公开(公告)号：US20160280963A1

公开(公告)日：2016-09-29

申请号：US15177727

申请日：2016-06-09

Applicant: BASF SE

Inventor： Zhihua ZHANG ,  Vaibhav DALVI ,  Bir Darbar MEHTA ,  Andreas FECHTENKOETTER ,  Yuzhuo LI ,  Michael LAUTER

IPC: C09G1/02 ,  C23C16/02 ,  H01L21/306 ,  C09K3/14

CPC classification number: C09G1/02 ,  C01B33/18 ,  C01F17/0043 ,  C01P2004/03 ,  C01P2004/32 ,  C01P2004/62 ,  C01P2004/64 ,  C01P2004/84 ,  C09C3/063 ,  C09K3/1436 ,  C09K3/1445 ,  C09K3/1463 ,  C23C16/02 ,  H01L21/30625 ,  H01L21/31053

Abstract: Raspberry-type coated particles comprising a core selected from the group consisting of metal oxides of Si, Ti, Zr, Al, Zn and mixtures thereof with a core size of from 20 to 100 nm wherein the core is coated with CeO2 particles having a particle size below 10 nm; process for preparing raspberry type coated particles comprising the steps of i) providing a mixture containing a) core particles selected from the group of metal oxides of Si, Ti, Zr, Al, Zn and mixtures thereof, with a particle size of from 20 to 100 nm, b) a water soluble Ce-salt and c) water, ii) adding an organic or inorganic base to the mixture of step i) at temperatures of from 10 to 90° C. and iii) aging the mixture at temperatures of from 10 to 90° C.; and polishing agents containing the particles and their use for polishing surfaces (FIG. 1).