公开(公告)号：US06791098B2

公开(公告)日：2004-09-14

申请号：US09803320

申请日：2001-03-09

申请人： Baruch Pletner ,  Richard Perkins ,  Leonard Lublin

发明人： Baruch Pletner ,  Richard Perkins ,  Leonard Lublin

IPC分类号： G01N2186

CPC分类号： G03F7/70725 ,  F16F15/005 ,  F16F15/02 ,  F16F15/0275 ,  F16F2230/08 ,  G03F7/70825 ,  G03F7/70833 ,  G03F7/709 ,  G05D19/02 ,  H04R17/08

摘要： A multi-input, multi-output vibration control system for a lithography system. The system provides an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The system includes a processor programmed with a multi-input, multi-output control technique such as a linear quadratic Gaussian, H-infinity or mu synthesis. The actuator may comprise one or more plates or elements of electroactive material bonded to an electroded sheet.

摘要翻译： 一种用于光刻系统的多输入多输出振动控制系统。 该系统提供致动器和用于控制用于制造电子设备的系统中的振动的传感器。 该系统包括用多输入多输出控制技术编程的处理器，例如线性二次高斯，H无限或mu合成。 致动器可以包括结合到电镀片材上的电活性材料的一个或多个板或元件。

公开(公告)号：US06563128B2

公开(公告)日：2003-05-13

申请号：US10074059

申请日：2002-02-11

申请人： Leonard Lublin ,  David J. Warkentin ,  Baruch Pletner ,  John A. Rule

发明人： Leonard Lublin ,  David J. Warkentin ,  Baruch Pletner ,  John A. Rule

IPC分类号： G01N2186

CPC分类号： F16F15/02 ,  F16F15/005 ,  F16F15/0275 ,  F16F2230/08 ,  G03F7/70725 ,  G03F7/70825 ,  G03F7/70833 ,  G03F7/709

摘要： A system that provides a base stabilization system for controlling motion of a controlled structure. The system includes a ground structure such as the floor of a fabrication facility and the controlled structure includes a base on which equipment is mounted. The system also includes at least three air mounts and a plurality of actuators all attached to the ground structure and to the base to isolate the base from the ground structure and to stabilize the base. The system includes a plurality of position and acceleration sensors each of which are co-located with a corresponding actuator. The system also includes a multi-input, multi output feedback control system comprising a computer processor programmed with a feedback control algorithm for controlling each of the actuators based on feedback signals from each of the sensors. The co-location of the sensors with the actuators avoids serious problems resulting from higher order vibration modes.

摘要翻译： 提供用于控制受控结构的运动的基本稳定系统的系统。 该系统包括诸如制造设备的底板的接地结构，并且受控结构包括安装设备的基座。 该系统还包括至少三个空气支架和多个致动器，所述致动器全部附接到地面结构和底座以将基座与地面结构隔离并稳定基座。 该系统包括多个位置和加速度传感器，每个位置和加速度传感器与相应的致动器共同定位。 该系统还包括多输入多输出反馈控制系统，其包括用基于来自每个传感器的反馈信号控制每个致动器的反馈控制算法编程的计算机处理器。 传感器与执行器的共同位置避免了由较高阶振动模式引起的严重问题。

公开(公告)号：US20060186307A1

公开(公告)日：2006-08-24

申请号：US11260956

申请日：2005-10-27

申请人： Baruch Pletner ,  Gregory Zvonar

发明人： Baruch Pletner ,  Gregory Zvonar

IPC分类号： F16M13/00

CPC分类号： F16F15/00

摘要： Kits and methods for building devices for analyzing or suppressing vibrations in equipment are provided. An electrical-mechanical transducer is configured to be placed in operative contact with the equipment. The transducer may be directly mounted to a base plate that is configured for being mounted to the equipment. A first device (e.g., a printed circuit board) carrying electronic componentry is configured for transmitting vibration drive signals to the electrical-mechanical transducer. A second device (e.g., a printed circuit board) carrying electronic componentry is configured for receiving vibration sensing signals from the electrical-mechanical transducer. The first and second devices can be interchangeably mounted within a housing that can be mounted to the base plate. The housing may comprise an aperture for receiving the electrical-mechanical transducer.

公开(公告)号：US07629728B1

公开(公告)日：2009-12-08

申请号：US12173716

申请日：2008-07-15

申请人： Baruch Pletner ,  Grace R. Kessenich ,  Wesley T. Horth

发明人： Baruch Pletner ,  Grace R. Kessenich ,  Wesley T. Horth

IPC分类号： H01L41/08

CPC分类号： H01L41/08 ,  H01L41/0475 ,  H01L41/053

摘要： A scalable piezoelectric package comprising a plurality of piezoelectric cells, each including a piezoelectric element and an external connector electrically coupled to the piezoelectric element of the respective piezoelectric cell. The piezoelectric package further comprises at least one intercellular conductor electrically coupling the piezoelectric cells together, such that the external connector of each of the piezoelectric cells is electrically coupled to the piezoelectric plate of each of the remaining piezoelectric plates of the piezoelectric cells.

摘要翻译： 一种可缩放的压电封装，包括多个压电单元，每个压电单元包括电耦合到相应的压电单元的压电元件的压电元件和外部连接器。 压电封装还包括至少一个细胞间导体，将压电元件电耦合在一起，使得每个压电单元的外部连接器电耦合到压电单元的每个剩余的压电板的压电板。

公开(公告)号：US07373262B2

公开(公告)日：2008-05-13

申请号：US11262070

申请日：2005-10-27

申请人： Baruch Pletner ,  Gregory A. Zvonar

发明人： Baruch Pletner ,  Gregory A. Zvonar

IPC分类号： G01F17/00

CPC分类号： F16F15/02 ,  G05D19/02

摘要： A method of implementing vibration suppression at equipment residing at a local site includes the steps of transmitting a prompt from a remote site to the local site, automatically sensing vibration response information from the equipment in response to the prompt, and transmitting the sensed vibration response information to the remote site. The method further includes the steps of analyzing the sensed vibration response information at the remote site and creating a vibration suppression algorithm based on the analyzed information. Another prompt is then transferred from the remote site to the local site, and in response thereto, vibrations are induced within the equipment at the local site in accordance with the vibration suppression algorithm, and additional vibration response information from the equipment is sensed. The additional vibration response information is transmitted to and analyzed at the remote site where a modified suppression algorithm is created and transmitted to the local site for suppression of vibrations in the equipment.

摘要翻译： 在驻留在当地的设备上实施振动抑制的方法包括以下步骤：从远程站点向当地站点发送提示，响应于提示自动地感测来自设备的振动响应信息，以及传送所感测到的振动响应信息 到远程站点。 该方法还包括以下步骤：在远程站点分析感测到的振动响应信息，并基于分析的信息创建振动抑制算法。 然后将另一个提示从远程站点传送到本地站点，并且响应于此，根据振动抑制算法在本地的设备内引起振动，并且感测到来自设备的附加的振动响应信息。 附加的振动响应信息被发送到远程站点，并在其中创建修改的抑制算法并将其传输到本地站点，以抑制设备中的振动。

公开(公告)号：US20080079204A1

公开(公告)日：2008-04-03

申请号：US11530877

申请日：2006-09-11

申请人： Baruch Pletner ,  Grace Rose Kessenich

发明人： Baruch Pletner ,  Grace Rose Kessenich

IPC分类号： B60G17/00

CPC分类号： F16F9/0218 ,  F16F9/0227

摘要： A gas spring for suppression vibrations in payloads is provided. The gas spring comprises a piston disposed within the housing. The piston is configured to be displaced relative to the housing in response to vibrations applied to the housing. The piston has first concave or convex surface and a second surface opposing the first surface. The housing is configured to allow a first gaseous medium to apply a first gas pressure to the first concave piston surface, and a second gaseous medium to apply a second gas pressure to the second piston surface, thereby resulting in a net gas pressure force applied to the piston.

摘要翻译： 提供用于抑制有效载荷振动的气弹簧。 气弹簧包括设置在壳体内的活塞。 响应于施加到壳体的振动，活塞构造成相对于壳体移位。 活塞具有第一凹面或凸面以及与第一表面相对的第二表面。 壳体构造成允许第一气体介质将第一气体压力施加到第一凹入活塞表面，以及第二气体介质，以将第二气体压力施加到第二活塞表面，由此导致施加到第二气体压力 活塞。

公开(公告)号：US07656076B1

公开(公告)日：2010-02-02

申请号：US12173696

申请日：2008-07-15

申请人： Baruch Pletner ,  Grace R. Kessenich ,  Wesley T. Horth

发明人： Baruch Pletner ,  Grace R. Kessenich ,  Wesley T. Horth

IPC分类号： H01L41/08

CPC分类号： F16F15/005 ,  H01L41/0475 ,  H01L41/0973 ,  H01L41/312 ,  Y10T29/42

摘要： A piezoelectric package comprises an upper and lower piezoelectric plates, each having opposing electrodes. The piezoelectric package further comprises an electrically insulative structure encapsulating the piezoelectric plates. The piezoelectric package further comprises first and second external connectors mounted to the insulative structure. The connectors respectively have connector terminals that are electrically coupled to the electrodes in different orders, and have geometric arrangements that are identical, such that a single interface device can be selectively mated to either of the connectors. The piezoelectric package may be incorporated into a system that comprises electronic circuitry configured for operating the piezoelectric package, and a single interface device electrically coupled between the electronic circuitry and either of the external connectors of the piezoelectric package to selectively configure the package between a unimorph and a bimorph.

摘要翻译： 压电封装包括上和下压电板，每个具有相对的电极。 压电封装还包括封装压电板的电绝缘结构。 压电封装还包括安装到绝缘结构的第一和第二外部连接器。 连接器分别具有以不同顺序电耦合到电极的连接器端子，并且具有相同的几何布置，使得单个接口装置可以选择性地配合到任一个连接器。 压电封装可以并入到包括被配置为用于操作压电封装的电子电路的系统中，以及电耦合在电子电路和压电封装的任一个外部连接器之间的单个接口装置，以选择性地将封装配置在单压电晶片和 双压电晶片

公开(公告)号：US20100013352A1

公开(公告)日：2010-01-21

申请号：US12173696

申请日：2008-07-15

申请人： Baruch Pletner ,  Grace R. Kessenich ,  Wesley T. Horth

发明人： Baruch Pletner ,  Grace R. Kessenich ,  Wesley T. Horth

IPC分类号： H02N2/06 ,  H01L41/053 ,  H01L41/22

CPC分类号： F16F15/005 ,  H01L41/0475 ,  H01L41/0973 ,  H01L41/312 ,  Y10T29/42

摘要： A piezoelectric package comprises an upper and lower piezoelectric plates, each having opposing electrodes. The piezoelectric package further comprises an electrically insulative structure encapsulating the piezoelectric plates. The piezoelectric package further comprises first and second external connectors mounted to the insulative structure. The connectors respectively have connector terminals that are electrically coupled to the electrodes in different orders, and have geometric arrangements that are identical, such that a single interface device can be selectively mated to either of the connectors. The piezoelectric package may be incorporated into a system that comprises electronic circuitry configured for operating the piezoelectric package, and a single interface device electrically coupled between the electronic circuitry and either of the external connectors of the piezoelectric package to selectively configure the package between a unimorph and a bimorph.

摘要翻译： 压电封装包括上和下压电板，每个具有相对的电极。 压电封装还包括封装压电板的电绝缘结构。 压电封装还包括安装到绝缘结构的第一和第二外部连接器。 连接器分别具有以不同顺序电耦合到电极的连接器端子，并且具有相同的几何布置，使得单个接口装置可以选择性地配合到任一个连接器。 压电封装可以并入到包括被配置为用于操作压电封装的电子电路的系统中，以及电耦合在电子电路和压电封装的任一外部连接器之间的单个接口装置，以选择性地将封装配置在单压电晶片和 双压电晶片

公开(公告)号：US07482731B2

公开(公告)日：2009-01-27

申请号：US11260956

申请日：2005-10-27

申请人： Baruch Pletner ,  Gregory A. Zvonar

发明人： Baruch Pletner ,  Gregory A. Zvonar

IPC分类号： H01L41/08

CPC分类号： F16F15/00

摘要： Kits and methods for building devices for analyzing or suppressing vibrations in equipment are provided. An electrical-mechanical transducer is configured to be placed in operative contact with the equipment. The transducer may be directly mounted to a base plate that is configured for being mounted to the equipment. A first device (e.g., a printed circuit board) carrying electronic componentry is configured for transmitting vibration drive signals to the electrical-mechanical transducer. A second device (e.g., a printed circuit board) carrying electronic componentry is configured for receiving vibration sensing signals from the electrical-mechanical transducer. The first and second devices can be interchangeably mounted within a housing that can be mounted to the base plate. The housing may comprise an aperture for receiving the electrical-mechanical transducer.

摘要翻译： 提供了用于构建设备分析或抑制设备振动的装置和方法。 电气机械换能器被配置成与设备操作地接触。 换能器可以直接安装到被配置为安装到设备的基板上。 承载电子组件的第一装置（例如，印刷电路板）被配置为将振动驱动信号传送到机电换能器。 承载电子组件的第二装置（例如，印刷电路板）被配置为用于接收来自机电换能器的振动感测信号。 第一和第二装置可以互换地安装在可以安装到基板的壳体内。 壳体可以包括用于接收机电换能器的孔。

公开(公告)号：US20060190197A1

公开(公告)日：2006-08-24

申请号：US11262070

申请日：2005-10-27

申请人： Baruch Pletner ,  Gregory Zvonar

发明人： Baruch Pletner ,  Gregory Zvonar

IPC分类号： G01L7/00

CPC分类号： F16F15/02 ,  G05D19/02

摘要： A method of implementing vibration suppression at equipment residing at a local site is provided. The method comprises transmitting a prompt from a remote site to the local site, automatically sensing vibration response information from the equipment in response to the prompt, and transmitting the sensed vibration response information to the remote site. The method further comprises analyzing the sensed vibration response information at the remote site, and creating a vibration suppression algorithm based on the analyzed information. Another prompt is then transmitted from the remote site to the local site, and in response thereto, vibrations are induced within the equipment at the local site in accordance with the vibration suppression algorithm, and additional vibration response information from the equipment is sensed. The additional vibration response information is transmitted to, and analyzed at, the remote site, where a modified vibration suppression algorithm is created and transmitted to the local site for suppression of vibrations in the equipment.

摘要翻译： 提供了一种在驻留在当地场地的设备上实施振动抑制的方法。 该方法包括从远程站点向当地站点发送提示，响应于提示自动感测来自设备的振动响应信息，并将感测到的振动响应信息发送到远程站点。 该方法还包括分析在远程站点处感测的振动响应信息，以及基于分析的信息创建振动抑制算法。 然后将另一提示从远程站点发送到本地站点，并且响应于此，根据振动抑制算法在本地的设备内引起振动，并且感测到来自设备的附加振动响应信息。 附加的振动响应信息被发送到远程站点并在其中进行分析，其中创建修改的振动抑制算法并将其发送到局部位置以抑制设备中的振动。