公开(公告)号：US20120211657A1

公开(公告)日：2012-08-23

申请号：US13416244

申请日：2012-03-09

申请人： Benoit Dupont ,  Aurélie Touvignon ,  Michel Vilain ,  Antoine Dupret

发明人： Benoit Dupont ,  Aurélie Touvignon ,  Michel Vilain ,  Antoine Dupret

IPC分类号： G01J5/10

CPC分类号： G01J5/24 ,  G01J5/20 ,  G01J5/22 ,  H04N5/3651

摘要： An infrared radiation detection device comprising: a substrate; a matrix of at least one line of elements for detecting said radiation, each comprising a resistive imaging bolometer, said matrix being formed above the substrate; means for reading the bolometers of the matrix, means for measuring the temperature in at least one point of the substrate; and means for correcting the signal formed from each bolometer as a function of the temperature measured in at least one point of the substrate. The correcting means are capable of correcting the signal formed from the imaging bolometer by means of a predetermined physical model of the temperature behaviour of said signal.

摘要翻译： 一种红外辐射检测装置，包括：基板; 用于检测所述辐射的至少一行元件的矩阵，每个元件包括电阻成像测辐射热计，所述矩阵形成在所述衬底上; 用于读取基质的辐射热测量仪的装置，用于测量衬底的至少一个点的温度的装置; 以及用于根据在基板的至少一个点测量的温度来校正由每个测辐射热计形成的信号的装置。 校正装置能够通过所述信号的温度特性的预定物理模型校正由成像测辐射热谱仪形成的信号。

公开(公告)号：US08704180B2

公开(公告)日：2014-04-22

申请号：US13416244

申请日：2012-03-09

申请人： Benoît Dupont ,  Aurélie Touvignon ,  Michel Vilain ,  Antoine Dupret

发明人： Benoît Dupont ,  Aurélie Touvignon ,  Michel Vilain ,  Antoine Dupret

IPC分类号： G01J5/24

CPC分类号： G01J5/24 ,  G01J5/20 ,  G01J5/22 ,  H04N5/3651

摘要： An infrared radiation detection device comprising: a substrate; a matrix of at least one line of elements for detecting the radiation, each comprising a resistive imaging bolometer, the matrix being formed above the substrate; a bolometer reading circuit, a temperature measuring device for measuring the temperature in at least one point of the substrate; and a compensation circuit and data processing device for correcting the signal formed from each bolometer as a function of the temperature measured in at least one point of the substrate. The compensation circuit and data processing device capable of correcting the signal formed from the imaging bolometer by using a predetermined physical model of the temperature behavior of the signal.

摘要翻译： 一种红外辐射检测装置，包括：基板; 用于检测辐射的至少一行元件的矩阵，每个元件包括电阻成像测辐射热计，所述基体形成在所述衬底上方; 测辐射热量计读取电路，用于测量衬底的至少一个点的温度的温度测量装置; 以及补偿电路和数据处理装置，用于根据在基板的至少一个点测量的温度来校正由每个测辐射热计形成的信号。 该补偿电路和数据处理装置能够通过使用信号的温度特性的预定物理模型来校正由成像测辐射热谱仪形成的信号。

公开(公告)号：US08158942B2

公开(公告)日：2012-04-17

申请号：US12956350

申请日：2010-11-30

申请人： Benoît Dupont ,  Aurélie Touvignon ,  Michel Vilain ,  Antoine Dupret

发明人： Benoît Dupont ,  Aurélie Touvignon ,  Michel Vilain ,  Antoine Dupret

IPC分类号： G01J5/24

CPC分类号： G01J5/20 ,  G01J5/22 ,  G01J5/24 ,  H04N5/3651

摘要： A device for detecting infrared radiation including a matrix of resistive imaging bolometers above a substrate, a read circuit forming an analog electrical signal constituting an image of the infrared radiation impinging on the matrix, a probe for measuring the temperature of the substrate, an ADC for converting the analogue electrical signals from the read circuit and probe, and a data processing unit for correcting the signal formed by the read circuit according digital values NC(i,j) corresponding to electrical signals from the bolometers exposed to a uniform scene at the measured temperature of the substrate. The data processing unit including a unit for computing the digital values NC(i,j) based on a single set of parameters of a predetermined physical model of the read circuit electrical signals and corresponding to the exposure of the matrix of imaging bolometers to a temperature substantially equal to the measured substrate temperature.

摘要翻译： 一种用于检测红外辐射的装置，包括在衬底上方的电阻成像测辐射热表的矩阵，形成构成射入基体的红外辐射的图像的模拟电信号的读取电路，用于测量衬底的温度的探针， 转换来自读取电路和探针的模拟电信号，以及数据处理单元，用于根据与所测量的暴露于均匀场景的辐射热计的电信号对应的数字值NC（i，j）校正由读取电路形成的信号 基板的温度。 数据处理单元包括用于基于读取电路电信号的预定物理模型的单个参数集计算数字值NC（i，j）的单元，并且对应于成像测辐射热矩阵的曝光与温度 基本上等于测量的基板温度。

公开(公告)号：US20110068272A1

公开(公告)日：2011-03-24

申请号：US12956350

申请日：2010-11-30

申请人： Benoît Dupont ,  Aurélie Touvignon ,  Michel Vilain ,  Antoine Dupret

发明人： Benoît Dupont ,  Aurélie Touvignon ,  Michel Vilain ,  Antoine Dupret

IPC分类号： G01J5/26 ,  G01J5/02

CPC分类号： G01J5/20 ,  G01J5/22 ,  G01J5/24 ,  H04N5/3651

摘要： An infrared radiation detection device comprising: a substrate; a matrix of at least one line of elements for detecting said radiation, each comprising a resistive imaging bolometer, said matrix being formed above the substrate; means for reading the bolometers of the matrix, means for measuring the temperature in at least one point of the substrate; and means for correcting the signal formed from each bolometer as a function of the temperature measured in at least one point of the substrate. The correcting means are capable of correcting the signal formed from the imaging bolometer by means of a predetermined physical model of the temperature behaviour of said signal.

摘要翻译： 一种红外辐射检测装置，包括：基板; 用于检测所述辐射的至少一行元件的矩阵，每个元件包括电阻成像测辐射热计，所述矩阵形成在所述衬底上; 用于读取基质的辐射热测量仪的装置，用于测量衬底的至少一个点的温度的装置; 以及用于根据在基板的至少一个点测量的温度来校正由每个测辐射热计形成的信号的装置。 校正装置能够通过所述信号的温度特性的预定物理模型校正由成像测辐射热谱仪形成的信号。

公开(公告)号：US20090152470A1

公开(公告)日：2009-06-18

申请号：US12328915

申请日：2008-12-05

申请人： Benoit Dupont ,  Michel Vilain

发明人： Benoit Dupont ,  Michel Vilain

IPC分类号： G01J5/02 ,  G01J5/00

CPC分类号： G01J5/24 ,  H04N5/3651

摘要： The invention relates to a device for detecting an electromagnetic radiation comprising a resistive imaging bolometer sensitive to the electromagnetic radiation to be detected, intended to be connected electrically to a signal shaping circuit, and a resistive common mode rejection bolometer that is associated electrically with the imaging bolometer, so that the current flowing through the common mode rejection bolometer is subtracted from the current flowing through the imaging bolometer, wherein it comprises means for controlling the resistance of the common mode rejection bolometer by injecting current therein.

摘要翻译： 本发明涉及一种用于检测电磁辐射的装置，其包括对要被检测的电磁辐射敏感的电阻成像测辐射热计，该电磁辐射计意图与信号整形电路电连接;以及电阻式共模抑制测辐射热谱仪，其与成像电 测量流量计，使流过共模抑制辐射热计的电流从流过成像测辐射热计的电流中减去，其中包括用于通过在其中注入电流来控制共模抑制辐射热计的电阻的装置。

公开(公告)号：US20090008555A1

公开(公告)日：2009-01-08

申请号：US12127976

申请日：2008-05-28

申请人： Benoit Dupont ,  Michel Vilain

发明人： Benoit Dupont ,  Michel Vilain

IPC分类号： G01J5/00

CPC分类号： G01J5/22 ,  H04N5/33 ,  H04N5/361 ,  H04N5/3653

摘要： A device for detecting infrared radiation comprising an array of bolometric detectors which are sensitive to incident radiation and are referred to as “active” and a bolometer which is insensitive to said radiation and is referred to as “blind” formed on a substrate in which a read circuit is produced for sequentially addressing each of the rows of detectors of the array, each of the active bolometers in a single row being biased simultaneously. The read circuit also comprises means of producing a reference current (Iref) based on the blind bolometer; means of simultaneously copying the reference current (Iref) for each column of the array; and a plurality of current integrators, each associated with one column of the array and each designed to integrate the difference between the current flowing through the active bolometer of the row which is currently being read and said thus copied reference current.

摘要翻译： 一种用于检测红外辐射的装置，包括对入射辐射敏感的被称为“有源”的辐射热探测器阵列和对所述辐射不敏感的辐射热计，并在基底上形成“盲” 产生用于顺序寻址阵列的每个检测器行的读取电路，单个行中的每个活动测辐射热板同时偏置。 读取电路还包括基于盲测辐射热计产生参考电流（Iref）的装置; 同时复制阵列的每列的参考电流（Iref）的装置; 以及多个电流积分器，每个电流积分器与阵列的一列相关联，并且每个集成器被设计为整合流过当前正被读取的行的活动测辐射热谱的电流与所述复制的参考电流之间的差。

公开(公告)号：US20120037805A1

公开(公告)日：2012-02-16

申请号：US13277661

申请日：2011-10-20

申请人： Benoit DUPONT ,  Michel Vilain

发明人： Benoit DUPONT ,  Michel Vilain

IPC分类号： G01J5/22

CPC分类号： G01J5/24 ,  G01J5/22 ,  H04N5/33 ,  H04N5/3651 ,  H04N5/3655

摘要： A device for detecting infrared radiation comprising an array of bolometers for detecting radiation; and in order to read each bolometer, a signal shaping circuitry comprising: a circuitry capable of biasing the bolometer at a predetermined voltage in order to make current flow therethrough; a circuitry capable of generating a common-mode current; and a circuitry capable of integrating the difference between the current that flows through the bolometer and the common-mode current. According to the invention, the device comprises a circuitry capable of injecting current into each bolometer in order to shift its resistance by a predetermined quantity that depends on its offset, current injection being performed prior to readout biasing of the bolometer and the shift being performed according to the direction in which the bolometer's resistance varies as a function of temperature. In addition, correction circuitry is capable of shifting the resistances of bolometers towards a common value.

摘要翻译： 一种用于检测红外辐射的装置，包括用于检测辐射的辐射计阵列; 并且为了读取每个测辐射热谱仪，信号整形电路包括：能够以预定电压偏置测辐射热计的电路，以使电流流过其中; 能够产生共模电流的电路; 以及能够整合流经测辐射热计的电流与共模电流之间的差异的电路。 根据本发明，该装置包括能够将电流注入每个测辐射热计的电路，以便将其电阻移动预定量，该预定量取决于其偏移量，在测辐射热计读数偏置之前执行电流注入，并根据 测辐射热计的阻力随温度的变化而变化。 此外，校正电路能够将辐射计的电阻转换成公共值。

公开(公告)号：US20090152465A1

公开(公告)日：2009-06-18

申请号：US12326293

申请日：2008-12-02

申请人： Benoit Dupont ,  Michel Vilain

发明人： Benoit Dupont ,  Michel Vilain

IPC分类号： G01J5/00

CPC分类号： G01J5/24 ,  H04N5/33 ,  H04N5/3655

摘要： A device for detecting infrared radiation comprising a resistive imaging bolometer intended to be electrically connected to a circuit for measuring a resistance of the bolometer. It comprises means of controlling the resistance of the imaging bolometer by injecting current into the bolometer.

摘要翻译： 一种用于检测红外辐射的装置，包括电阻式成像测辐射热计，用于电连接到用于测量测辐射热计的电阻的电路。 它包括通过向测辐射热计注入电流来控制成像测辐射热电阻的方法。

公开(公告)号：US07294836B2

公开(公告)日：2007-11-13

申请号：US11206801

申请日：2005-08-19

申请人： Jean-Jacques Yon ,  Astrid Astier ,  Michel Vilain

发明人： Jean-Jacques Yon ,  Astrid Astier ,  Michel Vilain

IPC分类号： G01J5/20 ,  H01L27/14 ,  H01L31/00

CPC分类号： G01J5/10 ,  G01J5/02 ,  G01J5/023 ,  G01J5/20

摘要： The absorbent membrane of the detector is fixed in suspension by at least one thermally insulating support part onto a front face of a substrate comprising at least two electric connection terminals electrically connected to the membrane, for example by means of conducting layers. The support part has at least one base end and a raised zone. The base end is fixed to a top part of a conducting pillar having a base fixedly secured to one of the electric connection terminals. A substantially flat zone of a bottom face of the membrane is directly in contact with the raised zone of the support part. The support part is preferably formed by a bridge having a second base end fixed to a top part of a second pillar, the raised zone being formed by a flat middle part of the bridge.

摘要翻译： 检测器的吸收膜通过至少一个隔热支撑部件悬挂固定在基板的正面上，该基板包括至少两个电连接端子，电连接端子例如通过导电层电连接到膜。 支撑部分具有至少一个基端和凸起区域。 基端固定到导柱的顶部，导电柱具有牢固地固定到电连接端子之一的基座。 膜的底面的基本上平坦的区域直接与支撑部分的升高区域接触。 支撑部优选地由具有固定到第二柱的顶部的第二基端的桥构成，所述凸起区由桥的平坦的中间部形成。

公开(公告)号：US5930594A

公开(公告)日：1999-07-27

申请号：US676631

申请日：1996-07-10

申请人： Michel Vilain

发明人： Michel Vilain

IPC分类号： G01J5/20 ,  B81B3/00 ,  F15C5/00 ,  H01L21/302 ,  H01L21/3065 ,  H01L49/00 ,  H01L21/00

CPC分类号： B81C1/00658 ,  B81B3/007 ,  F15C5/00 ,  G01J5/20 ,  B81B2203/0118 ,  B81C2201/0109 ,  B81C2201/038

摘要： A method of manufacturing elements of floating rigid microstructures and a device equipped with such elements.This method of manufacturing at least one element of a microstructure (104, 116) in a substrate including a stacking of a support layer (100), a layer (102) of sacrificial material and a structure layer (104) comprises the following steps:a) etching in the substrate a relief structure (108) with lateral sides (110a, 110b)b) formation of a so-called rigidity lining (116) on the lateral sides (110a, 110b),c) removal of the sacrificial material from the relief structure (108) in order to release the floating microstructure.

摘要翻译： 一种制造浮动刚性微结构元件的方法和装备有这些元件的装置。 制造包括支撑层（100），牺牲材料层（102）和结构层（104）的堆叠的衬底中的微结构（104,116）的至少一个元件的这种方法包括以下步骤： a）在衬底中蚀刻具有侧面（110a，110b）的凸版结构（108）b）在侧面（110a，110b）上形成所谓的刚性衬层（116），c）去除牺牲材料 从浮雕结构（108）释放浮动微结构。