公开(公告)号：US08367965B2

公开(公告)日：2013-02-05

申请号：US12199932

申请日：2008-08-28

申请人： Benson Chao ,  Chi-Hua Tseng

发明人： Benson Chao ,  Chi-Hua Tseng

IPC分类号： B23K10/00

CPC分类号： H01J37/3244 ,  H01J37/32009 ,  H01J37/32541 ,  H01J37/32559

摘要： An upper electrode for use in a plasma processing chamber is provided, which includes a center segment and a plurality of outer segments. The outer segments are attached to the center segment to adjust the area of the overall electrode. Gas distribution holes may be selectively formed on the center and outer segments, or both. By adding or removing the outer segments and stacking layers, the dimension of the electrode, the area of gas spurting region and the thickness of the provided upper electrode may be adjusted.

摘要翻译： 提供了一种用于等离子体处理室的上电极，其包括中心部分和多个外部部分。 外部片段附接到中心片段以调整整个电极的面积。 气体分配孔可以选择性地形成在中心部分和外部部分上，或两者。 通过添加或除去外部段和堆叠层，可以调节电极的尺寸，气体喷射区域的面积和所提供的上部电极的厚度。

公开(公告)号：US20130157591A1

公开(公告)日：2013-06-20

申请号：US13437186

申请日：2012-04-02

申请人： Chi-Ho Chang ,  Jui-Chi Huang ,  Jau-Chen Chen ,  Kuei-Ju Lee ,  Chi-Hua Tseng

发明人： Chi-Ho Chang ,  Jui-Chi Huang ,  Jau-Chen Chen ,  Kuei-Ju Lee ,  Chi-Hua Tseng

IPC分类号： H04B1/44

CPC分类号： G01S7/35

摘要： A signal generation and transmission system includes a modulator and an RF transceiver. The RF transceiver includes a voltage-controlled oscillator, a power divider, a low-pass filter, a low-noise amplifier and a mixer. The voltage-controlled oscillator receives a signal from the modulator and produces a frequency modulated continuous wave signal. The power divider receives the frequency modulated continuous wave signal from the voltage-controlled oscillator. The low-pass filter receives the frequency modulated continuous wave signal from the power divider. The low-noise amplifier receives, amplifies and transfers a target echo signal. The mixer combines the frequency modulated continuous wave signal from the power divider with the echo signal of target from the low-noise amplifier so that the two signals are added up or subtracted from each other in a frequency band.

摘要翻译： 信号发生和传输系统包括调制器和RF收发器。 RF收发器包括压控振荡器，功率分配器，低通滤波器，低噪声放大器和混频器。 压控振荡器从调制器接收信号并产生调频连续波信号。 功率分配器从压控振荡器接收调频连续波信号。 低通滤波器从功率分配器接收调频连续波信号。 低噪声放大器接收，放大并传送目标回波信号。 混频器将来自功率分配器的调频连续波信号与来自低噪声放大器的目标的回波信号组合，使得两个信号在频带中相加或相减。

公开(公告)号：US20080006771A1

公开(公告)日：2008-01-10

申请号：US11755705

申请日：2007-05-30

申请人： Chi-Hua Tseng ,  Zhong-Wei Chen ,  Xuedong Liu

发明人： Chi-Hua Tseng ,  Zhong-Wei Chen ,  Xuedong Liu

IPC分类号： G01N23/00

CPC分类号： G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/2449

摘要： An electron beam apparatus and method are presented for collecting side-view and plane-view SEM imagery. The electron beam apparatus includes an electron source, some intermediate lenses if needed, an objective lens and an in-lens sectional detector. The electron source will provide an electron beam. The intermediate lenses focus the electron beam further. The objective lens is a combination of an immersion magnetic lens and a retarding electrostatic lens focuses the electron beam onto the specimen surface. The in-lens detector will be divided into two or more sections to collect secondary electrons emanating from the specimen with different azimuth and polar angle so that side-view SEM imagery can be obtained.

摘要翻译： 提出了一种用于收集侧视图和平面视图SEM图像的电子束装置和方法。 电子束装置包括电子源，如果需要的话，一些中间透镜，物镜和透镜内部分检测器。 电子源将提供电子束。 中间透镜进一步聚焦电子束。 物镜是浸没式磁透镜和阻滞静电透镜的组合，将电子束聚焦在样品表面上。 镜片内检测器将被分为两个或多个部分，以收集具有不同方位角和极角的样品发出的二次电子，从而可以获得侧视SEM图像。

公开(公告)号：US20080296496A1

公开(公告)日：2008-12-04

申请号：US11755718

申请日：2007-05-30

申请人： Yan ZHAO ,  Joe Wang ,  Chi-Hua Tseng

发明人： Yan ZHAO ,  Joe Wang ,  Chi-Hua Tseng

IPC分类号： G01N23/225

CPC分类号： G01N23/225 ,  H01J2237/004 ,  H01J2237/28

摘要： An electron beam apparatus and method are presented for regulating wafer surface potential during e-beam (scanning electron microscopy SEM) inspection and review. Regulating surface potential is often critical to detect voltage contrast (VC) defects of specific type, and sometimes, its also an important factor to achieve high quality SEM images.

摘要翻译： 提出了一种电子束装置和方法，用于在电子束（扫描电子显微镜SEM）检查和评估过程中调节晶片表面电位。 检测表面电位对于检测特定类型的电压对比（VC）缺陷往往至关重要，有时也是实现高质量SEM图像的重要因素。

公开(公告)号：US07705301B2

公开(公告)日：2010-04-27

申请号：US11755705

申请日：2007-05-30

申请人： Chi-Hua Tseng ,  Zhong-Wei Chen ,  Xuedong Liu

发明人： Chi-Hua Tseng ,  Zhong-Wei Chen ,  Xuedong Liu

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/2449

摘要： An electron beam apparatus and method are presented for collecting side-view and plane-view SEM imagery. The electron beam apparatus includes an electron source, some intermediate lenses if needed, an objective lens and an in-lens sectional detector. The electron source will provide an electron beam. The intermediate lenses focus the electron beam further. The objective lens is a combination of an immersion magnetic lens and a retarding electrostatic lens focuses the electron beam onto the specimen surface. The in-lens detector will be divided into two or more sections to collect secondary electrons emanating from the specimen with different azimuth and polar angle so that side-view SEM imagery can be obtained.

摘要翻译： 提出了一种用于收集侧视图和平面视图SEM图像的电子束装置和方法。 电子束装置包括电子源，如果需要的话，一些中间透镜，物镜和透镜内部分检测器。 电子源将提供电子束。 中间透镜进一步聚焦电子束。 物镜是浸没式磁透镜和阻滞静电透镜的组合，将电子束聚焦在样品表面上。 镜片内检测器将被分为两个或多个部分，以收集具有不同方位角和极角的样品发出的二次电子，从而可以获得侧视SEM图像。