公开(公告)号：US09534310B2

公开(公告)日：2017-01-03

申请号：US14649003

申请日：2013-12-03

Applicant: Atotech Deutschland GmbH

Inventor： Ralph Rauenbusch ,  Christian Thomas ,  Ray Weinhold ,  Heinz Klingl

IPC: C25D17/00 ,  C25D17/12 ,  C25D17/06 ,  C25D7/12 ,  C25D5/08

CPC classification number: C25D17/001 ,  C25D5/08 ,  C25D7/123 ,  C25D17/004 ,  C25D17/06 ,  C25D17/12

Abstract: The present invention is related to a device for vertical galvanic metal, preferably copper, deposition on a substrate, a container suitable for receiving such a device and a substrate holder, which is suitable for receiving a substrate to be treated, and the use of such a device inside of such a container for galvanic metal, in particular copper, deposition on a substrate.

Abstract translation: 本发明涉及一种用于垂直电偶金属的装置，优选铜沉积在基底上，适于接收这种装置的容器和适于接收待处理基底的基底支架，以及使用这种装置 这种用于电镀金属的容器内的装置，特别是铜，沉积在基板上。

公开(公告)号：US10832929B2

公开(公告)日：2020-11-10

申请号：US16326404

申请日：2017-09-14

Applicant: Atotech Deutschland GmbH

Inventor： Ralph Rauenbusch ,  Tobias Bussenius ,  Daniel Buchberger ,  Ray Weinhold

IPC: H01L21/677 ,  C25F1/00 ,  H01L21/683 ,  H01L21/67

Abstract: The present invention refers to a method for processing a wafer like substrate using a touching gripper and a touchless gripper. Furthermore, the present invention refers to an apparatus for processing a wafer-like substrate containing a touching gripper and a touchless gripper. Additionally, the present invention refers to the use of an inventive apparatus to process a wafer-like substrate.

公开(公告)号：US10407793B2

公开(公告)日：2019-09-10

申请号：US15533712

申请日：2015-12-16

Applicant: Atotech Deutschland GmbH

Inventor： Arnulf Fendel ,  Ralph Rauenbusch ,  Tobias Bussenius

IPC: C25D17/06 ,  C25D17/00 ,  H01L21/687 ,  H01L21/67 ,  H01L21/288

Abstract: A substrate holder for vertical galvanic metal deposition on a substrate, comprising a first substrate holder part and a second substrate holder part, wherein both said parts comprise an inner metal comprising part and an outer non-metallic part in which the substrate holder further comprises a hanging element in each substrate holder part, a first sealing element in each substrate holder part, a second sealing element between the inner metal comprising part and the outer non-metallic part of the substrate holder, a fastening system for detachably fastening both substrate holder parts to each other, a first contact element in each substrate holder part for forwarding current from an outer source through the hanging element to the at least second contact element, and a second contact element in each substrate holder part for forwarding current from the at least first contact element to the substrate to be treated.

公开(公告)号：US10260161B2

公开(公告)日：2019-04-16

申请号：US15535424

申请日：2016-08-04

Applicant: Atotech Deutschland GmbH

Inventor： Ralph Rauenbusch ,  Tobias Bussenius ,  Stefan Vitzthum

IPC: C25D17/06 ,  C25D17/00 ,  C25D21/00 ,  C25D21/02 ,  H01L21/68 ,  H01L21/687

Abstract: This invention concerns a substrate holder reception apparatus (1) for clamping a substrate holder (11) in a substrate holder clamping direction (SHCD) in a predetermined position of the substrate holder (11) and releasing the substrate holder (11), comprising at least one substrate holder connection device (21) for mechanical aligning and electrically contacting of the substrate holder (11), wherein the substrate holder connection device (21) comprises a separate substrate holder alignment device (211) for aligning the substrate holder (11) with the substrate holder connection device (21) in an alignment direction, and a separate substrate holder contact device (212) for electrically contacting the substrate holder (11). Further, the invention concerns an electrochemical treatment apparatus (5) comprising the substrate holder reception apparatus (1).

公开(公告)号：US09222192B2

公开(公告)日：2015-12-29

申请号：US14427045

申请日：2013-09-16

Applicant: Atotech Deutschland GmbH

Inventor： Ralph Rauenbusch ,  Christian Thomas ,  Ray Weinhold ,  Heinz Klingl

IPC: C25D17/00 ,  C25D5/02 ,  C25D17/06 ,  C25D7/12 ,  H05K3/00

CPC classification number: C25D17/06 ,  C25D7/12 ,  C25D17/001 ,  C25D17/004 ,  H05K3/007 ,  Y10T29/49117

Abstract: A holding device for a treatment of a product (5), which holding device comprises a first holding part (41) and a second holding part (42). The first holding part (41) comprises at least one first electrical contact element (13) for establishing a contact with a first side (6) of the product (5). The second holding part (42) comprises at least one second electrical contact element (14) for establishing a contact with a second side (7) of the product (5), which second side that lies opposite the first side (6). The first holding part (41) and the second holding part (42) are arranged in such a way that they can be fastened to one another in a detachable manner for the purpose of holding the product (5). A product seal (15, 16) and a housing seal (17) provide a sealing arrangement to prevent the penetration of fluid into the at least one first electrical contact element (13) and the at least one second electrical contact element (14) in a treatment state.

Abstract translation: 一种用于处理产品（5）的保持装置，该保持装置包括第一保持部（41）和第二保持部（42）。 第一保持部分（41）包括用于与产品（5）的第一侧（6）建立接触的至少一个第一电接触元件（13）。 第二保持部件（42）包括至少一个第二电接触元件（14），用于与产品（5）的第二侧（7）建立接触，第二侧面与第一侧面（6）相对。 第一保持部（41）和第二保持部（42）以能够以可拆卸的方式彼此紧固的方式配置，以便保持产品（5）。 产品密封件（15,16）和外壳密封件（17）提供密封装置，以防止流体进入至少一个第一电接触元件（13）和至少一个第二电接触元件（14）中 治疗状态。

公开(公告)号：US20150225868A1

公开(公告)日：2015-08-13

申请号：US14427045

申请日：2013-09-16

Applicant: Atotech Deutschland GmbH

Inventor： Ralph Rauenbusch ,  Christian Thomas ,  Ray Weinhold ,  Heinz Klingl

IPC: C25D17/06 ,  H05K3/00

CPC classification number: C25D17/06 ,  C25D7/12 ,  C25D17/001 ,  C25D17/004 ,  H05K3/007 ,  Y10T29/49117

Abstract: A holding device for a treatment of a product (5), which holding device comprises a first holding part (41) and a second holding part (42). The first holding part (41) comprises at least one first electrical contact element (13) for establishing a contact with a first side (6) of the product (5). The second holding part (42) comprises at least one second electrical contact element (14) for establishing a contact with a second side (7) of the product (5), which second side that lies opposite the first side (6). The first holding part (41) and the second holding part (42) are arranged in such a way that they can be fastened to one another in a detachable manner for the purpose of holding the product (5). A product seal (15, 16) and a housing seal (17) provide a sealing arrangement to prevent the penetration of fluid into the at least one first electrical contact element (13) and the at least one second electrical contact element (14) in a treatment state.

Abstract translation: 一种用于处理产品（5）的保持装置，该保持装置包括第一保持部（41）和第二保持部（42）。 第一保持部分（41）包括用于与产品（5）的第一侧（6）建立接触的至少一个第一电接触元件（13）。 第二保持部件（42）包括至少一个第二电接触元件（14），用于与产品（5）的第二侧（7）建立接触，第二侧面与第一侧面（6）相对。 第一保持部（41）和第二保持部（42）以能够以可拆卸的方式彼此紧固的方式配置，以便保持产品（5）。 产品密封件（15,16）和外壳密封件（17）提供密封装置，以防止流体渗透到至少一个第一电接触元件（13）和至少一个第二电接触元件（14）中 治疗状态。