公开(公告)号：US20230298862A1

公开(公告)日：2023-09-21

申请号：US17696594

申请日：2022-03-16

Applicant: Applied Materials, Inc.

Inventor： Alexander BERGER ,  Ming XU

IPC: H01J37/32 ,  B81B7/04 ,  H05K1/02 ,  C23C16/50 ,  C23C16/455

CPC classification number: H01J37/32449 ,  B81B7/04 ,  H05K1/0272 ,  C23C16/50 ,  C23C16/45565 ,  B81B2201/054 ,  B81B2207/053 ,  B81B2207/99 ,  B81B2207/012 ,  H05K2201/10083 ,  H05K2201/10522 ,  H05K2201/10545 ,  H05K2201/09063 ,  H05K1/181

Abstract: A showerhead for a processing chamber includes a faceplate with a plurality of openings. A plurality of compartments are recessed into a top surface of the faceplate. The showerhead includes a plurality of MEMS devices. Each MEMS device is disposed in a corresponding compartment of the plurality of compartments. A printed circuit board including a plurality of ports therethrough is coupled to each MEMS device. Each MEMS device is configured to regulate a gas flow into each corresponding compartment through a corresponding port of the plurality of ports in the printed circuit board.

公开(公告)号：US20220262600A1

公开(公告)日：2022-08-18

申请号：US17175216

申请日：2021-02-12

Applicant: Applied Materials, Inc.

Inventor： Ming XU ,  Ashley Mutsuo OKADA ,  Michael D. WILLWERTH ,  Duc Dang BUCKIUS ,  Jeffrey LUDWIG ,  Aditi MITHUN ,  Benjamin SCHWARZ

IPC: H01J37/32 ,  H01L21/3065

Abstract: A gas distribution apparatus is provided having a first reservoir with a first upstream end and a first downstream end and a second reservoir with a second upstream end and a second downstream end. A reservoir switch valve is in fluid communication with the first downstream end of the first reservoir and the second downstream end of the second reservoir. The reservoir switch valve operable to selectively couple the first reservoir to an outlet of the reservoir switch valve when in a first state, and couple the second reservoir to the outlet of the reservoir switch valve when in a second state. A plurality of proportional flow control valves are provided having inlets coupled in parallel to the outlet of the reservoir switch valve The plurality of proportional flow control valves have outlets configured to provide gas to a processing chamber.