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公开(公告)号:US20110111340A1
公开(公告)日:2011-05-12
申请号:US12745355
申请日:2008-11-28
CPC分类号: G03F7/0757 , C08G77/06 , C08G77/14 , C08G77/16 , C08G77/20 , C08G77/26 , C08G77/28 , C08G77/32 , C08G77/80 , C08K5/0025 , C08L83/06 , C08L83/08 , G03F7/0007 , G03F7/004 , G03F7/20 , G03F7/30 , G03F7/322
摘要: A siloxane composition and a method of producing the same. The composition comprises a siloxane prepolymer with a backbone exhibiting a group which is capable of being deprotonated in an aqueous base solution. Further, there are reactive functional groups, which are capable of reacting during thermal or radiation initiated curing. The siloxane is cross-linked during condensation polymerisation to increase molecular weight thereof.The composition can be used in high-resolution negative tone lithographic fabrication processes where a water based developer system is applied in the development step of the lithography process.
摘要翻译: 硅氧烷组合物及其制造方法。 组合物包含具有显示能够在碱性水溶液中去质子化的基团的主链的硅氧烷预聚物。 此外,存在反应性官能团,其能够在热或辐射引发固化期间反应。 在缩聚期间硅氧烷是交联的,以增加其分子量。 该组合物可用于高分辨率负调光刻制造工艺,其中在光刻工艺的显影步骤中应用水基显影剂系统。
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公开(公告)号:US20090142694A1
公开(公告)日:2009-06-04
申请号:US11948274
申请日:2007-11-30
CPC分类号: C08L83/06 , C08K5/49 , C09D183/04 , C09D183/06 , G03F7/0757
摘要: A siloxane composition and a method of producing the Same. The composition comprises a siloxane prepolymer with a backbone exhibiting a group which is capable of being deprotonated in an aqueous base solution. Further, there are reactive functional groups, which are capable of reacting during thermal or radiation initiated curing. The siloxane polymer is provided in a solvent which also contains a photo reactive compound. The composition can be used in negative tone lithographic fabrication processes where a water based developer system is applied in the development step of the lithography process.
摘要翻译: 硅氧烷组合物及其制造方法。 组合物包含具有显示能够在碱性水溶液中去质子化的基团的主链的硅氧烷预聚物。 此外,存在反应性官能团,其能够在热或辐射引发固化期间反应。 硅氧烷聚合物在还含有光反应性化合物的溶剂中提供。 该组合物可用于负光刻光刻制造工艺,其中在光刻工艺的显影步骤中应用水基显影剂体系。
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公开(公告)号:US09273209B2
公开(公告)日:2016-03-01
申请号:US12745355
申请日:2008-11-28
IPC分类号: C08L83/06 , C08L83/08 , G03F7/075 , G03F7/004 , C08G77/06 , C08G77/16 , C08G77/26 , C08G77/28 , C08G77/32 , G03F7/30 , G03F7/32 , C08K5/00 , G03F7/00 , C08G77/14 , C08G77/20 , C08G77/00
CPC分类号: G03F7/0757 , C08G77/06 , C08G77/14 , C08G77/16 , C08G77/20 , C08G77/26 , C08G77/28 , C08G77/32 , C08G77/80 , C08K5/0025 , C08L83/06 , C08L83/08 , G03F7/0007 , G03F7/004 , G03F7/20 , G03F7/30 , G03F7/322
摘要: A siloxane composition and a method of producing the same. The composition comprises a siloxane prepolymer with a backbone exhibiting a group which is capable of being deprotonated in an aqueous base solution. Further, there are reactive functional groups, which are capable of reacting during thermal or radiation initiated curing. The siloxane is cross-linked during condensation polymerization to increase molecular weight thereof.The composition can be used in high-resolution negative tone lithographic fabrication processes where a water based developer system is applied in the development step of the lithography process.
摘要翻译: 硅氧烷组合物及其制造方法。 组合物包含具有显示能够在碱性水溶液中去质子化的基团的主体的硅氧烷预聚物。 此外,存在反应性官能团,其能够在热或辐射引发固化期间反应。 在缩聚期间硅氧烷交联以增加其分子量。 该组合物可用于高分辨率负调光刻制造工艺,其中在光刻工艺的显影步骤中应用水基显影剂系统。
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公开(公告)号:US20060263621A1
公开(公告)日:2006-11-23
申请号:US11415521
申请日:2006-05-02
申请人: Milja Hannu-Kuure , Ari Karkkainen
发明人: Milja Hannu-Kuure , Ari Karkkainen
CPC分类号: C08K5/107 , C07F7/2208 , C07F7/2224 , C08G79/12 , C09D185/00 , Y10T428/12049
摘要: Organo-tin compound having the formula I: [R—(Y)a]b—SnX4-b wherein R stands for a polycyclic hydrocarbyl residue which optionally carries one or several substituents; Y stands for a bivalent linker group; X represents a hydrolysable group; a is an integer 0 or 1; and b is an integer 1 or 2. The preferably stands for an unsubstituted or substituted fused hydrocarbon ring system selected from naphthalene, antracene, phenanthrene, and pentacene. The novel compounds are useful for producing polymers which can be employed as thin film materials in optoelectronic devices.
摘要翻译: 具有式I的有机锡化合物:<?in-line-formula description =“In-line Formulas”end =“lead”?> [R-(Y))a B sub> -SnX 4-b <?in-line-formula description =“In-line Formulas”end =“tail”?>其中R代表多环烃基残基,任选地带有一个 或几个取代基; Y代表二价连接基团; X表示可水解基团; a是整数0或1; b优选为1或2的整数。优选代表未取代或取代的稠合烃环体系,其选自萘,蒽并菲,并五苯。 新型化合物可用于制备可用作光电器件中的薄膜材料的聚合物。
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公开(公告)号:US07393560B2
公开(公告)日:2008-07-01
申请号:US11415521
申请日:2006-05-02
申请人: Milja Hannu-Kuure , Ari Kärkkäinen
发明人: Milja Hannu-Kuure , Ari Kärkkäinen
CPC分类号: C08K5/107 , C07F7/2208 , C07F7/2224 , C08G79/12 , C09D185/00 , Y10T428/12049
摘要: Organo-tin compound having the formula I: [R—(Y)a]b—SnX4-b wherein R stands for a polycyclic hydrocarbyl residue which optionally carries one or several substituents; Y stands for a bivalent linker group; X represents a hydrolysable group; a is an integer 0 or 1; and b is an integer 1 or 2. The preferably stands for an unsubstituted or substituted fused hydrocarbon ring system selected from naphthalene, antracene, phenanthrene, and pentacene. The novel compounds are useful for producing polymers which can be employed as thin film materials in optoelectronic devices.
摘要翻译: 具有式I的有机锡化合物:<?in-line-formula description =“In-line Formulas”end =“lead”?> [R-(Y))a B sub> -SnX 4-b <?in-line-formula description =“In-line Formulas”end =“tail”?>其中R代表多环烃基残基,任选地带有一个 或几个取代基; Y代表二价连接基团; X表示可水解基团; a是整数0或1; b优选为1或2的整数。优选代表未取代或取代的稠合烃环体系,其选自萘,蒽并菲,并五苯。 新型化合物可用于制备可用作光电器件中的薄膜材料的聚合物。
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