公开(公告)号：US5101111A

公开(公告)日：1992-03-31

申请号：US549194

申请日：1990-07-06

申请人： Noriyuki Kondo

发明人： Noriyuki Kondo

IPC分类号： G01B11/06

CPC分类号： G01B11/0616

摘要： Prior to measurement of the thickness dx of a thin film which is formed on a substrate, correlation data between the reflectance Rs of the film for light and the thickness dx thereof is stored in a data memory in the form of a table. A reference sample having a known reflectance Rp is prepared and the energy Ep of light reflected from the reference sample is measured. Also measured is the energy Es of light reflected from an objective sample having the thin film and the substrate. A value of the thickness dx is obtained through the table while setting Y=Rp therein, where y is calculated through a fomula y=(Rp/Ep).multidot.Es.

公开(公告)号：US08899459B2

公开(公告)日：2014-12-02

申请号：US13094249

申请日：2011-04-26

申请人： Noriyuki Kondo ,  Ikuyoshi Nakatani

发明人： Noriyuki Kondo ,  Ikuyoshi Nakatani

IPC分类号： B26F3/00 ,  H01L21/67 ,  B28D5/00

CPC分类号： B28D5/0011 ,  H01L21/67092 ,  Y10T83/0333 ,  Y10T83/141 ,  Y10T225/10 ,  Y10T225/12 ,  Y10T225/30 ,  Y10T225/336

摘要： In a breaking operation, a substrate is moved so that a blade can be situated in line with a scribe line, and the blade is lowered to break the substrate. After the breaking, the blade is raised. Then, the substrate is moved along its surface while taking an image of the substrate by using a camera after the breaking. Moreover, the blade is lowered to break the substrate. After the breaking, the blade is raised. Then, the substrate is moved along its surface while performing image processing concurrently. After the movement of the substrate, the position of the substrate is corrected so that the following scribe line to be cut for breaking can be situated immediately below the blade. In this way, the time required for breaking the substrate formed with a multiplicity of scribe lines into pieces can be shortened.

摘要翻译： 在断开操作中，基板被移动，使得叶片可以与划线对齐，并且叶片被降低以破坏基板。 破碎后，刀片升起。 然后，在破碎之后，通过使用相机拍摄基板的图像，使基板沿其表面移动。 此外，叶片被降低以破坏基板。 破碎后，刀片升起。 然后，同时进行图像处理，沿其表面移动基板。 在基板的移动之后，校正基板的位置，使得要切断的下述划线可以位于叶片的正下方。 以这种方式，可以缩短将由多个划痕线形成的基板破碎成片所需的时间。

公开(公告)号：US20050206907A1

公开(公告)日：2005-09-22

申请号：US11057216

申请日：2005-02-15

申请人： Hiroki Fujimoto ,  Noriyuki Kondo ,  Eiji Nishihara

发明人： Hiroki Fujimoto ,  Noriyuki Kondo ,  Eiji Nishihara

IPC分类号： G01B9/02 ,  G01B11/06 ,  G01N21/27

CPC分类号： G01B11/0625

摘要： A film thickness measurement apparatus has an image pickup part (32) for acquiring a plurality of single-band images corresponding to a plurality of wavelengths, and the image pickup part (32) acquires a plurality of reference single-band images representing a pattern on a reference substrate. A correction factor setting part (51) performs setting of a plurality of correction factors in accordance with distances from a specified pixel by using a plurality of reference single-band images. Subsequently, the image pickup part (32) acquires a plurality of measurement single-band images representing a pattern on an objective substrate and corrects a value of the specified pixel for each of a plurality of measurement single-band images by using the value of the specified pixel and values of pixels surrounding the specified pixel and the correction factors. A spectral reflectance calculation part (52) thereby calculates a reflectance at a measurement point on the objective substrate which corresponds to the specified pixel on the basis of the corrected value of the specified pixel with high accuracy.

摘要翻译： 膜厚测量装置具有用于获取对应于多个波长的多个单频带图像的图像拾取部分（32），并且图像拾取部分（32）获取表示图案上的多个参考单带图像 参考基板。 校正因子设定部（51）通过使用多个基准单频带图像，根据与指定像素的距离来进行多个校正因子的设定。 随后，图像拾取部分（32）获取表示目标基板上的图案的多个测量单波段图像，并通过使用该多个测量单波段图像的值来校正每个测量单波段图像的指定像素的值 指定的像素和指定像素周围的像素的值以及校正因子。 光谱反射率计算部件（52）由此基于指定像素的校正值高精度地计算对应于指定像素的物镜基板上的测量点的反射率。

公开(公告)号：US5314831A

公开(公告)日：1994-05-24

申请号：US965996

申请日：1992-10-23

申请人： Sadao Hirae ,  Noriyuki Kondo ,  Seiichiro Sato

发明人： Sadao Hirae ,  Noriyuki Kondo ,  Seiichiro Sato

IPC分类号： G01N21/88 ,  G01N21/33 ,  G01N21/84 ,  G01N21/93 ,  G01N21/956 ,  G02F1/136 ,  G02F1/1368 ,  H01L21/66 ,  H01L29/786

CPC分类号： G01N21/8422 ,  G01N21/33 ,  H01L22/12

摘要： Light in an ultraviolet region is applied to a first sample of single-crystalline silicon substrate and a sample of silicon thin film to be evaluated respectively, to obtain wavelength dependency of a ratio (reflection intensity ratio) K(.lambda.) between reflection light intensity values of the samples. A straight line connecting points indicating reflection intensity values at wavelengths 235 nm and 320 nm is obtained to subtract an actual reflection intensity ratio Kr from a virtual reflection intensity ratio Ki provided by the straight line with respect to a wavelength of 270 nm, thereby obtaining an index .DELTA.Ks. In a similar manner, an index .DELTA.Ka is obtained as to a second sample of silicon which is composed of only true amorphous phases. The degree of non-crystallization of the silicon thin film to be obtained is evaluated by comparing the index .DELTA.Ks with the index .DELTA.Ka.

摘要翻译： 将紫外线区域的光分别施加到单晶硅基板的第一样本和硅薄膜样品，以分别评价反射光强度值（反射强度比）K（λ）之间的反射光强度值 的样品。 获得连接指示波长235nm和320nm处的反射强度值的点的直线，从相对于波长270nm的直线提供的虚拟反射强度比Ki减去实际反射强度比Kr，从而获得 指数DELTA Ks。 以类似的方式，获得关于仅由真实无定形相组成的硅的第二样品的折射率DELTA Ka。 通过将指数DELTA Ks与指数DELTA Ka进行比较来评价待获得的硅薄膜的非结晶度。

公开(公告)号：US07140395B2

公开(公告)日：2006-11-28

申请号：US11384833

申请日：2006-03-21

申请人： Kenichiro Furui ,  Satoshi Mizutani ,  Shigeki Okuhara ,  Noriyuki Kondo

发明人： Kenichiro Furui ,  Satoshi Mizutani ,  Shigeki Okuhara ,  Noriyuki Kondo

IPC分类号： F16L11/10

CPC分类号： F16L11/086 ,  Y10T428/1393

摘要： A brake hose is made by laminating an inner tube rubber layer, lower yarn layer, intermediate rubber layer, upper yarn layer, and cover rubber layer. The rubber material of the inner tube rubber layer and intermediate rubber layer is a blend material in which 40 to 80 wt % is IIR and the remainder is EPDM. The upper yarn is PVA, and the upper yarn is PET, where the tensile strength per unit decitex is at least 6.5 g, and the 2.7 g elongation is 2.6±1%. The brake hose has better water penetration resistance and can be produced by a general purpose method.

摘要翻译： 制动软管通过层压内管橡胶层，下纱层，中间橡胶层，上纱层和覆盖橡胶层而制成。 内管橡胶层和中间橡胶层的橡胶材料是40〜80重量％为IIR，其余为EPDM的共混材料。 上纱是PVA，上纱是PET，其中每分钟的拉伸强度至少为6.5g，2.7g伸长率为2.6±1％。 制动软管具有更好的耐水穿透性，可以通过通用方法制造。

公开(公告)号：US5120966A

公开(公告)日：1992-06-09

申请号：US652358

申请日：1991-02-06

申请人： Noriyuki Kondo

发明人： Noriyuki Kondo

IPC分类号： G01B11/06

CPC分类号： G01B11/0616

摘要： Light in the ultraviolet region is applied toward a transparent thin film of an object sample to measure energy of light reflected by the object sample. On the basis of the measured energy value, the thickness of the transparent thin film on the object sample can thus be correctly measured even if the film thickness is not more than 10 nm. In the preferred embodiment, an optical system is included to enable monitoring of a position of the thin transparent film. In one aspect of the invention visible light reflected from the transparent film is used to form an image to facilitate such monitoring.

公开(公告)号：US20110266325A1

公开(公告)日：2011-11-03

申请号：US13094249

申请日：2011-04-26

申请人： Noriyuki Kondo ,  Ikuyoshi Nakatani

发明人： Noriyuki Kondo ,  Ikuyoshi Nakatani

IPC分类号： B26F3/00

CPC分类号： B28D5/0011 ,  H01L21/67092 ,  Y10T83/0333 ,  Y10T83/141 ,  Y10T225/10 ,  Y10T225/12 ,  Y10T225/30 ,  Y10T225/336

摘要： In a breaking operation, a substrate is moved so that a blade can be situated in line with a scribe line, and the blade is lowered to break the substrate. After the breaking, the blade is raised. Then, the substrate is moved along its surface while taking an image of the substrate by using a camera after the breaking. Moreover, the blade is lowered to break the substrate. After the breaking, the blade is raised. Then, the substrate is moved along its surface while performing image processing concurrently. After the movement of the substrate, the position of the substrate is corrected so that the following scribe line to be cut for breaking can be situated immediately below the blade. In this way, the time required for breaking the substrate formed with a multiplicity of scribe lines into pieces can be shortened.

摘要翻译： 在断开操作中，基板被移动，使得叶片可以与划线对齐，并且叶片被降低以破坏基板。 破碎后，刀片升起。 然后，在破碎之后，通过使用相机拍摄基板的图像，使基板沿其表面移动。 此外，叶片被降低以破坏基板。 破碎后，刀片升起。 然后，同时进行图像处理，沿其表面移动基板。 在基板的移动之后，校正基板的位置，使得要切断的下述划线可以位于叶片的正下方。 以这种方式，可以缩短将由多个划痕线形成的基板破碎成片所需的时间。

公开(公告)号：US06104864A

公开(公告)日：2000-08-15

申请号：US840302

申请日：1997-04-09

申请人： Noriyuki Kondo ,  Eijiro Narukawa

发明人： Noriyuki Kondo ,  Eijiro Narukawa

IPC分类号： H04N7/18 ,  H04N5/225

CPC分类号： H04N7/188

摘要： A moving image judging apparatus for displaying an image on a video display monitor. A line sensing camera includes a line sensor having more pixels than a number of vertical scanning lines of the video display monitor, and produces input video signals of images of moving objects by scanning the moving objects using line sensor elements to scan in a direction orthogonal to a moving direction of the moving objects. A video image processing apparatus converts the input video signals from the line sensing camera into digital image data signals which are stored into a memory sequentially according to a time sequence, then read out for displaying and converted into analog output video signals as output signals. The image processing apparatus includes a memory for storage purpose having a first memory area for the digital image data signals to be stored sequentially according to the time sequence and a second memory area for information data concerning the digital image data signals. A memory for display purpose stores image data necessary for displaying image data and drawing information data to be composed with the image data which are written in and afterwards read out in synchronization to a video displaying signal. Time, time lines and information on images are stored as the drawing information data. An output means composes the image data and the drawing information data to convert to analog output video signals. A control means which has a connection interface to external equipment, selects an operation mode according to a selection command, controls the signal conversions from analog to digital and digital to analog, controls the data composition of image data and drawing information data, controls reading and writing of the memory for storage purpose and the memory for display purpose, and generates the drawing information data.

摘要翻译： 一种用于在视频显示监视器上显示图像的运动图像判断装置。 行感测摄像机包括具有比视频显示监视器的多条垂直扫描线多的像素的行传感器，并且通过使用线传感器元件扫描运动对象来产生运动对象的图像的输入视频信号，以沿正交于 移动物体的移动方向。 视频图像处理装置将来自线路感测摄像机的输入视频信号根据时序顺序地转换成数字图像数据信号，然后读出，并将其转换为模拟输出视频信号作为输出信号。 图像处理装置包括用于存储的存储器，具有用于根据时间顺序顺序存储数字图像数据信号的第一存储区域和用于关于数字图像数据信号的信息数据的第二存储区域。 用于显示目的的存储器存储用于显示图像数据所需的图像数据和绘制信息数据，以便与与视频显示信号同步地写入和随后读出的图像数据组成。 时间，时间线和关于图像的信息被存储为绘图信息数据。 输出装置构成图像数据和绘图信息数据，以转换为模拟输出视频信号。 具有与外部设备的连接接口的控制装置，根据选择命令选择操作模式，控制从模拟到数字和数字到模拟的信号转换，控制图像数据和绘图信息数据的数据组成，控制读取和 为存储目的写入存储器和用于显示目的的存储器，并生成绘图信息数据。

公开(公告)号：US4659936A

公开(公告)日：1987-04-21

申请号：US810787

申请日：1985-11-26

申请人： Atsushi Kikkawa ,  Noriyuki Kondo ,  Atsushi Tamada

发明人： Atsushi Kikkawa ,  Noriyuki Kondo ,  Atsushi Tamada

IPC分类号： G01B9/04 ,  G01B11/02 ,  G01N21/86

CPC分类号： G01B9/04 ,  G01B11/024

摘要： A line width measuring device for measuring the line width in an extremely fine pattern formed on a photo-mask or wafer employs a photo-electric converter, including a one-dimensional image sensor array, to convert a magnified image of the pattern into serial output signals storable in digitized form. Compensation and averaging of the stored image element information data are performed in known manner and the results are used to detect pattern edges and hence the line width. In one embodiment the one-dimensional image sensor array can be deviated along the array's axis within the inter-element pitch of the array to enhance the precision of line width measurement.

摘要翻译： 用于测量在光掩模或晶片上形成的极细图案中的线宽的线宽测量装置采用包括一维图像传感器阵列的光电转换器，将图案的放大图像转换成串行输出 信号可以数字化形式存储。 存储的图像元素信息数据的补偿和平均以已知的方式执行，并且结果用于检测图案边缘，并因此用于检测线宽。 在一个实施例中，一维图像传感器阵列可以沿着阵列的元件间间距内的阵列的轴线偏离，以提高线宽测量的精度。

公开(公告)号：US07206074B2

公开(公告)日：2007-04-17

申请号：US11057216

申请日：2005-02-15

申请人： Hiroki Fujimoto ,  Noriyuki Kondo ,  Eiji Nishihara

发明人： Hiroki Fujimoto ,  Noriyuki Kondo ,  Eiji Nishihara

IPC分类号： G01B9/02 ,  G01B11/02 ,  G01B11/06 ,  G01J3/45

CPC分类号： G01B11/0625

摘要： A film thickness measurement apparatus has an image pickup part (32) for acquiring a plurality of single-band images corresponding to a plurality of wavelengths, and the image pickup part (32) acquires a plurality of reference single-band images representing a pattern on a reference substrate. A correction factor setting part (51) performs setting of a plurality of correction factors in accordance with distances from a specified pixel by using a plurality of reference single-band images. Subsequently, the image pickup part (32) acquires a plurality of measurement single-band images representing a pattern on an objective substrate and corrects a value of the specified pixel for each of a plurality of measurement single-band images by using the value of the specified pixel and values of pixels surrounding the specified pixel and the correction factors. A spectral reflectance calculation part (52) thereby calculates a reflectance at a measurement point on the objective substrate which corresponds to the specified pixel on the basis of the corrected value of the specified pixel with high accuracy.

摘要翻译： 膜厚测量装置具有用于获取对应于多个波长的多个单频带图像的图像拾取部分（32），并且图像拾取部分（32）获取表示图案上的多个参考单带图像 参考基板。 校正因子设定部（51）通过使用多个基准单频带图像，根据与指定像素的距离来进行多个校正因子的设定。 随后，图像拾取部分（32）获取表示目标基板上的图案的多个测量单波段图像，并通过使用该多个测量单波段图像的值来校正每个测量单波段图像的指定像素的值 指定的像素和指定像素周围的像素的值以及校正因子。 光谱反射率计算部件（52）由此基于指定像素的校正值高精度地计算对应于指定像素的物镜基板上的测量点的反射率。