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    Harmonic cold plasma device and associated methods
    2.
    发明授权
    Harmonic cold plasma device and associated methods 有权

    公开(公告)号：US10085335B2

    公开(公告)日：2018-09-25

    申请号：US15392400

    申请日：2016-12-28

    申请人： Plasmology4, Inc.

    发明人： Gregory A. Watson

    IPC分类号： H05H1/46 ,  A61L2/00 ,  A61N1/44

    CPC分类号： H05H1/46 ,  A61L2/0011 ,  A61L2202/11 ,  A61N1/44 ,  H05H2001/4652 ,  H05H2001/466 ,  H05H2001/4697 ,  H05H2240/20 ,  H05H2277/10

    摘要： A method for generating atmospheric pressure cold plasma inside a hand-held unit discharges cold plasma with simultaneously different rf wavelengths and their harmonics. The unit includes an rf tuning network that is powered by a low-voltage power supply connected to a series of high-voltage coils and capacitors. The rf energy signal is transferred to a primary containment chamber and dispersed through an electrode plate network of various sizes and thicknesses to create multiple frequencies. Helium gas is introduced into the first primary containment chamber, where electron separation is initiated. The energized gas flows into a secondary magnetic compression chamber, where a balanced frequency network grid with capacitance creates the final electron separation, which is inverted magnetically and exits through an orifice with a nozzle. The cold plasma thus generated has been shown to be capable of accelerating a healing process in flesh wounds on animal laboratory specimens.

    Ion beam uniformity control
    5.
    发明授权
    Ion beam uniformity control 有权
    离子束均匀性控制

    公开(公告)号：US09520259B2

    公开(公告)日：2016-12-13

    申请号：US14949468

    申请日：2015-11-23

    申请人： Varian Semiconductor Equipment Associates, Inc.

    发明人： Alexandre Likhanskii ,  Svetlana B. Radovanov ,  Bon-Woong Koo

    IPC分类号： H01J27/02 ,  H01J27/16 ,  H01J37/08 ,  H05H1/46

    CPC分类号： H01J27/024 ,  H01J27/16 ,  H01J37/08 ,  H01J2237/0815 ,  H05H2001/4652 ,  H05H2001/466

    摘要： A plasma chamber having improved controllability of the ion density of the extracted ribbon ion beam is disclosed. A plurality of pairs of RF biased electrodes is disposed on opposite sides of the extraction aperture in a plasma chamber. In some embodiments, one of each pair of RF biased electrodes is biased at the extraction voltage, while the other of each pair is coupled to a RF bias power supply, which provides a RF voltage having a DC component and an AC component. In another embodiment, both of the electrodes in each pair are coupled to a RF biased power supply. A blocker may be disposed in the plasma chamber near the extraction aperture. In some embodiments, RF biased electrodes are disposed on the blocker.

    摘要翻译： 公开了具有提取的带状离子束的离子密度的可控性的等离子体室。 多个RF偏置电极对设置在等离子体室中的提取孔的相对侧上。 在一些实施例中，每对RF偏置电极中的一个被偏置在提取电压，而每对中的另一个耦合到RF偏置电源，RF偏压电源提供具有DC分量和AC分量的RF电压。 在另一个实施例中，每对中的两个电极耦合到RF偏置电源。 阻挡剂可以设置在提取孔附近的等离子体室中。 在一些实施例中，RF偏置电极设置在阻挡器上。

    OSCILLATOR GENERATORS AND METHODS OF USING THEM
    6.
    发明申请
    OSCILLATOR GENERATORS AND METHODS OF USING THEM 审中-公开
    振荡器发生器及其使用方法

    公开(公告)号：US20160360602A1

    公开(公告)日：2016-12-08

    申请号：US15140294

    申请日：2016-04-27

    申请人： PERKINELMER HEALTH SCIENCES, INC.

    发明人： Tak Shun Cheung ,  Chui Ha Cindy Wong

    IPC分类号： H05H1/30

    CPC分类号： H05H1/30 ,  H01J37/321 ,  H01J37/32174 ,  H05H2001/4652 ,  H05H2001/4682

    摘要： Certain embodiments described herein are directed to generators that can be used to sustain a plasma. In some embodiments, the generator comprises an oscillation circuit configured to electrically couple to an induction device and provide power to the induction device in an oscillation mode to sustain the inductively coupled plasma in a torch body, the circuit configured to provide harmonic emission control during sustaining of the inductively coupled plasma in the torch body in the oscillation mode of the generator.

    摘要翻译： 本文描述的某些实施例涉及可用于维持等离子体的发生器。 在一些实施例中，发电机包括一个振荡电路，该振荡电路被配置为电耦合到感应装置，并以振荡模式向感应装置提供电力，以维持割炬本体中的电感耦合等离子体，该电路构造成在维持期间提供谐波发射控制 的发电机的振荡模式中的电弧耦合等离子体。

    Glow discharge lamp
    7.
    发明授权
    Glow discharge lamp 有权
    辉光放电灯

    公开(公告)号：US09485848B2

    公开(公告)日：2016-11-01

    申请号：US14413820

    申请日：2013-07-10

    申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) ,  UNIVERSITE JOSEPH FOURIER—GRENOBLE 1

    发明人： Ana Lacoste ,  Jacques Pelletier

    IPC分类号： H01J7/24 ,  H05H1/46 ,  H01J61/32 ,  H01J61/54 ,  H01J61/78 ,  H05H1/48 ,  H05H1/50

    CPC分类号： H05H1/46 ,  H01J61/327 ,  H01J61/54 ,  H01J61/78 ,  H05H1/48 ,  H05H1/50 ,  H05H2001/4607 ,  H05H2001/4652

    摘要： The disclosure includes a glow-discharge lamp including: an elongate casing transparent to illuminating radiation and containing a plasma gas; a device for applying an electric field for maintaining a plasma in the so-called positive column region of the casing, the device including two electrodes forming an anode and a cathode located in the casing at each end thereof; and a radio-frequency or microwave cathode plasma source arranged in the casing in relation to the cathode-forming electrode, such as to generate a high-frequency discharge located on the surface of the electrode in order to generate the plasma. The disclosure also includes a lighting method of such a glow-discharge lamp.

    摘要翻译： 该公开内容包括：辉光放电灯，包括：对照射辐射透明并包含等离子体气体的细长壳体; 用于在壳体的所谓正柱区域中施加用于维持等离子体的电场的装置，该装置包括在其两端形成位于壳体中的阳极和阴极的两个电极; 以及相对于阴极形成电极布置在壳体中的射频或微波阴极等离子体源，以便产生位于电极表面上的高频放电以产生等离子体。 本公开还包括这种辉光放电灯的照明方法。

    PLASMA REACTOR AND PLASMA IGNITION METHOD USING THE SAME
    8.
    发明申请
    PLASMA REACTOR AND PLASMA IGNITION METHOD USING THE SAME 审中-公开
    等离子体反应器和等离子体点火方法

    公开(公告)号：US20150303031A1

    公开(公告)日：2015-10-22

    申请号：US14402610

    申请日：2013-12-26

    申请人： NEW POWER PLASMA CO., LTD.

    发明人： Sang-Don Choi

    IPC分类号： H01J37/32

    CPC分类号： H01J37/321 ,  H01J37/32458 ,  H01J37/32467 ,  H01J2237/327 ,  H05H1/46 ,  H05H2001/4652

    摘要： A plasma reactor and a plasma ignition method using the same are disclosed. The disclosed plasma reactor includes at least one magnetic core having a transformer primary winding wound thereon, an AC power supply for supplying AC power to the transformer primary winding wound on the magnetic core, at least one plasma chamber body, at which the magnetic core is installed, to directly induce a voltage in the plasma chamber body through the magnetic core, thereby inducing induced electromotive force in the plasma chamber body, and at least one floating chamber connected to the plasma chamber body via an insulating region, the induced electromotive force from the plasma chamber body being indirectly transferred to the floating chamber. Ignition of plasma is generated in accordance with a voltage difference generated between, the plasma chamber body and the floating chamber, and the ignited plasma is supplied to a process chamber.

    摘要翻译： 公开了一种等离子体反应器和使用其的等离子体点火方法。 所公开的等离子体反应器包括至少一个磁芯，其上缠绕有变压器初级绕组，用于向缠绕在磁芯上的变压器初级绕组提供AC电力的AC电源，至少一个等离子体室主体， 安装，以通过磁芯直接感应等离子体室主体中的电压，从而在等离子体室主体中引起感应电动势，以及经由绝缘区域连接到等离子体室主体的至少一个浮动室，感应电动势来自 等离子体室主体间接地转移到浮动室。 根据在等离子体室主体和浮动室之间产生的电压差产生等离子体的点火，并且点燃的等离子体被提供给处理室。

    PLASMA GENERATION SOURCE EMPLOYING DIELECTRIC CONDUIT ASSEMBLIES HAVING REMOVABLE INTERFACES AND RELATED ASSEMBLIES AND METHODS
    9.
    发明申请
    PLASMA GENERATION SOURCE EMPLOYING DIELECTRIC CONDUIT ASSEMBLIES HAVING REMOVABLE INTERFACES AND RELATED ASSEMBLIES AND METHODS 有权
    使用具有可拆卸接口的电介质组件等离子体生成源和相关组件和方法

    公开(公告)号：US20150137681A1

    公开(公告)日：2015-05-21

    申请号：US14246419

    申请日：2014-04-07

    申请人： Applied Materials, Inc.

    发明人： Siu Tang NG ,  Changhun LEE ,  Huutri DAO ,  Roberto Cesar COTLEAR

    IPC分类号： H05H1/46

    CPC分类号： H05H1/46 ,  H05H2001/4652

    摘要： Plasma generation source employing dielectric conduit assemblies having removable interfaces and related assemblies and methods are disclosed. The plasma generation source (PGS) includes an enclosure body having multiple internal surfaces forming an internal chamber having input and output ports to respectively receive a precursor gas for generation of plasma and to discharge the plasma. A dielectric conduit assembly may guide the gas and the plasma away from the internal surface where particulates may be generated. The dielectric conduit assembly includes a first and second cross-conduit segments. The dielectric conduit assembly further includes parallel conduit segments extending from the second cross-conduit segment to distal ends which removably align with first cross-conduit interfaces of the first cross-conduit segment without leaving gaps. In this manner, the dielectric conduit assembly is easily serviced, and reduces and contains particulate generation away from the output port.

    摘要翻译： 公开了采用具有可移除接口和相关组件和方法的介质导管组件的等离子体产生源。 等离子体发生源（PGS）包括具有多个内表面的外壳主体，形成具有输入和输出端口的内部腔室，以分别容纳用于产生等离子体的前体气体并排出等离子体。 电介质导管组件可以引导气体和等离子体远离可能产生微粒的内表面。 介电导管组件包括第一和第二交叉导管段。 电介质导管组件还包括从第二交叉导管段延伸到远端的平行导管段，其可移除地与第一交叉导管段的第一交叉导管接口对准，而不留下间隙。 以这种方式，电介质导管组件易于维护，并且减少并且包含远离输出端口的颗粒产生。

    Hybrid plasma reactor
    10.
    发明授权
    Hybrid plasma reactor 有权
    混合等离子体反应器

    公开(公告)号：US08866390B2

    公开(公告)日：2014-10-21

    申请号：US13738654

    申请日：2013-01-10

    申请人： Dae-Kyu Choi

    发明人： Dae-Kyu Choi

    IPC分类号： H01J7/34 ,  H05B31/26 ,  H05H1/46

    CPC分类号： H05H1/46 ,  H05H2001/4652 ,  H05H2001/4675

    摘要： A hybrid plasma reactor includes a first plasma chamber for providing a first ring-shaped plasma discharge space, second plasma chambers providing a second plasma discharge space connected to the first plasma discharge space and coupled to magnetic flux channels, a hybrid plasma source including magnetic cores, which partially surround the first plasma chamber and have magnetic entrances forming the magnetic flux channels, and primary winding coils wound in the magnetic cores and complexly generating ring-shaped transformer-coupled plasma in the first plasma discharge space and magnetic flux channel coupled plasma in the second plasma discharge space, and an AC switching power supply for supplying plasma generation power to the primary winding coils. The hybrid plasma reactor can complexly generate magnetic flux channel coupled plasma and transformer coupled plasma so that it has a high control capability for plasma ion energy and a wide operation region from a low-pressure region to a high-pressure region.

    摘要翻译： 一种混合等离子体反应器包括：第一等离子体室，用于提供第一环形等离子体放电空间;第二等离子体室，提供连接到第一等离子体放电空间并耦合到磁通量的第二等离子体放电空间;混合等离子体源，包括磁芯 ，其部分地围绕第一等离子体室并且具有形成磁通量的磁入口，并且缠绕在磁芯中的初级绕组线圈并且在第一等离子体放电空间中复合产生环形变压器耦合等离子体，并且在磁通量耦合等离子体中形成磁通量耦合等离子体 第二等离子体放电空间，以及用于向初级绕组线圈提供等离子体发生功率的AC开关电源。 混合等离子体反应器可以复杂地产生磁通量耦合等离子体和变压器耦合等离子体，使得其具有对于等离子体离子能量的高控制能力和从低压区域到高压区域的宽操作区域。