公开(公告)号：US20030206292A1

公开(公告)日：2003-11-06

申请号：US10423354

申请日：2003-04-25

Applicant: Applied Materials Israel Ltd

Inventor： Daniel Some

IPC: G01N021/00

CPC classification number: G01N21/956 ,  G01N21/171 ,  G01N21/636 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: A local area of a sample is focally heated to produce a transient physical deformation. The surface of the structure is optically monitored while the heated area cools to a baseline temperature by illuminating the heated region with one or more probe beams from time to time and detecting returning light. In some embodiments heat dissipation within the structure is correlated with change in optical reflectivity over time. In other embodiments, surface deformation of the structure is correlated with changes in light scattering from the surface. Following application of a pump pulse and no more than 3 probe pulses, a time varying returning light signal is compared with a corresponding returning light signal from a reference. An anomaly in the sample is indicated by a deviation between the two signals. First-degree exponential decay curves may be constructed from the signals, and their decay constants compared.

Abstract translation: 样品的局部区域被加热以产生瞬态物理变形。 通过光学监测结构的表面，同时通过用不同时间的一个或多个探测光束照射加热区域并检测返回光来将加热区域冷却至基线温度。 在一些实施例中，结构内的散热与随时间的光学反射率的变化相关。 在其他实施例中，结构的表面变形与来自表面的光散射的变化相关。 在施加泵浦脉冲和不超过3个探针脉冲之后，将时变返回光信号与来自参考的相应返回光信号进行比较。 样本中的异常由两个信号之间的偏差表示。 可以根据信号构造一阶指数衰减曲线，并比较其衰减常数。

公开(公告)号：US20040125375A1

公开(公告)日：2004-07-01

申请号：US10453149

申请日：2003-06-02

Applicant: Applied Materials Israel Ltd

Inventor： Daniel Some

IPC: G01J004/00

CPC classification number: G01N21/9501 ,  G01N21/211 ,  G01N21/95607

Abstract: Systems and methods for optical inspection of patterned and non-patterned objects. The methods include determining a state of polarization of light reflected from the object, establishing a polarization state of the incident light, and filtering the reflected light by polarization so as to provide an optical signal that is detected by a detector.

Abstract translation: 用于光学检测图案和非图案物体的系统和方法。 所述方法包括确定从物体反射的光的偏振状态，建立入射光的偏振状态，以及通过偏振对反射光进行滤波，以提供由检测器检测的光信号。

公开(公告)号：US20030227618A1

公开(公告)日：2003-12-11

申请号：US10386973

申请日：2003-03-11

Applicant: Applied Materials Israel Ltd

Inventor： Daniel Some

IPC: G01N021/00

CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

公开(公告)号：US20030210402A1

公开(公告)日：2003-11-13

申请号：US10353754

申请日：2003-01-28

Applicant: Applied Materials Israel Ltd.

Inventor： Alexander Libinson ,  Haim Feldman ,  Daniel Some ,  Boris Goldberg

IPC: G01B009/02

CPC classification number: G02B21/14 ,  G01N21/95607

Abstract: Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface. The distance between the first and second spots is responsive to a pitch of a repetitive pattern of the sample. Collection optics are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate an interference pattern. A detector detects a change in the interference pattern.

Abstract translation: 用于光学评估样本的装置包括适于产生相干辐射束的辐射源和适用于聚焦光束的行进透镜光学器件，以便在样品的表面上产生第一和第二斑点并扫描斑点 一起在表面。 第一和第二点之间的距离响应于样品的重复图案的间距。 收集光学器件被定位成收集从第一和第二点散射的辐射并聚焦所收集的辐射，以便产生干涉图案。 检测器检测干涉图案的变化。