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公开(公告)号：US06980013B2
公开(公告)日：2005-12-27
申请号：US10919398
申请日：2004-08-17
申请人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
发明人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
CPC分类号： G01R1/07371
摘要： A probe card including rectilinear probes; a guide base plate having an insulating property, in which a plurality of guide holes are formed through which the probes are inserted in a freely movable manner and a length of a guide hole is shorter than a length of a probe; and a plurality of sheet members having an insulating property, disposed above the guide base plate facing the plate, and laminated one on another with a spacing therebetween so as not to be in contact with one another. The tail ends of some of the probes can be brought into contact with the electrode pads on a lowest sheet member, and the tail ends of the other probes penetrate through the lowest sheet member so as to be enabled to be in contact with electrode pads on other sheet members.
摘要翻译： 包括直线探头的探针卡; 具有绝缘性的导向基板，其中形成有多个引导孔，探针以可自由移动的方式被插入，并且引导孔的长度短于探针的长度; 以及具有绝缘性的多个薄片构件，其设置在所述导向基板的与所述板对置的上方，并且彼此间隔开地彼此层叠，以便彼此不接触。 一些探针的尾端可以与最低的片状部件上的电极焊盘接触，另一个探针的尾端穿过最低的片状部件，以便能够与电极焊盘接触 其他板材。
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公开(公告)号：US07208964B2
公开(公告)日：2007-04-24
申请号：US10709435
申请日：2004-05-05
申请人： Atsushi Mine , Toranosuke Furusho , Kazumichi Machida , Atsuo Urata , Teppei Kimura , Teruhisa Sakata
发明人： Atsushi Mine , Toranosuke Furusho , Kazumichi Machida , Atsuo Urata , Teppei Kimura , Teruhisa Sakata
CPC分类号： G01R1/06733 , G01R1/0735 , G01R1/07357
摘要： It is an object of the present invention to provide an arch type probe capable of enduring a load caused by overdriving even if the probe is miniaturized, and a probe card using the same. An arch type probe 200 has a shape including a first quarter circle arc portion 210 which is supported at one end thereof by the base plate 100 and a second quarter circle arc portion 220 which is connected to the other end of the first quarter circle arc portion 210, extending toward the base plate and a little shorter than the first quarter circle arc portion 221. The top portion of the arch type probe 200 serves as a contact surface brought into contact with an electrode of a semiconductor water B.
摘要翻译： 本发明的目的是提供一种即使探头小型化也能够承受由过驱动引起的负载的弓形探针，以及使用该弓形探针的探针卡。 拱形探针200具有包括第一四分之一圆弧部分210的形状，第一四分之一圆弧部分210的一端由基板100支撑，第二四分之一圆弧部分220连接到第一四分之一圆弧部分的另一端 210，朝向基板延伸并稍短于第一四分之一圆弧部分221.拱型探针200的顶部用作与半导体水B的电极接触的接触表面。
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公开(公告)号：US20070052432A1
公开(公告)日：2007-03-08
申请号：US11224304
申请日：2005-09-13
申请人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
发明人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
IPC分类号： G01R31/02
CPC分类号： G01R1/07371
摘要： The invention aims to provide a vertical type probe card in which a probe can scrape an oxide film on a surface of an electrode of the measurement object, thereby ensuring stable contact with the electrode of the measurement object. A probe card A includes: first and second probes 100a and 100b; a guide substrate 200 in which a plurality of guide holes 210 are formed through which the first and second probes 100a and 100b are inserted in a freely movable manner; a support member 400 provided above the guide substrate 200; a first sheet member 300a of flexibility, attached to the support member 400, having a first electrode pad 310a on its surface, in which a tail end 120a of the first probe 100a projecting out from the guide hole 210 is brought into contact with the first electrode pad 310a; a second sheet member 300b of flexibility, attached to the support member 400, having a second electrode pad 310b on its surface, in which a tail end 120b of the second probe 100b projecting out from the guide hole 210 and penetrating through the first sheet member 300a is brought into contact with the second electrode pad 310b; and vibrating means 500 attached to the support member 400, wherein the vibrating means 500 vibrates the first and second probes 100a and 100b via the support member 400 and the first and second sheet members 300a and 300b.
摘要翻译： 本发明的目的是提供一种垂直型探针卡，其中探针可以在测量对象的电极的表面上刮擦氧化膜，从而确保与测量对象的电极的稳定接触。 探针卡A包括：第一和第二探针100a和100b; 引导基板200，其中形成有多个引导孔210，第一和第二探针100a和100b以可自由移动的方式被插入; 设置在引导基板200上方的支撑部件400; 连接到支撑构件400的第一片状构件300a具有在其表面上的第一电极垫310a，其中从导向孔210突出的第一探针100a的尾端120a进入 与第一电极焊盘310a接触; 附接到支撑构件400的第二片状构件300b，在其表面上具有第二电极焊盘310b，其中第二探针100b的尾端120b从引导孔210突出并穿过 第一片状部件300a与第二电极焊盘310b接触; 以及附接到支撑构件400的振动装置500，其中振动装置500经由支撑构件400和第一和第二片构件300a和300b使第一和第二探针100a和100b振动。
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公开(公告)号：US07268568B2
公开(公告)日：2007-09-11
申请号：US11224304
申请日：2005-09-13
申请人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
发明人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
IPC分类号： G01R31/02
CPC分类号： G01R1/07371
摘要： The invention aims to provide a vertical type probe card in which a probe can scrape an oxide film on a surface of an electrode of the measurement object, thereby ensuring stable contact with the electrode of the measurement object. A probe card A includes: first and second probes 100a and 100b; a guide substrate 200 in which a plurality of guide holes 210 are formed through which the first and second probes 100a and 100b are inserted in a freely movable manner; a support member 400 provided above the guide substrate 200; a first sheet member 300a of flexibility, attached to the support member 400, having a first electrode pad 310a on its surface, in which a tail end 120a of the first probe 100a projecting out from the guide hole 210 is brought into contact with the first electrode pad 310a; a second sheet member 300b of flexibility, attached to the support member 400, having a second electrode pad 310b on its surface, in which a tail end 120b of the second probe 100b projecting out from the guide hole 210 and penetrating through the first sheet member 300a is brought into contact with the second electrode pad 310b; and vibrating means 500 attached to the support member 400, wherein the vibrating means 500 vibrates the first and second probes 100a and 100b via the support member 400 and the first and second sheet members 300a and 300b.
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公开(公告)号：US20050151547A1
公开(公告)日：2005-07-14
申请号：US10919398
申请日：2004-08-17
申请人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
发明人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
CPC分类号： G01R1/07371
摘要： A probe card including rectilinear probes; a guide base plate having an insulating property, in which a plurality of guide holes are formed through which the probes are inserted in a freely movable manner and a length of a guide hole is shorter than a length of a probe; and a plurality of sheet members having an insulating property, disposed above the guide base plate facing the plate, and laminated one on another with a spacing therebetween so as not to be in contact with one another. The tail ends of some of the probes can be brought into contact with the electrode pads on a lowest sheet member, and the tail ends of the other probes penetrate through the lowest sheet member so as to be enabled to be in contact with electrode pads on other sheet members.
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公开(公告)号：US07692438B2
公开(公告)日：2010-04-06
申请号：US10565156
申请日：2005-05-19
申请人： Kazumichi Machida , Atsuo Urata , Takeshi Konno , Akira Ishida , Mitsuru Egashira , Mikihiko Kobayashi
发明人： Kazumichi Machida , Atsuo Urata , Takeshi Konno , Akira Ishida , Mitsuru Egashira , Mikihiko Kobayashi
IPC分类号： G01R31/02
CPC分类号： G01R1/06755 , G01R1/06733
摘要： It is an object of the present invention to provide a probe which can provide stable electrical conduction to an electrode of an object to be measured even when it is miniaturized. A probe 100 comprises a columnar contact part 110 which can come in contact with an electrode 10 of an object to be measured almost perpendicularly, and a base end (not shown) connected to the contact part 110, the contact part 110 comprises a base part 111 and an expansion part 111a bonded to an end of the base part 111 in a width direction, and the expansion part 111a is formed of a material having a thermal expansion coefficient higher than that of the base part 111.
摘要翻译： 本发明的目的是提供一种探针，即使在小型化时也能够对被测量物体的电极进行稳定的导电。 探针100包括能够几乎垂直于待测量物体的电极10接触的柱状接触部分110和连接到接触部分110的基端（未示出），接触部分110包括基部 111和在宽度方向上接合到基部111的端部的膨胀部111a，并且膨胀部111a由热膨胀系数高于基部111的热膨胀系数的材料形成。
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公开(公告)号：US20050184745A1
公开(公告)日：2005-08-25
申请号：US11061656
申请日：2005-02-22
申请人： Kazumichi Machida , Atsuo Urata , Atsushi Mine
发明人： Kazumichi Machida , Atsuo Urata , Atsushi Mine
CPC分类号： G01R1/0735
摘要： An object of the invention is to provide a probe card capable of properly performing a measurement. A probe card according to the invention includes: probes 100 shaped to allow vertical elastic deformation; a supporting substrate 200 with the probes provided on the lower surface thereof; a main substrate 300 positioned opposing the upper surface of the supporting substrate 200; an intermediate substrate 400 disposed between the supporting substrate 200 and main substrate 300; a supporting member 500 that is a column-shaped member with one end thereof attached to the center of the supporting substrate 200 and the other end thereof attached to the intermediate substrate 400 and holds the supporting substrate 200 so that the supporting substrate 200 is inclinable; and elastic members for holding the supporting substrate 200 so that the supporting substrate 200 is in a horizontal position relative to the main substrate 300, which are provided between the supporting substrate 200 and main substrate 300.
摘要翻译： 本发明的目的是提供一种能够适当地执行测量的探针卡。 根据本发明的探针卡包括：成形为允许垂直弹性变形的探针100; 支撑基板200，其上设置有探针的下表面; 与支撑基板200的上表面相对定位的主基板300; 设置在支撑基板200和主基板300之间的中间基板400; 支撑构件500，其是一端部附接到支撑衬底200的中心并且另一端附接到中间衬底400并保持支撑衬底200使得支撑衬底200可倾斜的柱状构件; 以及用于保持支撑衬底200的弹性构件，使得支撑衬底200相对于设置在支撑衬底200和主衬底300之间的主衬底300处于水平位置。
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公开(公告)号：US20080054916A1
公开(公告)日：2008-03-06
申请号：US10565156
申请日：2005-05-19
申请人： Kazumichi Machida , Atsuo Urata , Takeshi Konno , Akira Ishida , Mitsuru Egashira , Mikihiko Kobayashi
发明人： Kazumichi Machida , Atsuo Urata , Takeshi Konno , Akira Ishida , Mitsuru Egashira , Mikihiko Kobayashi
CPC分类号： G01R1/06755 , G01R1/06733
摘要： It is an object of the present invention to provide a probe which can provide stable electrical conduction to an electrode of an object to be measured even when it is miniaturized. A probe 100 comprises a columnar contact part 110 which can come in contact with an electrode 10 of an object to be measured almost perpendicularly, and a base end (not shown) connected to the contact part 110, the contact part 110 comprises a base part 111 and an expansion part 111a bonded to an end of the base part 111 in a width direction, and the expansion part 111a is formed of a material having a thermal expansion coefficient higher than that of the base part 111.
摘要翻译： 本发明的目的是提供一种探针，即使在小型化时也能够对被测量物体的电极进行稳定的导电。 探针100包括能够几乎垂直于待测量物体的电极10接触的柱状接触部分110和连接到接触部分110的基端（未示出），接触部分110包括基部 111和在宽度方向上接合到基部111的端部的膨胀部111a，并且膨胀部111a由热膨胀系数高于基部111的热膨胀系数的材料形成。
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