公开(公告)号：US11850621B2

公开(公告)日：2023-12-26

申请号：US17456410

申请日：2021-11-24

Applicant: Applied Materials, Inc.

Inventor： Kangkang Wang ,  Yaseer Arafath Ahamed ,  Yige Gao ,  Benjamin B. Riordon ,  Rami Hourani ,  James D. Strassner ,  Ludovic Godet ,  Thinh Nguyen

IPC: B05C1/00 ,  B05D1/00 ,  B05D5/06 ,  B05C1/02 ,  B05C13/00

CPC classification number: B05C1/006 ,  B05C1/027 ,  B05C13/00 ,  B05D1/002 ,  B05D5/061

Abstract: An optical device coating assembly is provided. The optical device coating assembly includes a substrate support operable to retain an optical device substrate. The coating assembly further includes a first actuator connected to the substrate support. The first actuator is configured to rotate the substrate support. The coating assembly includes a holder configured to hold a coating applicator against an edge of the optical device substrate when the optical device substrate is rotated on the substrate support and a second actuator operable to apply a force on the holder in a direction towards the substrate support. The second actuator is a constant force actuator.

公开(公告)号：US12121925B2

公开(公告)日：2024-10-22

申请号：US18506799

申请日：2023-11-10

Applicant: Applied Materials, Inc.

Inventor： Kangkang Wang ,  Yaseer Arafath Ahamed ,  Yige Gao ,  Benjamin B. Riordon ,  Rami Hourani ,  James D. Strassner ,  Ludovic Godet ,  Thinh Nguyen

IPC: B05C1/00 ,  B05C1/02 ,  B05C13/00 ,  B05D1/00 ,  B05D5/06

CPC classification number: B05C1/006 ,  B05C1/027 ,  B05C13/00 ,  B05D1/002 ,  B05D5/061

Abstract: An optical device coating assembly is provided. The optical device coating assembly includes a substrate support operable to retain an optical device substrate. The coating assembly further includes a first actuator connected to the substrate support. The first actuator is configured to rotate the substrate support. The coating assembly includes a holder configured to hold a coating applicator against an edge of the optical device substrate when the optical device substrate is rotated on the substrate support and a second actuator operable to apply a force on the holder in a direction towards the substrate support. The second actuator is a constant force actuator.