公开(公告)号：US09159554B2

公开(公告)日：2015-10-13

申请号：US14262400

申请日：2014-04-25

Applicant: Applied Materials, Inc.

Inventor： Errol Antonio C. Sanchez ,  Xinyu Bao ,  Wonseok Lee ,  David Keith Carlson ,  Zhiyuan Ye

IPC: H01L21/8238 ,  H01L21/02 ,  H01L21/762

CPC classification number: H01L21/02546 ,  H01L21/02381 ,  H01L21/0243 ,  H01L21/02433 ,  H01L21/02463 ,  H01L21/02502 ,  H01L21/0262 ,  H01L21/02639 ,  H01L21/762

Abstract: Embodiments described herein generally relate to a method of fabrication of a device structure comprising Group III-V elements on a substrate. A surface may be formed on a substrate and a Group III-V material may be grown from the surface to form a Group III-V device structure in a trench isolated between a dielectric layer. A final critical dimension of the device structure may be trimmed to achieve a suitably sized node structure.

Abstract translation: 本文描述的实施例通常涉及在衬底上制造包含III-V族元素的器件结构的方法。 可以在衬底上形成A 111表面，并且可以从III族表面生长III-V族材料，以在介电层之间隔离的沟槽中形成III-V族器件结构。 可以修剪设备结构的最终关键尺寸以实现适当尺寸的节点结构。

公开(公告)号：US09120075B2

公开(公告)日：2015-09-01

申请号：US13958699

申请日：2013-08-05

Applicant: APPLIED MATERIALS, INC.

Inventor： David Keith Carlson

IPC: B01J19/12 ,  A61L9/00 ,  B01D53/00

CPC classification number: B01J19/123 ,  B01D53/007 ,  B01D2257/2027 ,  B01D2257/2047 ,  B01D2258/0216 ,  B01D2259/804

Abstract: Apparatus for the removal of exhaust gases are provided herein. In some embodiments, an exhaust apparatus may include a housing defining an inner volume, an inlet and an outlet formed in the housing to facilitate flow of an exhaust gas through the inner volume, wherein the inlet is configured to be coupled to an exhaust outlet of a semiconductor process chamber to receive the exhaust gas therefrom, and wherein the exhaust gas can flow through the inner volume substantially free from obstruction, an ultraviolet light source to provide ultraviolet energy to the exhaust gas present the inner volume during use, wherein the ultraviolet light source provides sufficient energy to at least partially decompose the exhaust gas, and a conduit coupled to the outlet and configured allow at least some ultraviolet energy provided from the ultraviolet light source to travel directly along an axial length of the conduit.

Abstract translation: 本文提供了用于排出废气的设备。 在一些实施例中，排气装置可以包括限定内部容积的壳体，形成在壳体中的入口和出口，以便于排气通过内部容积的流动，其中入口构造成联接到 半导体处理室，用于从其接收废气，并且其中废气可以流过基本上没有障碍物的内部体积，在使用期间向排气提供紫外线能量以提供内部体积的紫外光源，其中紫外线 源提供足够的能量以至少部分地分解废气，并且配置成与出口配合的导管允许从紫外光源提供的至少一些紫外线能量沿管道的轴向长度直接行进。