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公开(公告)号:US12014902B2
公开(公告)日:2024-06-18
申请号:US17887992
申请日:2022-08-15
Applicant: Applied Materials, Inc.
Inventor: Jong Yun Kim , Kim Seong Sim , Roman M. Mostovoy , Won Ho Sung , Pei-Chia Chen
IPC: H01J37/32 , C23C16/44 , C23C16/458 , C23C16/52
CPC classification number: H01J37/3244 , C23C16/4405 , C23C16/4583 , C23C16/52 , H01J37/32357 , H01J37/32862 , H01J37/32477 , H01J2237/24507 , H01J2237/3321
Abstract: Embodiments described herein relate to process systems for cleaning semiconductor process chamber components. The process systems include a process chamber having process chamber components. The process chamber components include a substrate support disposed within a chamber volume of the process chamber. A gas distribution assembly faces the substrate support. A gas baffle is fluidly coupled to the gas distribution assembly. A sensor system is coupled to the process chamber and is configured to monitor at least one characteristic of the volume of the process chamber. A dynamic gas assist is fluidly coupled to the gas baffle and is communicatively coupled to the sensor.
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公开(公告)号:US10134878B2
公开(公告)日:2018-11-20
申请号:US15359325
申请日:2016-11-22
Applicant: Applied Materials, Inc.
Inventor: Hao-Chien Hsu , Dong-Kil Yim , Tae Kyung Won , Xuena Zhang , Won Ho Sung , Rodney Shunleong Lim
IPC: H01L29/786 , H01L29/66 , H01L21/02
Abstract: Embodiments of the present disclosure generally relate to methods for forming a TFT having a metal oxide layer. The method may include forming a metal oxide layer and treating the metal oxide layer with a fluorine containing gas or plasma. The fluorine treatment of the metal oxide layer helps fill the oxygen vacancies in the metal oxide channel layer, leading to a more stable TFT and preventing a negative threshold voltage in the TFT.
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