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    Carrier head with a flexible membrane to form multiple chambers
    1.
    发明申请
    Carrier head with a flexible membrane to form multiple chambers 有权

    公开(公告)号：US20030022609A1

    公开(公告)日：2003-01-30

    申请号：US10251302

    申请日：2002-09-19

    申请人： Applied Materials, Inc., a Delaware corporation

    发明人： Ilya Perlov ,  Eugene Gantvarg ,  Sen-Hou Ko

    IPC分类号： B24B007/22

    CPC分类号： B24B37/30 ,  B24B37/32 ,  B24B47/10 ,  B24B47/12 ,  B24B49/16

    摘要： A carrier head with a flexible member connected to a base to define a first chamber, a second chamber and a third chamber. A lower surface of the flexible member provides a substrate receiving surface with an inner portion associated with the first chamber, a substantially annular middle portion surrounding the inner portion and associated with the second chamber, and a substantially annular outer portion surrounding the middle portion and associated with the third chamber. The width of the outer portion may be significantly less than the width of the middle portion. The carrier head may also include a flange connected to a drive shaft and a gimbal pivotally connecting the flange to the base.

    Carrier head with a flexible membrane for a chemical mechanical polishing system
    3.
    发明申请
    Carrier head with a flexible membrane for a chemical mechanical polishing system 有权
    带有柔性膜的载体头，用于化学机械抛光系统

    公开(公告)号：US20010041526A1

    公开(公告)日：2001-11-15

    申请号：US09908868

    申请日：2001-07-18

    申请人： Applied Materials, Inc. a Delaware Corporation

    发明人： Ilya Perlov ,  Eugene Gantvarg ,  Sen-Hou Ko

    IPC分类号： B24B005/00 ,  B24B029/00

    CPC分类号： B24B37/30 ,  B24B37/32 ,  B24B47/10 ,  B24B47/12 ,  B24B49/16

    摘要： A carrier head with a flexible member connected to a base to define a first chamber, a second chamber and a third chamber. A lower surface of the flexible member provides a substrate receiving surface with an inner portion associated with the first chamber, a substantially annular middle portion surrounding the inner portion and associated with the second chamber, and a substantially annular outer portion surrounding the middle portion and associated with the third chamber. The width of the cuter portion may be significantly less than the width of the middle portion. The carrier head may also includea flange connected to a drive shaft and a gimbal pivotally connecting the flange to the base.

    摘要翻译： 具有连接到基座以限定第一室，第二室和第三室的柔性构件的承载头。 柔性构件的下表面提供了具有与第一腔室相关联的内部部分的基底接收表面，围绕内部部分并与第二腔室相关联的基本上环形的中间部分，以及围绕中间部分和相关联的基本上环形的外部部分 与第三个房间。 切割部分的宽度可以明显小于中间部分的宽度。 承载头还可以包括连接到驱动轴的凸缘和将凸缘枢转地连接到基座的万向架。

    Carrier head with a flexible membrane for a chemical mechanical polishing system
    4.
    发明申请
    Carrier head with a flexible membrane for a chemical mechanical polishing system 有权
    带有柔性膜的载体头，用于化学机械抛光系统

    公开(公告)号：US20040033769A1

    公开(公告)日：2004-02-19

    申请号：US10353326

    申请日：2003-01-28

    申请人： Applied Materials, Inc., a Delaware corporation

    发明人： Steven M. Zuniga ,  Manoocher Birang ,  Hung Chen ,  Sen-Hou Ko

    IPC分类号： B24B005/00

    CPC分类号： B24B37/30 ,  B24B37/32

    摘要： A carrier head for a chemical mechanical polishing apparatus. The carrier head includes a housing, a base, a loading mechanism, a gimbal mechanism, and a substrate backing assembly. The substrate backing assembly includes a support structure positioned below the base, a substantially horizontal, annular flexure connecting the support structure to the base, and a flexible membrane connected to the support structure. The flexible membrane has a mounting surface for a substrate, and extends beneath the base to define a chamber.

    摘要翻译： 用于化学机械抛光装置的载体头。 承载头包括壳体，基座，装载机构，万向节机构和基底背衬组件。 衬底背衬组件包括位于底座下方的支撑结构，将支撑结构连接到基座的基本水平的环形弯曲部，以及连接到支撑结构的柔性膜。 柔性膜具有用于基底的安装表面，并且在基底之下延伸以限定腔室。