Device and method for producing crystalline bodies by directional solidification
    3.
    发明授权
    Device and method for producing crystalline bodies by directional solidification 有权
    通过定向凝固生产结晶体的装置和方法

    公开(公告)号:US08845805B2

    公开(公告)日:2014-09-30

    申请号:US12866497

    申请日:2008-02-14

    IPC分类号: C30B11/14 C30B29/06 C30B11/00

    摘要: The invention relates to a device and a method for producing crystalline bodies by directional solidification. The device comprises a melting furnace (11) having a heating chamber (12) in which at least one supporting surface (13) for a crucible (8) and at least one gas purging device arranged above the supporting surface (13) and having a gas outlet facing the supporting surface (13) are defined. An embodiment of the device is characterized in that the gas outlet is defined by one or more openings in a lower plunger surface of a plunger-shaped element (2) which has a geometry adapted to the inner shape of the crucible (8), said shape allowing an at least partial insertion of the plunger-shaped body (2) into the crucible (8). The gas purging device and/or the supporting surface (13) comprise an adjusting mechanism or are designed to be adjustable in such a manner that they allow an adjustment of a perpendicular distance between the supporting surface (13) and the plunger-shaped body (2). The device and the corresponding method allow carbon- and oxygen-containing materials to be discharged from the melt more efficiently and in a controlled manner. The device and the method thus allow—within certain limits—a specific adjustment of the carbon and oxygen content of the crystalline bodies.

    摘要翻译: 本发明涉及通过定向凝固生产结晶体的装置和方法。 该装置包括具有加热室(12)的熔炉(11),其中至少一个用于坩埚(8)的支撑表面(13)和至少一个排气装置布置在支撑表面(13)的上方,并具有 限定了面向支撑表面(13)的气体出口。 装置的一个实施例的特征在于,气体出口由柱塞形元件(2)的下柱塞表面中的一个或多个开口限定,柱塞形元件(2)具有适于坩埚(8)内部形状的几何形状 形状允许柱塞形体(2)至少部分地插入坩埚(8)中。 气体净化装置和/或支撑表面(13)包括调节机构或被设计成可调节的,使得它们允许调节支撑表面(13)和柱塞形体(13)之间的垂直距离 2)。 该装置和相应的方法允许含碳和含氧材料更有效地以受控的方式从熔体中排出。 因此,该装置和方法允许在一定限度内 - 结晶体的碳和氧含量的具体调整。

    DEVICE AND METHOD FOR PRODUCING CRYSTALLINE BODIES BY DIRECTIONAL SOLIDIFICATION
    4.
    发明申请
    DEVICE AND METHOD FOR PRODUCING CRYSTALLINE BODIES BY DIRECTIONAL SOLIDIFICATION 有权
    通过方向固化生产结晶体的装置和方法

    公开(公告)号:US20100320638A1

    公开(公告)日:2010-12-23

    申请号:US12866497

    申请日:2008-02-14

    IPC分类号: B29C51/08 B29C51/20

    摘要: The invention relates to a device and a method for producing crystalline bodies by directional solidification. The device comprises a melting furnace (11) having a heating chamber (12) in which at least one supporting surface (13) for a crucible (8) and at least one gas purging device arranged above the supporting surface (13) and having a gas outlet facing the supporting surface (13) are defined. An embodiment of the device is characterized in that the gas outlet is defined by one or more openings in a lower plunger surface of a plunger-shaped element (2) which has a geometry adapted to the inner shape of the crucible (8), said shape allowing an at least partial insertion of the plunger-shaped body (2) into the crucible (8). The gas purging device and/or the supporting surface (13) comprise an adjusting mechanism or are designed to be adjustable in such a manner that they allow an adjustment of a perpendicular distance between the supporting surface (13) and the plunger-shaped body (2). The device and the corresponding method allow carbon- and oxygen-containing materials to be discharged from the melt more efficiently and in a controlled manner. The device and the method thus allow—within certain limits—a specific adjustment of the carbon and oxygen content of the crystalline bodies.

    摘要翻译: 本发明涉及通过定向凝固生产结晶体的装置和方法。 该装置包括具有加热室(12)的熔炉(11),其中至少一个用于坩埚(8)的支撑表面(13)和至少一个排气装置布置在支撑表面(13)的上方,并具有 限定了面向支撑表面(13)的气体出口。 装置的一个实施例的特征在于,气体出口由柱塞形元件(2)的下柱塞表面中的一个或多个开口限定,柱塞形元件(2)具有适于坩埚(8)内部形状的几何形状 形状允许柱塞形体(2)至少部分地插入坩埚(8)中。 气体净化装置和/或支撑表面(13)包括调节机构或被设计成可调节的,使得它们允许调节支撑表面(13)和柱塞形体(13)之间的垂直距离 2)。 该装置和相应的方法允许含碳和含氧材料更有效地以受控的方式从熔体中排出。 因此,该装置和方法允许在一定限度内 - 结晶体的碳和氧含量的具体调整。

    Method For The Production Of Group III Nitride Bulk Crystals Or Crystal Layers From Fused Metals
    5.
    发明申请
    Method For The Production Of Group III Nitride Bulk Crystals Or Crystal Layers From Fused Metals 有权
    用于生产熔融金属的III族氮化物体晶体或晶体层的方法

    公开(公告)号:US20080118648A1

    公开(公告)日:2008-05-22

    申请号:US11664369

    申请日:2005-10-04

    IPC分类号: B05D3/02 B05D3/04

    摘要: The present invention relates to a method for the production of crystal layers or bulk crystals of group III nitride or of mixtures of different group III nitrides by means of precipitation, at a first temperature T1 in a first temperature range, from a group-III containing fused metal on a group-III-nitride crystal seed placed in the fused metal or on a foreign substrate placed in the fused metal, with the admixture of nitrogen in the fused metal at a pressure P.With the method a solvent additive is added to the fused metal which increases the conversion rate of group III metal to group III nitride in the fused metal. The fused metal runs through at least one temperature cycle with a first and a second process phase in which cycle the fused metal cools after the first process phase from the first temperature to a second temperature T2 below the first temperature range and at the end of the second process phase is heated from the second temperature back to a temperature within the first temperature range. The described method permits producing group III nitride crystal layers with a thickness of >10 μm, respectively massive crystals with a diameter of >10 mm at dislocation densities of

    摘要翻译: 本发明涉及在第一温度T 1中通过沉淀生产III族氮化物或不同III族氮化物的混合物的晶体层或本体晶体的方法 范围,从放置在熔融金属中的III族氮化物晶体晶种上的第III族熔融金属或放置在熔融金属中的异质衬底上,在熔融金属中以氮气的混合压力P。 该方法将熔融金属中添加溶剂添加剂,这增加了熔融金属中III族金属与III族氮化物的转化率。 熔融金属在第一和第二工艺阶段中延伸至少一个温度循环,其中熔融金属在第一工艺阶段之后从第一温度冷却至低于第一工艺阶段的第二温度T <2> 温度范围和第二工艺阶段结束时从第二温度加热到第一温度范围内的温度。 所描述的方法允许生产厚度>10μm的III族氮化物晶体层,分别为<10 -8 cm -2的位错密度,直径> 10mm的大块晶体, SUP>在低于1100℃的温度下,处理压力低于5×10 5 Pa。

    Method for the production of group III nitride bulk crystals or crystal layers from fused metals
    8.
    发明授权
    Method for the production of group III nitride bulk crystals or crystal layers from fused metals 有权
    从熔融金属生产III族氮化物本体晶体或晶体层的方法

    公开(公告)号:US08728233B2

    公开(公告)日:2014-05-20

    申请号:US11664369

    申请日:2005-10-04

    IPC分类号: C30B11/00

    摘要: The present invention relates to a method for the production of crystal layers or bulk crystals of group III nitride or of mixtures of different group III nitrides by means of precipitation, at a first temperature T1 in a first temperature range, from a group-III containing fused metal on a group-III-nitride crystal seed placed in the fused metal or on a foreign substrate placed in the fused metal, with the admixture of nitrogen in the fused metal at a pressure P.With the method a solvent additive is added to the fused metal which increases the conversion rate of group III metal to group III nitride in the fused metal. The fused metal runs through at least one temperature cycle with a first and a second process phase in which cycle the fused metal cools after the first process phase from the first temperature to a second temperature T2 below the first temperature range and at the end of the second process phase is heated from the second temperature back to a temperature within the first temperature range. The described method permits producing group III nitride crystal layers with a thickness of >10 μm, respectively massive crystals with a diameter of >10 mm at dislocation densities of

    摘要翻译: 本发明涉及通过在第一温度范围内的第一温度T1,从含III族氮化物的第III族氮化物的III族氮化物 将熔融金属放置在置于熔融金属中的第III族氮化物晶体种子上或置于熔融金属中的异质基底上,在熔融金属中以氮气的混合压力P。用该方法将溶剂添加剂 熔融金属,其增加熔融金属中III族金属与III族氮化物的转化率。 熔融金属穿过至少一个具有第一和第二工艺阶段的温度循环,其中熔融金属在第一工艺阶段之后从第一温度冷却到低于第一温度范围的第二温度T2, 第二工艺阶段从第二温度加热到第一温度范围内的温度。 所述方法允许在低于1100℃的温度下在≤108cm-2的位错密度下生产厚度>10μm的III族氮化物晶体层,分别为直径> 10mm的大块晶体,工艺压力低于5× 105 Pa