管状仓库的装载口，底部装载物品，枪支。 操作位置使安全和保护装置处于来自弹簧弹簧的压力，并且通过阻止内部机构来禁用枪支。 枪支不能从外部通过弹出端口或从内部装入。 此外，安全和保护装置的外表面基本上填充装载口以充当灰尘和防起泡罩。 共享身体，以便在枪支内保留防腐剂。 通过将指甲抓住身体外表面上的凹槽中并将安全和保护装置向前朝向药筒管取出。 在尽可能向前移动的情况下，安全和防护装置将不再弹开枪支，从而使枪支立即可以使用。

公开(公告)号：USD281040S

公开(公告)日：1985-10-22

申请号：US481256

申请日：1983-04-01

申请人： William J. Campbell ,  Gerard Diaz

设计人： William J. Campbell ,  Gerard Diaz

公开(公告)号：US20100037792A1

公开(公告)日：2010-02-18

申请号：US12587814

申请日：2009-10-14

申请人： Dennis M. Burgess ,  William J. Campbell

发明人： Dennis M. Burgess ,  William J. Campbell

IPC分类号： B41F27/12

CPC分类号： B41F27/1206 ,  B41P2227/50 ,  B41P2227/60 ,  B65H5/04 ,  B65H2405/332 ,  B65H2511/20 ,  B65H2511/40 ,  B65H2511/512 ,  B65H2701/1928 ,  B65H2220/02 ,  B65H2220/01

摘要： Transportation of a lithographic plate uses an indexer to load plates into pods for delivery to a press cylinder via a pod elevator or a pod cart. The plates are imprinted with a bar code, imaged, punched, bent, sheared, corner notched, and registered to a press cylinder. The plates are loaded into the indexer, which moves the loaded plates into a position in alignment with designated pod compartments, and loads the plates into each of the designated pod compartments by indexed movement of an elevator within the indexer. The pod elevator or the pod cart moves the pods proximate to a press cylinder where the plates are unloaded from the pod and loaded onto a press cylinder. A computing device, such as a PLC, directs the process. A vision system senses information from the indexer, pod, pod elevator, and the plate for feedback to a PLC, which initiates all of the foregoing operations.

摘要翻译： 平版印刷板的运输使用分度器将板装载到荚中，以通过荚式电梯或荚车推送到压力缸。 板上印有条形码，成像，冲孔，弯曲，剪切，角落，并注册到压力缸。 板被装载到分度器中，其将装载的板移动到与指定的荚舱隔间对准的位置，并且通过索引器内的电梯的分度运动将板装载到每个指定的荚舱中。 荚式电梯或荚式推车将荚附近靠近压力缸移动，其中板从荚卸载并装载到压力缸上。 诸如PLC的计算设备引导该过程。 视觉系统感测来自分度器，吊舱，吊舱电梯和板的信息，以反馈给PLC，从而启动所有上述操作。

公开(公告)号：US07610855B2

公开(公告)日：2009-11-03

申请号：US11752254

申请日：2007-05-22

申请人： Dennis M. Burgess ,  William J. Campbell

发明人： Dennis M. Burgess ,  William J. Campbell

IPC分类号： B41F47/14

CPC分类号： B41F27/1206 ,  B41P2227/50 ,  B41P2227/60 ,  B65H5/04 ,  B65H2405/332 ,  B65H2511/20 ,  B65H2511/40 ,  B65H2511/512 ,  B65H2701/1928 ,  B65H2220/02 ,  B65H2220/01

摘要： Transportation of a lithographic plate uses an indexer to load plates into pods for delivery to a press cylinder via a pod elevator or a pod cart. The plates are imprinted with a bar code, imaged, punched, bent, sheared, corner notched, and registered to a press cylinder. The plates are loaded into the indexer, which moves the loaded plates into a position in alignment with designated pod compartments, and loads the plates into each of the designated pod compartments by indexed movement of an elevator within the indexer. The pod elevator or the pod cart moves the pods proximate to a press cylinder where the plates are unloaded from the pod and loaded onto a press cylinder. A computing device, such as a PLC, directs the process. A vision system senses information from the indexer, pod, pod elevator, and the plate for feedback to a PLC, which initiates all of the foregoing operations.

摘要翻译： 平版印刷板的运输使用分度器将板装载到荚中，以通过荚式电梯或荚车推送到压力缸。 板上印有条形码，成像，冲孔，弯曲，剪切，角落，并注册到压力缸。 板被装载到分度器中，其将装载的板移动到与指定的荚舱隔间对准的位置，并且通过索引器内的电梯的分度运动将板装载到每个指定的荚舱中。 荚式电梯或荚式推车将荚附近靠近压力缸移动，其中板从荚卸载并装载到压力缸上。 诸如PLC的计算设备引导该过程。 视觉系统感测来自分度器，吊舱，吊舱电梯和板的信息，以反馈给PLC，从而启动所有上述操作。

公开(公告)号：US06454899B1

公开(公告)日：2002-09-24

申请号：US09885455

申请日：2001-06-19

申请人： William J. Campbell ,  H. Jim Fulford ,  Christopher H. Raeder ,  Craig W. Christian ,  Thomas Sonderman

发明人： William J. Campbell ,  H. Jim Fulford ,  Christopher H. Raeder ,  Craig W. Christian ,  Thomas Sonderman

IPC分类号： H01L2100

CPC分类号： H01L22/20 ,  H01L21/76229

摘要： A method for filling a trench is provided. A wafer having at least a first layer formed thereon is provided. A trench is formed in the first layer. The depth of the trench is measured. A target thickness is determined based on the depth of the trench. A second layer of the target thickness is formed over the trench. A processing line includes a trench etch tool, a first metrology tool, a trench fill tool, and an automatic process controller. The trench etch tool is adapted to form a trench in a first layer on a wafer. The first metrology tool is adapted to measure the depth of the trench. The trench fill tool is adapted to form a second layer over the first layer based on an operating recipe. An automatic process controller is adapted to determine a target thickness based on the depth of the trench and modify the operating recipe of the trench fill tool based on the target thickness.

摘要翻译： 提供了一种用于填充沟槽的方法。 提供了至少形成有第一层的晶片。 在第一层中形成沟槽。 测量沟槽的深度。 基于沟槽的深度确定目标厚度。 在沟槽上形成第二层目标厚度。 处理线包括沟槽蚀刻工具，第一计量工具，沟槽填充工具和自动过程控制器。 沟槽蚀刻工具适于在晶片上的第一层中形成沟槽。 第一个计量工具适用于测量沟槽的深度。 沟槽填充工具适于基于操作配方在第一层上形成第二层。 自动过程控制器适于基于沟槽的深度确定目标厚度，并且基于目标厚度修改沟槽填充工具的操作配方。

公开(公告)号：US07621219B2

公开(公告)日：2009-11-24

申请号：US11752839

申请日：2007-05-23

申请人： Dennis M. Burgess ,  William J. Campbell ,  Joseph A. Stein

发明人： Dennis M. Burgess ,  William J. Campbell ,  Joseph A. Stein

IPC分类号： B41F1/34

CPC分类号： B41F27/005 ,  G03F9/00

摘要： The method and apparatus for registration of a lithographic plate includes a means for ensuring that the plate is in contact with registration pins on imaging and bending devices and a means for finely adjusting an initial position of the plate with respect to registration pins on the bender to bring the plate in registration with the specified plate lock-up position on the press cylinder. Three separate electrical circuits ensure that the plate is in contact with the registration pins if each separate circuit is able to conduct current between the respective pins and the plate. The fine adjustment is accomplished by rotation of eccentric registration pins until the plate is within tolerance.

摘要翻译： 用于配准平版印刷版的方法和装置包括用于确保印版与成像和弯曲装置上的对位销接触的装置，以及用于相对于弯曲机上的对齐销微调板的初始位置的装置， 使印版与印版滚筒上指定的板锁定位置对准。 如果每个单独的电路能够在相应的引脚和板之间传导电流，则三个单独的电路确保板与对准销接触。 通过偏心对准销的旋转来实现微调，直到板在公差范围内。

公开(公告)号：US4738347A

公开(公告)日：1988-04-19

申请号：US896802

申请日：1986-08-15

申请人： Gerald A. Brouwer ,  William J. Campbell ,  Charles W. Saur ,  Bernard H. Woltjer

发明人： Gerald A. Brouwer ,  William J. Campbell ,  Charles W. Saur ,  Bernard H. Woltjer

IPC分类号： B65G47/84 ,  B65G47/46

CPC分类号： B65G47/844 ,  B65G2207/36

摘要： The operating characteristics of a diverter having a driven article conveying surface of parallel tubes on which article diverting shoes are caused to move across progressively because of contract between a depending drive pin on each shoe and a laterally inclined rail beneath the conveying surface by changing the shape of the rail contacting roller on the pin so that a downward force vector is created tending to hold the shoe down. Also, the shoe is supported on three rollers instead of two to prevent the tendency of the shoe to pivot about one tube due to article resistance to lateral movement. The design of the openings in the shoe through which the tubes pass are such that the shoe will not become bound between two tubes which are not entirely straight.

摘要翻译： 转向器的操作特性具有平行管的被驱动物品输送表面，在该物料输送表面上，由于每个鞋上的悬垂的驱动销与输送表面下方的横向倾斜的轨道之间的收缩，使物品转向鞋逐渐移动， 的导轨接触辊在销上，使得向下的力矢量产生趋于将鞋保持下来。 此外，鞋子支撑在三个辊子上，而不是两个，以防止鞋子由于制品抵抗横向运动而围绕一个管子枢转。 通过管穿过的鞋中的开口的设计使得鞋不会被绑定在两个不完全直线的管之间。

公开(公告)号：US4676633A

公开(公告)日：1987-06-30

申请号：US871313

申请日：1986-06-06

申请人： Dennis A. Burgess ,  William J. Campbell ,  Arvids Saldenais

发明人： Dennis A. Burgess ,  William J. Campbell ,  Arvids Saldenais

IPC分类号： G03B27/20

CPC分类号： G03B27/20

摘要： The present invention provides an improved vacuum frame having upper and lower frame members of rectangular shape, the upper one of which supports a plate of glass. Connected to the lower frame is a flexible sheet such as a rubber sheet with a backing member connected to its lower surfae. Resilient members such as springs urge one edge of the sealing sheet upwardly toward the glass plate and the other edge downwardly away from the glass plate to produce a wedge shaped vacuum chamber which upon being evacuated becomes progressively smaller as air is progressively and directionally removed proceeding from one edge of the glass plate to the other.

摘要翻译： 本发明提供一种改进的真空框架，其具有矩形形状的上框架构件和下框架构件，其上部支撑玻璃板。 连接到下框架是柔性片材，例如具有连接到其下表面的背衬构件的橡胶片材。 诸如弹簧之类的弹性构件将密封片的一个边缘朝向玻璃板向上推动，而另一个边缘向下远离玻璃板，以产生一个楔形真空室，当真空被逐渐地和逐向地从空气逐渐取出时，它们逐渐变小， 玻璃板的一个边缘到另一边。