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    SENSOR HAVING A HOUSING SEAL MADE OF SYNTHETIC RUBBERS HAVING DIFFERING ELASTICITY
    1.
    发明申请
    SENSOR HAVING A HOUSING SEAL MADE OF SYNTHETIC RUBBERS HAVING DIFFERING ELASTICITY 有权
    具有不同弹性的合成橡胶的壳体密封传感器

    公开(公告)号：US20140326069A1

    公开(公告)日：2014-11-06

    申请号：US14343539

    申请日：2012-07-23

    申请人： Bernd Rattay ,  Jens Schneider ,  Guido Soyez ,  Arno Clauss

    发明人： Bernd Rattay ,  Jens Schneider ,  Guido Soyez ,  Arno Clauss

    IPC分类号： G01N33/00 ,  G01D11/24

    CPC分类号： G01N33/0036 ,  G01D11/245 ,  G01N27/4062

    摘要： A sensor for determining at least one property of a measuring gas in a measuring gas space is provided. The sensor has a housing which includes a housing opening. At least one connection cable is led from the housing through the housing opening. The sensor further includes at least one sealing body, in particular a grommet, the sealing body at least partially enclosing the connection cable. The sealing body has at least one first section and at least one second section, the first section having a higher deformability than the second section.

    摘要翻译： 提供了用于确定测量气体空间中的测量气体的至少一个性质的传感器。 传感器具有包括壳体开口的壳体。 至少一个连接电缆从外壳通过外壳开口引出。 传感器还包括至少一个密封体，特别是索环，密封体至少部分地包围连接电缆。 密封体具有至少一个第一部分和至少一个第二部分，第一部分具有比第二部分更高的变形能力。

    EXHAUST GAS SENSOR
    5.
    发明申请
    EXHAUST GAS SENSOR 审中-公开
    排气传感器

    公开(公告)号：US20150027888A1

    公开(公告)日：2015-01-29

    申请号：US14377114

    申请日：2013-01-04

    申请人： Guido Soyez ,  Frank Stanglmeier ,  Jens Schneider ,  Eckart Reihlen

    发明人： Guido Soyez ,  Frank Stanglmeier ,  Jens Schneider ,  Eckart Reihlen

    IPC分类号： G01N27/407 ,  F16J15/02

    CPC分类号： G01N27/4078 ,  F16J15/022 ,  Y10T29/49826

    摘要： A stopper is described for sealing a housing of an exhaust gas sensor, in which the stopper has a base body which contains a fluoroelastomer, and in which the stopper has at least one through channel for leading through a connecting cable. A seal is situated, at least in places, between the base body of the stopper and the through channel. The seal contains at least one thermoplastically processable fluoropolymer-containing material having a melting point or melting range between 170° C. and 320° C.

    摘要翻译： 描述了用于密封排气传感器的壳体的止动器，其中止动件具有包含含氟弹性体的基体，并且其中止动件具有至少一个通过连接电缆引导的通道。 密封件至少位于止动件的基体和贯通通道之间。 该密封件含有至少一种可热塑性加工的含氟聚合物材料，其熔点或熔点在170℃至320℃之间。

    METHOD FOR SETTING AN OPTICAL IMAGING PROPERTY IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS, AND PROJECTION EXPOSURE APPARATUS OF THIS TYPE
    7.
    发明申请
    METHOD FOR SETTING AN OPTICAL IMAGING PROPERTY IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS, AND PROJECTION EXPOSURE APPARATUS OF THIS TYPE 审中-公开
    用于在微型投影曝光装置中设置光学成像性质的方法和该类型的投影曝光装置

    公开(公告)号：US20080218716A1

    公开(公告)日：2008-09-11

    申请号：US12044743

    申请日：2008-03-07

    申请人： Stephan Back ,  Guido Soyez ,  Joachim Buechele ,  Annette Muehlpfordt

    发明人： Stephan Back ,  Guido Soyez ,  Joachim Buechele ,  Annette Muehlpfordt

    IPC分类号： G03B27/42

    CPC分类号： G03F7/70516 ,  G03F7/70258 ,  G03F7/70341

    摘要： In some embodiments, the disclosure provides a method for setting an optical imaging property in a microlithographic projection exposure apparatus via which a mask can be imaged onto a substrate having a light-sensitive surface, wherein the substrate can be moved stepwise in a direction transversely with respect to an optical axis relative to a projection objective. The method can include introducing an immersion medium under a predetermined pressure and/or with a predetermined flow rate into at least one first interspace, wherein the at least one first interspace—as seen along the optical axis—is arranged within an illumination system and/or the projection objective and/or between the illumination system and the mask and/or the mask and the projection objective and/or the projection objective and the substrate. The method can also include monitoring an actual pressure and/or an actual flow rate of the immersion medium for deviation from the predetermined pressure and/or the predetermined flow rate.

    摘要翻译： 在一些实施例中，本公开提供了一种用于在微光刻投影曝光设备中设置光学成像特性的方法，通过该方法，可以将掩模成像到具有感光表面的基板上，其中基板可以沿与横向方向横向的方向逐步移动 相对于投影物镜的光轴。 该方法可以包括将预定压力和/或以预定流量的浸入式介质引入到至少一个第一间隙中，其中至少一个沿光轴观察的第一间隙布置在照明系统内和/ 或投影物镜和/或照明系统与掩模和/或掩模以及投影物镜和/或投影物镜和基片之间。 该方法还可以包括监测用于偏离预定压力和/或预定流量的浸没介质的实际压力和/或实际流量。