ARRAY SUBSTRATE, METHOD FOR PREPARING THE SAME, AND DISPLAY DEVICE

    公开(公告)号:US20210375956A1

    公开(公告)日:2021-12-02

    申请号:US16957354

    申请日:2020-02-13

    IPC分类号: H01L27/12

    摘要: The present disclosure provides an array substrate, a method for preparing the same, and a display device. The method includes: forming a metal layer on a base substrate; coating a photoresist on the metal layer; exposing the photoresist by a mask plate in such a manner that an amount of light acting on a first photoresist portion is less than that of light acting on a second photoresist portion to form a first photoresist reserved portion located and a second photoresist reserved portion located; after etching off the metal portion, stripping the first photoresist reserved portion and the second photoresist reserved portion, to obtain the first metal pattern located in the fan-out area and the second metal pattern located in the display area, in which a period size of the first metal pattern being smaller than a period size of the second metal pattern.