公开(公告)号：US20220254641A1

公开(公告)日：2022-08-11

申请号：US17174224

申请日：2021-02-11

申请人： Applied Materials, Inc.

发明人： Thai Cheng Chua ,  Christian Valencia ,  Chikuang Wang ,  Bencherki Mebarki ,  Hanh Nguyen ,  Philip Allan Kraus

IPC分类号： H01L21/285 ,  H01L23/532 ,  H01J37/32 ,  C23C16/26 ,  C23C16/02 ,  C23C16/511

摘要： Embodiments disclosed herein include methods and apparatuses used to deposit graphene layers. In an embodiment, a method of depositing a graphene layer on a substrate comprises providing a substrate within a modular microwave plasma chamber, and flowing a carbon source and a hydrogen source into the modular microwave plasma chamber. In an embodiment, the method further comprises striking a plasma in the modular microwave plasma chamber, where a substrate temperature is below approximately 400° C., and depositing the graphene layer on the substrate.

公开(公告)号：US08569692B1

公开(公告)日：2013-10-29

申请号：US13714368

申请日：2012-12-13

申请人： Applied Materials, Inc.

发明人： Biao Liu ,  Chikuang Wang ,  Yuri Uritsky

IPC分类号： G21K7/00

CPC分类号： G21K7/00 ,  G01B15/02

摘要： A method of operation of a measurement system includes: providing a specimen having a film; controlling a beam generator to direct a charged particle beam into the specimen; detecting a reference signal emitted from the specimen; normalizing the reference signal to create a film L-ratio; and determining a thickness of the film by correlating the film L-ratio to a calibration curve.

摘要翻译： 测量系统的操作方法包括：提供具有膜的样本; 控制束发生器将带电粒子束引导到样品中; 检测从样本发射的参考信号; 归一化参考信号以产生胶片L比; 以及通过将膜L比与校准曲线相关来确定膜的厚度。